• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.2
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• pp.164-168
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• 2005

Piezoelectric ZnO thin films were for the first time formed on SiO$_2$/Si(100) substrate using 2-step deposition, atomic layer deposition(ALD) and RF magnetron sputtering deposition, for film bulk acoustic resonator(FBAR) applications. The ZnO buffer layer by ALD was deposited using alternating diethyl zinc(DEZn)/$H_2O$ exposures and ultrahigh purity argon gas for purging. The ZnO films by 2-step deposition revealed stronger c-axis-preferred orientation and smoother surface than those by the conventional RF sputtering method. The solidly mounted resonator(SMR)-typed FBAR fabricated by using 2-step deposition method revealed higher quality factor of 580 and lower return loss of -17.35dB. Therefore the 2-step deposition method in this study could be applied to the FBAR device fabrication.

• Journal of the Mineralogical Society of Korea
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• v.2 no.2
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• pp.100-106
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• 1989

Die Titan-Augite sind die dominierenden Einsprenglings- und Grundmassephasen in allen tephritischen Gesteinen im Kaiserstuhl. Mg-Werte ($Mg/Mg+Fe^{2+}+Mn$) der Pyroxene schwanken von 60-85. Der FATS- und TITS-Anteil nimmt von phonolithischem Basanit und -Tephrit zum fraktionierten phonolithischen Tephrit hin ab. Die Kpx der einzelnen Gesteinsgruppen zeigen auch einen Fraktionier-ungstrend, der durch Abnahme von Si und Zunahme von Al vom phonolithischen Basanit und -Tephrit zum fraktionierten phonolithischen Tephrit gekennzeichnet ist. Der in Alkaligesteinen gewohnlich auftretende $gr{\ddot{u}}ne$ Kern der Px ist Fe-reicher und $Ti-{\ddot{a}}rmer$ als der $hellbra{\ddot{u}}nliche$-farblose Rand. Die $gr{\ddot{u}}nen$ Kerne weisen $gegen{\ddot{u}}ber$ den $hellbr{\ddot{a}}unlichen$ Randern $h{\ddot{o}}here$ $Na/Fe^{+3}$-Verhaltnisse auf.

• Korean Journal of Materials Research
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• v.30 no.8
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• pp.399-405
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• 2020

In the present investigation we show the effect of Al doping on the length, size, shape, morphology, and sensing property of ZnO nanorods. Effect of Al doping ultimately leads to tuning of electrical and optical properties of ZnO nanorods. Undoped and Al-doped well aligned ZnO nanorods are grown on sputtered ZnO/SiO₂/Si (100) pre-grown seed layer substrates by hydrothermal method. The molar ratio of dopant (aluminium nitrate) in the solution, [Al/Zn], is varied from 0.1 % to 3 %. To extract structural and microstructural information we employ field emission scanning electron microscopy and X-ray diffraction techniques. The prepared ZnO nanorods show preferred orientation of ZnO <0001> and are well aligned vertically. The effects of Al doping on the electrical and optical properties are observed by Hall measurement and photoluminescence spectroscopy, respectively, at room temperature. We observe that the diameter and resistivity of the nanorods reach their lowest levels, the carrier concentration becomes high, and emission peak tends to approach the band edge emission of ZnO around 0.5% of Al doping. Sensing behavior of the grown ZnO nanorod samples is tested for H₂ gas. The 0.5 mol% Al-doped sample shows highest sensitivity values of ~ 60 % at 250 ℃ and ~ 50 % at 220 ℃.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.354-355
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• 2013

