• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.327-327
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• 2010

디스플레이 및 반도체 산업이 발전함에 따라 회로의 선폭이 점차 줄어들고 있으며, 이에 따라서 대표적인 오염원이 되는 오염입자의 임계 직경(critical diameter) 또한 작아지고 있다. 현재 반도체 및 디스플레이 산업에서 사용되는 측정방법은 레이저를 이용하여 공정 후 표면에 남아 있는 오염입자를 측정하는 ex-situ 방법이 주를 이루고 있다. Ex-situ 방법을 이용한 오염입자의 제어는 웨이퍼 전체를 측정할 수 없을 뿐만 아니라 실시간 측정이 불가능하기 때문에 공정 모니터링 장비로 사용이 어려우며 오염입자와 공정 간의 상관관계 파악에도 많은 제약이 따르게 된다. 이에 따라 저압에서 in-situ 방법을 이용한 실시간 오염입자 측정 기술 개발이 요구되고 있다. 본 연구에서는 저압 환경에서 실시간으로 입자를 모니터링 할 수 있는 장비를 입자의 광산란 원리를 이용하여 개발하였다. 빛이 입자에 조사되면 크게 산란 및 흡수현상이 일어나게 되는데, 이 때 발생하는 산란광은 입자의 크기와 관계가 있으며 Mie 이론으로 널리 알려져 있다. 현재 이를 이용한 연구가 국내 및 국외에서 진행되고 있다. 수 백 nm 대의 입자를 측정하기 위해서는 빛의 강도가일정 수준 이상 되어야 하며, 이를 측정할 수 있는 수신부의 감도 또한 중요하다. 본 연구에서는 빛의 직경을 100 um 이하까지 집속할 수 있는 광학계를 상용 프로그램을 이용하여 설계하였으며, 강도가 약한 산란광 측정을 위하여 노이즈 제거 필터링 기술 등이 적용된 수신부 센서를 개발하여 전체 시스템에 적용하였다. 교정은 상압과 저압에서 수행 하였으며 약 5%의 측정효율로 최소 300 nm 이하의 입자까지 측정이 가능함을 확인 하였다. 또한, 타사의 실시간 입자 측정 센서와의 비교 실험을 통하여 성능평가를 수행하였다. 기존 광산란 방식 센서보다 높은 성능의 센서를 개발하기 위하여 추후 연구를 진행할 계획이며, 약 200 nm 이하의 입자까지 측정이 가능할 것으로 기대된다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.252-252
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• 2010

적외선 센서는 빛의 유무에 관계없이 주 야간 전방의 물체에서 발산하는 미약한 적외선(열선)을 감지하여 영상으로 재현하는 열상시스템은 자동차 야간 운전자 보조용 나이트 비젼, 핵심 시설의 감시 관리, 군수 등의 분야에 적용되어지고 있는 최첨단, 고부가가치를 지니고 있는 기술이다. 양자형은 센서 특성은 좋으나 냉각기(작동온도: $-196^{\circ}C$) 및 고진공 패키지인 dewar를 사용하는 반면에, 열형은 대부분 상온에서 동작되는 온도안정화를 위한 전자냉각모듈만을 구비하면 되므로 저가형으로 제작이 가능한 비냉각형 적외선 센서이다. 본 연구에서는 적외선 센서용 진공패키지 조립공정 및 패키지된 센서의 측정기술을 개발하였다. 금속 메탈패키지를 제작하였으며, 금속 진공패키지는 소자냉각용 TE Cooler와 장수명 진공유지를 위한 getter, 그리고 센서칩, 온도센서를. 장착하여 칩을 조립하였다. Cap ass'y와 base envelop의 솔더링 공정을 수행하였으며, 진공패키지의 진공유지를 위해 TMP를 이용하여 진공을 유지하고, 약 5일동안 패키지 bake-out을 수행하였다. 진공압력은 $10^{-7}\;torr$ 이하를 유지하였으며, getter를 활성화시키고, pinch-off 공정으로 조립 ass'y를 완성하였다. 진공 패키지의 기밀성은 He leak tester를 이용하여 측정하였으며, ${\sim}10^{-9}\;std.cm^3/sec$로 기밀성을 유지하였다. TE cooler를 작동한 온도안정성은 0.05 K 이하였다. 볼로미터 센서의 반응도는 $10^2\;V/W$ 이상을 나타내었으며, 탐지도는 $2{\times}10^8cm-Hz^{1/2}/W$를 나타내었다. 본 연구를 통하여 얻어진 결과는 향후 2차원 열영상용 어레이 검출기 및 웨이퍼수준의 패키징 공정에 유용하게 응용될 것으로 판단된다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.147-147
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• 2013

