• 제목/요약/키워드: H/D ratio

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컨택 산화막 에칭에서의 바닥 모양 찌그러짐 변형 개선 (The Improvement of Profile Tilt in High Aspect Ratio Contact)

  • 황원태;최성길;권상동;임장빈;정상섭;박영욱
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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    • pp.666-670
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    • 2004
  • VLSI 소자에서 design rule(D/R)이 작아져 각 단위 Pattern의 size가 작아짐에 따라 aspect ratio가 커지게 되었다. 산화막 contact etch를 하는데 있어 산화막 측벽을 보호하는데, 이러한 보호막은 주로 fluoro-carbon 계열의 polymer precursor들이 사용된다. Aspect ratio(A/R)가 5 이하일 때에는 측벽의 보호막에 의한 바닥 변형이 문제가 되지 않으나, 10 이상의 A/R를 가진 contact에서는 크기가 줄고, 모양이 불균형하게 변하는 바닥 변형을 쉴게 관찰할 수 있다. 이러한 바닥 변형이 커지면 contact 저항이 높아지는 것은 물론이고, 심하게는 하부 pattern과 overlap 불량을 유발할 수 있다. 본 논문에서는 바닥변형을 일으키는 원인을 분석하고 fluoro-carbon 계열의 polymer precursor의 종류$(C_4_F6\;vs.\;C_3F_8)$에 따른 polymer증착 상태 확인 및 pattern비대칭에 따른 바닥 변형의 고찰과 plasma etching 시 H/W 변형을 통해 바닥 변형이 거의 없는 조건을 찾아낼 수 있었다.

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Effects of turbulence intensity and exterior geometry on across-wind aerodynamic damping of rectangular super-tall buildings

  • Quan, Y.;Cao, H.L.;Gu, M.
    • Wind and Structures
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    • 제22권2호
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    • pp.185-209
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    • 2016
  • Across-wind aerodynamic damping ratios are identified from the wind-induced acceleration responses of 15 aeroelastic models of rectangular super-high-rise buildings in various simulated wind conditions by using the random decrement technique. The influences of amplitude-dependent structural damping ratio and natural frequency on the estimation of the aerodynamic damping ratio are discussed and the identifying method for aerodynamic damping is improved at first. Based on these works, effects of turbulence intensity $I_u$, aspect ratio H/B, and side ratio B/D on the across-wind aerodynamic damping ratio are investigated. The results indicate that turbulence intensity and side ratio are the most important factors that affect across-wind aerodynamic damping ratio, whereas aspect ratio indirectly affects the aerodynamic damping ratio by changing the response amplitude. Furthermore, empirical aerodynamic damping functions are proposed to estimate aerodynamic damping ratios at low and high reduced speeds for rectangular super-high-rise buildings with an aspect ratio in the range of 5 to 10, a side ratio of 1/3 to 3, and turbulence intensity varying from 1.7% to 25%.

The D/H ratio of N2H+ in the inner envelope of YSOs

  • Baek, Giseon;Lee, Jeong-Eun
    • 천문학회보
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    • 제42권2호
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    • pp.89.3-89.3
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    • 2017
  • Recent interferometric observations toward embedded protostellar systems show a clear offset between the emission peaks of N2D+ and N2H+. However, the chemical model that con-siders solely freeze-out and desorption from the dust grains could not reproduce the ob-servations. This difference between two spe-cies in the depletion zone might be caused by the reduction of the deuterated molecules, due to the reactions on grain surfaces. We present that the abundance offset between N2H+ and N2D+ can be explained if the chemi-cal model includes the surface chemistry, especially for the deuterated.

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생분해에 따른 PLGA 멤브레인의 분해속도 및 pH 변화에 대한 연구 (Study on the degradation rate and pH change of PLGA membrane with a biodegradation)

  • 시에위잉;박종순;강순국
    • 한국산학기술학회논문지
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    • 제16권9호
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    • pp.6403-6410
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    • 2015
  • 의료용 고분자 PLGA는 높은 생체적합성, 생분해성, 기계적 특성, 생체안정성을 가지고 있으며, 단량체 수량을 조절함으로서 분해기간을 조절할 수 있는 장점이 있다. 본 논문에서는 상전이법을 이용하여 제조된 분자량과 L/D 타입 구성비가 다른 PLGA 멤브레인들을 인산완충생리식염수 하에서 멤브레인의 분자량과 용액의 온도 조건에 따른 생분해 특성을 유추하기 위하여 질량 변화와 용액의 pH값 측정하였으며, DSC와 실사현미경을 이용하여 Tg와 표면구조의 변화을 파악하였다. PLGA의 분자량이 증가할수록 가수분해속도는 기하급수적으로 감소하고 있으며, L/D 타입 구성비에 따라 분해속도와 용액 pH변화의 차이가 크게 나타났다.