최근 디스플레이 분야에서 amorphous InGaZnO (a-IGZO) thin film transistors (TFTs)는 a-Si:H에 비해 비정질 상태에서도 비교적 높은 이동도를 가지고 다결정 Si 반도체에 비해 저온공정이 가능하고 대면적화가 용이한 장점 때문에 주목받고 있다. 또한 넓은 밴드갭을 가지기 때문에 가시광선 영역에서 투명하여 투명소자에도 응용이 가능하다. 본 연구에서는 RF magnetron sputtering법을 이용하여 RF power의 변화에 따라 IGZO 박막의 positive bias stress (PBS)에 대한 안정성을 조사하였다. 소결된 타겟으로는 In:Ga:ZnO를 각각 2:2:1 mol%의 조성비로 소결하여 이용하였고, 공정 조건은 초기 압력 Torr, 증착 압력 Torr, Ar：O2=18：12 sccm로 고정하였다. 공정 변수로는 130 W, 150 W, 170 W, 200 W로 변화를 주어 실험을 진행하였다. PBS 측정은 gate bias를 10 V로 고정하여 stress 시간을 각각 0, 30, 100, 300, 1,000, 3,000, 7,000초를 적용하였다. 측정 결과 RF power가 증가할수록 문턱전압의 변화량이 증가하는 것을 보였다. 130 W의 경우 4.47 V의 변화량을 보였지만 200 W의 경우는 10.01 V로 증가되어 나타났다. 따라서 RF power을 낮추어 만들어진 소자의 경우 RF power를 높여 만들어진 소자에 비해 PBS에 대한 안정성이 더 높은 결과를 확인하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.718-721
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• 2004

The $(Sr_{0.9}Ca_{0.1})TiO_3$(SCT) thin films are deposited on Pt-coated electrode$(Pt/TiN/SiO_2/Si)$ using RF sputtering method at various substrate temperature. The optimum conditions of RF power and $Ar/O_2$ ratio were 140[W] and 80/20, respectively. Deposition rate of SCT thin films was about $18.75[{\AA}/min]$. The crystallinity of SCT thin films were increased with increase of substrate temperature in the temperature range of $100\sim500[^{\circ}C]$. The dielectric constant of SCT thin films were increased with the increase of substrate temperature, and changed almost linearly in temperature ranges of $-80\sim+190[^{\circ}C]$. The current-voltage characteristics of SCT thin films showed the increasing leakage current as the substrate temperature increases.

• Journal of Surface Science and Engineering
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• v.34 no.5
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• pp.421-428
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• 2001

New WC-CrN superlattice film was deposited on Si substrate (500$\mu\textrm{m}$) using cathodic arc ion plating system. The microstructure and mechanical properties of the film depend on the superlattice period (λ). In the X-ray diffraction analysis (XRD), preferred orientation of microstructure was changed according to various superlattice periods(λ). During the Transmission Electron Microscope analysis (TEM), microstructure and superlattice period (λ) of the WC - CrN superlattice film was confirmed. Hardness and adhesion of the deposited film was evaluated by nanoindentation test and scratch test, respectively. As a result of nanoindentation test, the hardness of WC - CrN superlattice film was gained about 40GPa at superlattice period (λ) with 7nm. Also residual stress with various superlattice period (λ) was measured on Si wafer (100$\mu\textrm{m}$) by conventional beam-bending technique. The residual stress of the film was reduced to a value of 0.2 GPa by introducing Ti - WC buffer layers periodically with a thickness ratio ($t_{buffer}$/$t_{buffer+superlattice}$ ). To the end, for the evaluation of oxidation resistance at the elevated temperature, CrN single layer and WC - CrN superlattice films with various superlattice periods on SKD61 substrate was measured and compared with the oxidation resistance.

• Economic and Environmental Geology
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• v.50 no.4
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• pp.257-266
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• 2017

Batch experiments were performed to develop the method for the pH reduction of recycled aggregate by using $scCO_2$ (supercritical $CO_2$), maintaining the pH of extraction water below 9.8. Three different aggregate types from a domestic company were used for the $scCO_2$-water-recycled aggregate reaction to investigate the low pH maintenance of aggregate during the reaction. Thirty five gram of recycled aggregate sample was mixed with 70 mL of distilled water in a Teflon beaker, which was fixed in a high pressurized stainless steel cell (150 mL of capacity). The inside of the cell was pressurized to 100 bar and each cell was located in an oven at $50^{\circ}C$ for 50 days and the pH and ion concentrations of water in the cell were measured at a different reaction time interval. The XRD and SEM-EDS analyses for the aggregate before and after the reaction were performed to identify the mineralogical change during the reaction. The extraction experiment for the aggregate was also conducted to investigate the pH change of extracted water by the $scCO_2$ treatment. The pH of the recycled aggregate without the $scCO_2$ treatment maintained over 12, but its pH dramatically decreased to below 7 after 1 hour reaction and maintained below 8 for 50 day reaction. Concentration of $Ca^{2+}$, $Si^{4+}$, $Mg^{2+}$ and $Na^+$ increased in water due to the $scCO_2$-water-recycled aggregate reaction and lots of secondary precipitates such as calcite, amorphous silicate, and hydroxide minerals were found by XRD and SEM-EDS analyses. The pH of extracted water from the recycled aggregates without the $scCO_2$ treatment maintained over 12, but the pH of extracted water with the $scCO_2$ treatment kept below 9 of pH for both of 50 day and 1 day treatment, suggesting that the recycled aggregate with the $scCO_2$ treatment can be reused in real construction sites.

