• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.9
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• pp.1297-1305
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• 2004

Reliability of MEMS devices is receiving more attention as they are heading towards commercial production. In particular are the reliability and long-term stability of wafer level vacuum packaged MEMS gyroscope sensors subjected to cyclic mechanical stresses at high frequencies. In this study, we carried out several reliability tests such as environmental storage, fatigue, shock, and vibration, and we investigated the failure mechanisms of the anodically bonded vacuum gyroscope sensors. It was found that successful vacuum packaging could be achieved through reducing outgassing inside the cavity by deposition of titanium as well as by pre-taking process. The current gyroscope structure is found to be safe from fatigue failure for 1000 hours of operation test. The gyroscope sensor survives the drop and vibration tests without any damage, indicating robustness of the sensor. The reliability test results presented in this study demonstrate that MEMS gyroscope sensor is very close to commercialization.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1537-1541
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• 2003

In this paper, presented is a feedback control performance of vibratory gyroscope at various vacuum levels. Micro gyroscope, whose operation is based on the vibrating motion at the vacuum conditions, is highly influenced by the vacuum level of the operating circumstances. In general, we apply the feedback control scheme to the gyroscope in order to improve the performances of the sensor. And control performances of the gyroscope are related to those vacuum levels. So we need investigate the performances of the closed loop control at various vacuum conditions comparing with those of the open loop. The experimental results show that the sensitivity of the closed loop is less than that of the open loop especially in low vacuum conditions. Therefore, there should be trade-off between sensitivity and other sensor performances such as linearity, bandwidth when we apply feedback control to the gyroscope.

• Proceedings of the KIEE Conference
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• 1998.07e
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• pp.1843-1845
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• 1998

Gyroscope is a very important core sensor as a rotation sensor in inertial space, in inertial guidance and navigation system on aeronautics. Plane, vessel and so on for civilian and millitary applications. Research and development of fiber optic gyroscope began in 1976 and focused on improving the gyroscope's sensitivity to rotation. bias performance and reducing noise. We have developed a Interferometric Fiber Optic' Gyroscope using a integrated-optic-circuit (IOC), which is operating with closed-loop electronic circuit. This paper describes the scheme of optical part and electronic part and also test results of this fiber optic gyroscope using a integrated-optic-circuit (IOC). The performance have been achieved as long-term bias drift of $1.73^{\circ}/h$.

• Physical Therapy Rehabilitation Science
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• v.11 no.3
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• pp.311-320
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• 2022

Objective: To investigate the reliability and validity of static balance measurements using an acceleration sensor and a gyroscope sensor in smart phone inertial sensors. Design: Equivalent control group pretest-posttest. Methods: Subjects were forty five healthy adults aged twenty to fifty-years-old who had no disease that could affect the experiment. After pre-test, all participants wore a waist band with smart phone, and conducted six static balance measurements on the force plate twice for 35 seconds each. To investigate the test-retest reliability of both smart phone inertial sensors, we compared the intra-correlation coefficient (ICC 3, 1) between primary and secondary measurements with the calculated root mean scale-total data. To determine the validity of the two sensors, it was measured simultaneously with force plate, and the comparision was done by Pearson's correlation. Results: The test-retest reliability showed excellent correlation for acceleration sensor, and it also showed excellent to good correlation for gyroscope sensor(p<0.05). The concurrent validity of smartphone inertial sensors showed a mostly poor to fair correlation for tandem-stance and one-leg-stance (p<0.05) and unacceptable correlation for the other postures (p>0.05). The gyroscope sensor showed a fair correlation for most of the RMS-Total data, and the other data also showed poor to fair correlation (p<0.05). Conclusions: The result indicates that both acceleration sensor and gyroscope sensor has good reliability, and that compared to force plate, acceleration sensor has unacceptable or poor correlation, and gyroscope sensor has mostly fair correlation.

• Journal of Sensor Science and Technology
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• v.23 no.4
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• pp.251-258
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• 2014

While the feasibility of vertical velocity as a threshold parameter for pre-impact fall detection has been verified, effects of sensor attachment locations and methods calculating vertical acceleration and velocity on the detection performance have not been studied yet. Regarding the vertical velocity-based pre-impact fall detection, this paper investigates detection accuracies of eight different cases depending on sensor locations (waist vs. sternum), vertical accelerations (accurate acceleration based on both accelerometer and gyroscope vs. approximated acceleration based on only accelerometer), and vertical velocities (velocity with attenuation vs. velocity difference). Test results show that the selection of waist-attached sensor, accurate acceleration, and velocity with attenuation based on accelerometer and gyroscope signals is the best in overall in terms of sensitivity and specificity of the detection as well as lead time.