Determining of the Effect of Lysine:calorie Ratio on Growth Performance and Blood Urea Nitrogen of Growing Barrows and Gilts in Hot Season and Cool Season in a Commercial Environment

  • Zhang, Z.F.;Kim, I.H.
    • Asian-Australasian Journal of Animal Sciences
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    • 제26권3호
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    • pp.401-407
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    • 2013
  • Two experiments were conducted to determine an optimum Lys:calorie ratio (g of total dietary Lys/Mcal of DE) for growing barrows and gilts in cool and hot seasons in a commercial environment. In Exp. 1, 96 barrows and 96 gilts were randomly allocated in 1 of 4 dietary treatments (2.7, 3.0, 3.3, 3.6 g of Lys/Mcal of DE). Each treatment had 12 replicate pens with 4 pigs per pen. The experiment lasted for 34 d in the cool season (March 12th to April 15th). Diets were based on corn-wheat-soybean meal. Lys:calorie ratio were attained by adjusting the amount of corn and soybean and supplementation of crystalline Lys. Total Lys intake and available Lys intake were increased (p<.05) as dietary Lys:calorie ratio increased. The BUN concentration on d 34 for barrows, and BUN change for barrows and gilts linearly increased (p<0.05) in response to increasing dietary Lys:calorie ratio. For gilts, back fat was decreased and then increased (Quadratically, p<0.05) as increasing dietary lys:calorie ratio. Exp. 2 had a similar design as Exp. 1 with the exception that Exp. 2 was conducted in hot season (June 30th to September 11th) for 42 d. Diet of Exp. 2 was the same as Exp. 1. Total Lys intake and available Lys intake increased (p<0.05) as dietary Lys:calorie increased. On d 42, the BUN concentration increased (p<0.05) in response to the increasing dietary Lys:calorie ratio. In conclusion, dietary Lys:calorie ratio of 2.7 g of Lys/Mcal of DE could satisfy the requirement of 25 to 50 kg growing pigs. Increasing dietary Lys:calorie ratio could increase BUN concentration in growing pigs.

4-채널 스파크 갭 스위치의 동작특성에 관한 연구 (A Study On The Operating Chracteristics Of 4-Channel Spark Gap Switch)

  • 최승길;조주현;장용무;정운관;강형부
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1989년도 하계종합학술대회 논문집
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    • pp.436-438
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    • 1989
  • Low inductance 4-channel spark gap switch was designed and performed. At NTP, self-breakdown voltage is 29kv, 43kv and 33kv when ratio of seperation($d_1$: $d_2$) is 1:1, 1:2 and 1:3 respectively.

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외연적 유한요소법을 이용한 세장비가 큰 타원형 컵 성형공정의 다단계 해석 (Multi-stage Analysis of Elliptic Cup Drawing Processes with the Large Aspect Ratio by an Explicit Elasto-Plastic Finite Element Method)

  • 김세호;김승호;허훈
    • 소성∙가공
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    • 제9권3호
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    • pp.313-319
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    • 2000
  • Finite element analysis is carried out for simulation of the multi-stage elliptic cup drawing process with the large aspect ratio. The analysis incorporates with shell elements for an elasto-plastic finite element method with the explicit time integration scheme. For the simulation, LS-DYNA3D is utilized for its wide capability of solving forming problems. The simulation result shows that the non-uniform drawing ratio at the elliptic cross section ad the small shoulder radius cause failure such as tearing and wrinkling. The result suggests the guideline to modify the tool shape for prevention of the failure during the drawing process.

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철근콘크리트 깊은 보에서 수평 전단철근의 전단저항에 관한 실험적 연구 (An Experimental Study on the Shear Resistance of Horizontal Shear Reinforcement in R.C. Deep Beams)

  • 양근혁;이영호;은희창;정헌수
    • 한국콘크리트학회:학술대회논문집
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    • 한국콘크리트학회 2001년도 가을 학술발표회 논문집
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    • pp.903-906
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    • 2001
  • The objective of this experimental study was to understand the effect of horizontal shear bar on the shear behavior of R.C. deep beams. Therefore, in the test program, the horizontal shear bar ratio($\rho_{sh}$) and shear span-to-overall depth ratio(a/h) are considered as two main variables. Test results indicate that for deep beams with a/h equal to 1.0, horizontal shear bar is less efficient in restricting the diagonal crack width development and enhancing the ultimate shear strength. So, it can be concluded that shear resistance of horizontal shear bar is related to a/h rather than clear span-to-effective depth ratio($l_{n}$/d) recommended in ACI code.

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초음속 이중 동축 제트유동에서 발생하는 충격파 구조에 관한 연구 (Study of the Shock Structure of Supersonic, Dual, Coaxial, Jets)

  • 이권희;이준희;김희동
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 추계학술대회논문집B
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    • pp.417-422
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    • 2001
  • The shock structure of supersonic, dual, coaxial jet is experimentally investigated. Eight different kinds of coaxial, dual nozzles are employed to observe the major features of the near field shock structure of the supersonic, coaxial, dual jets. Four convergent-divergent supersonic nozzles having the Mach number of 2.0 and 3.0, and are used to compare the coaxial jet flows discharging from two sonic nozzles. The primary pressure ratio is changed in the range between 4.0 and 10.0 and the assistant jet pressure ratio from 1.0 to 4.0. The results obtained show that the impinging angle, nozzle geometry and pressure ratio significantly affect the near field shock structure, Mach disk location and Mach disk diameter. The annular shock system is found depending the assistant and primary jet pressure ratios.

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