• 제목/요약/키워드: GxZO

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DC Magnetron Sputtering 공정변수에 따른 GxZO박막의 성장 거동

  • 박문기;서경한;김철우;유용우;임경남;유상전
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 추계학술대회 논문집
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    • pp.92-92
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    • 2009
  • In the present study, impurities doped GxZO thin films were prepared by dc-magnetron sputtering on glass substrate and effect of processing variables on the growth behavior was investigated.

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