• 제어로봇시스템학회:학술대회논문집
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• 1987.10b
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• pp.519-521
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• 1987

Among the gyroscopes used for SDINS, the dynamically turned gyroscope (DTG) covers a wide dynamic range while it is simple and small. In addition, it is a two-degree-of freedom gyro; it can detect two-axis input simultaneously. DTG, since its development in 1970's, is widely accepted for strapdown inertial systems. In the first year, we have concentrated on developing a two degree-of-freedom DIG. An interdisciplinary research team has been formed to accomplish the first year objective. Five departments in the College of Engineering, Seoul National University are involved. They are; 1) Department of Control and Instrumentation, 2) Department of Mechanical Design and Production, 3) Department of Electrical Engineering, 4) Department of Electronic Engineering, and 5) Department of Metallurgical Engineering. In addition, the Department of Precision Mechanical Engineering of Pusan National University is subcontracted to develop a test procedure for gyroscope and SDINS. Gyroscope is a key sensor for SDINS. Furthermore gyroscope itself is used as a. independent sensor for vehicle guidance and control and fire control system. Gyroscope and SDINS are an important for defense, aeronautical, and space industries that Korea is and will be actively involved. Upon the success of the project, they are expected to be manufactured in Korea under a cooperative effort between university and industry.

• Proceedings of the KIEE Conference
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• 1998.07e
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• pp.1840-1842
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• 1998

Gyroscope is a very important core sensor, as a rotation sensor in inertial space, in inertial guidance and navigation system on aeronautics, plane, vessel and so on for civilian and millitary applications. Mechnical gyroscopes, adopting a principle of spinning a top, have been used in many application system. These mechnical gyroscopes need high power consumption, long warming time and complicated peripheral devices. But fiber-optic gyroscopes, based on the Sagnac effect, have novel advantages as small volume. simple scheme, low power consumption and high reliability. So we have developed a Intermediate grade All-fiber Optic Gyroscope, which has open-loop and minimum reciprocal configuration scheme. We have designed feedback circuits for stability of amplitude and phase using four lock-in amplifier(LIA) circuits and also used for noise limitation. This paper describes the scheme of optical part and electronic part and also test results of this all-fiber optic gyroscope. The performance have been achieved as long-term bias drift of $9.54^{\circ}/h$, random walk of $0.0317^{\circ}/\sqrt{h}$ and dynamic range of ${\pm}150\;deg/s$.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.592-595
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• 2004

This paper presents a study on the development of a multi-sensing inertial sensor with a single mechanical structure, which can be used both as a gyroscope and an accelerometer. The proposed MEMS gyro-accelerometer is designed to detect the angular rate and the acceleration at the same time using two separate detection circuits for one proof mass. In this study, the detection and signal processing circuit for an effective signal processing of different inertial measurements is designed, fabricated, and tested. The experimental results show that the performances of the gyro-accelerometer have resolutions of 1mg and 0.025deg/sec and nonlinearities of less than 0.5% for the accelerometer and the gyroscope, respectively, which are similar results with those of sensors with different structures and different detection circuits. The size of the sensor is reduced almost by 50% comparing with the sensors of separated proof mass.

• Proceedings of the KIEE Conference
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• 2004.11c
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• pp.544-546
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• 2004

This paper designs and evaluates a complementary filter for fusion of inertial sensor signals. Specifically, the designed filter is applied to inverted pendulum control where the pendulum's angle information is obtained from low-cost tilt and gyroscope sensors instead of an optical encoder. The complementary filter under consideration is a conventional one which consists of low- and high-pass filters. However, to improve the performance of the filter on the gyroscope, we use an integrator in the filter's outer loop. Frequency responses are obtained with both tilt and gyroscope sensors. Based on the frequency response results, we determine appropriate parameter values for the filter. The performance of the designed complementary filter is evaluated by applying the filter to inverted pendulum control. Experiments show that the performance of the designed filter is comparable to that of an optical encoder and low-cost inertial sensors can be used for inverted pendulum control with the heir of sensor fusion.

• Journal of Institute of Control, Robotics and Systems
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• v.12 no.2
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• pp.106-112
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• 2006

A new model for the continuous-magnetic interferences has been proposed in this paper to remove external interferes of magnetic field to the dual electric compass. By this removal, the dual electric compass can be used for proving the azimuth angle in an automobile navigation system instead of the rate gyroscope. In the navigation system with a GPS receiver, a DR sensor such as a rate gyroscope is needed to overcome the shielded areas, which is relatively expensive and requires frequent calibrations. However the dual electric compass designed by this research is cheap and provides absolute azimuth angle precisely, which is beneficiary to be used as a DR sensor. The main contribution of this paper is that the long-lasting magnetic interferences have been removed out by using the proposed model, which never be studied before. With a hybrid navigation system using a DR sensor, we demonstrated that dual electric compass is better than a rate gyroscope in terms of both economics and performances.