• Journal of the Korean Applied Science and Technology
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• v.17 no.1
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• pp.1-5
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• 2000

The selective catalytic reduction(SCR) of nitric oxide by ethane in the presence of oxygen was investigated on Cu-ZSM-5, Co-ZSM-5 and Ga-ZSM-5 catalysts over a range of 400, 450 and $500^{\circ}C$. The catalysts were prepared by ion-exchange method. The composition of the reactant gases were 1000 ppm of NO, 1000 ppm of $C_{2}H_{6}$ and 2.5% of $O_{2}$, and the reaction was conducted in a fixed-bed reactor at 1 atm. For the 20wt% Co-ZSM-5(50) catalyst, the NO conversion reached up to 100%, while the $C_2H_6$ conversion and the CO selectivity were about 50% and 25%, respectively, at $450^{\circ}C$. For the 20wt% Cu-ZSM-5(50) catalyst, the NO conversion and the C2H6 conversion were about 80% and 100%, respectively, but there was no CO produced. The metal ion-exchanged ZSM-5 catalysts exhibited a tendency to increase the NO conversion with the Si/Al ratio of the ZSM-5, that is, NO conversion was inversely proportional to the acidity of the catalysts. But, the effect of the acidity on NO conversion was not so large. From the XRD results of the catalysts before and after SCR reaction it was found that there was no structural change.

• Nuclear Engineering and Technology
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• v.39 no.6
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• pp.747-752
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• 2007

The Proton Engineering Frontier Project (PEFP) has designed and developed a proton linear accelerator facility operating at 100 MeV - 20 mA. The radiological effects of such a nuclear facility on the environment are important in terms of radiation safety. This study estimated the production rates of radionuclides in the soil around the accelerator facility using MCNPX. The groundwater migration of the radioisotopes was also calculated using the Concentration Model. Several spallation reactions have occurred due to leaked neutrons, leading to the release of various radionuclides into the soil. The total activity of the induced radionuclides is approximately $2.98{\times}10^{-4}Bq/cm^3$ at the point of saturation. $^{45}Ca$ had the highest production rate with a specific activity of $1.78{\times}10^{-4}Bq/cm^3$ over the course of one year. $^3H$ and $^{22}Na$ are usually considered the most important radioisotopes at nuclear facilities. However, only a small amount of tritium was produced around this facility, as the energy of most neutrons is below the threshold of the predominant reactions for producing tritium: $^{16}O(n,\;X)^3H$ and $^{28}Si(n,X)^3H$ (approximately 20 MeV). The dose level of drinking water from $^{22}Na$ was $1.48{\times}10^{-5}$ pCi/ml/yr, which was less than the annual intake limit in the regulations.

• Korean Journal of Food Science and Technology
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• v.24 no.4
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• pp.341-346
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• 1992

The antimutagenic effects of enzymatic browning reaction products (MEBRPs) of polyphenol compounds (catechol, homocatechol, hydroxyhydroquinone, pyrogallol) by enzyme extracted from mushroom (Agaricus bisporus) were demonstrated through spore rec-assay using B. subtilis $H17(rec^+)$ and $M45(rec^-)$, Ames test using S. typhimurium TA98 and TA100 and SOS chromotest using E. coli PQ37/plasmid pKM101. In spore rec-assay, the MEBRPs showed antimutagenic effects by decreasing of the inhibition zone induced by MNNG. In Ames test with S-9mix in both TA98 and TA100, all of MEBRPs showed strong antimutagenic effects of about 21 to 99% against mutation by $B({\alpha})P$ and Trp-P-1, as adding $300\;{\mu}l$ of the MEBRPs. In SOS chromotest, MEBRPs showed antimutagenic effects by inhibiting the SOS-inducing function induced by 4NQO and MMC, as increasing in concentration of the MEBRPs. But they did not showed mutagenicity in these bacterial assays.