Multiferroic material $BiFeO_3$ (BFO) is a typical multiferroic material with a room-temperature magnetoelectric coupling in view of high magnetic- and ferroelectric-ordering temperatures (Neel temperature $T_N$ ~ 647 K and Curie temperature TC ~1,103 K). Rare-earth ion substitution at the Bi sites is very interesting, which induces suppressed volatility of the Bi ion and improved ferroelectric properties. At the same time, the Fe-site substitution with magnetic ions is also attracting, since the enhanced ferromagnetism was reported. In this study, BFO, $Bi_{0.9}Dy_{0.1}FeO_3$ (BDFO), $BiFe_{0.97}Co_{0.03}O_3$ (BFCO) and $Bi_{0.9}Dy_{0.1}Fe_{0.97}Co_{0.03}O_3 $ (BDFCO) compounds were prepared by conventional solid-state reaction and wet-mixing method. High-purity $Bi_2O_3$, $Dy_2O_3$, $Fe_2O_3$ and $Co_3O_4$ powders with the stoichiometric proportions were mixed, and calcined at $500^{\circ}C$ for 24 h. The samples were immediately put into an oven, which was heated up to 800oC and sintered in air for 1 h. The crystalline structure of samples was investigated at room temperature by using a Rigaku Miniflex powder diffractometer. The field-dependent magnetization measurements were performed with a vibrating-sample magnetometer. The electric polarization was measured at room temperature by using a standard ferroelectric tester (RT66B, Radiant Technologies). Dy and Co co-doping at the Bi and the Fe sites induce the enhancement of both magnetic and ferroelectric properties of $BiFeO_3$.

• Parasites, Hosts and Diseases
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• v.51 no.1
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• pp.125-128
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• 2013

In April 2010, pruritic symptoms were recognized in 3 privately-owned Siamese cats raised in Gwangju, Korea. Examination of ear canals revealed dark brown, ceruminous otic exudates that contain numerous live mites at various developmental stages. Based on morphological characteristics of adult mites in which caruncles were present on legs 1 and 2 in adult females and on legs 1, 2, 3, and 4 in adult males while the tarsus of leg 3 in both sexes was equipped with 2 long setae, the mite was identified as Otodectes cynotis. Ten ear mite-free domestic shorthaired cats were experimentally infected with O. cynotis to evaluate the efficacy of 10% imidacloprid/1% moxidectin spot-on. Live mites were recovered from 1 of 10 treated cats on day 9 post-treatment (PT) while no live mites were observed from the ear canals of treated cats on days 16 and 30 PT. The efficacy of 10% imidacloprid/1% moxidectin spot-on on O. cynotis in cats was, therefore, 90% on day 9 and 100% on days 16 and 30 PT. This is the first report of otodectosis in 3 cats naturally infested with O. cynotis in Gwang-ju, Korea. Both natural and experimental infestations were successfully treated with 10% imidacloprid/1% moxidectin spot-on.

• Journal of muscle and joint health
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• v.14 no.2
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• pp.158-168
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• 2007

Purpose: The purpose of this study was to determine the effects of exercise using Thera Band on body compositions, blood pressure and physical fitness in the elderly women. Method: The study was designed as a nonequivalent control group pretest-posttest quasi-experimental study. Twenty four subjects were assigned for experimental group and twenty one subjects were assigned for control group. The experimental group participated in Thera Band exercise program consisting of 60 minutes per session, 3 times a week during the period of 12 weeks. The effects of the program were assessed using the instruments measuring the body compositions, blood pressure and physical fitness before and after applying the program. Data were collected between April and June in 2006, and analyzed by $x^2$-test, t-test, ANCOVA using a SPSS 11.5 program. Results: There were statistically significant in percent of body fat, muscle strength, muscle endurance, flexibility, and balance ability, but no significant differences were found in body weight, systolic pressure and diastolic pressure. Conclusion: Exercise using Thera Band can be an effective nursing intervention to improve percent of body fat, muscle strength, muscle endurance, flexibility and balance ability in the elderly women.

• Journal of International Academy of Physical Therapy Research
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• v.4 no.1
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• pp.479-487
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• 2013

This study is intended to examine the tDCS and Morris Water maze training in Alzheimer's disease(AD) rats on Tau protein expression. Experiment groups were divided into four groups and assigned 16 rats to each group. Group I was a control group(AD induced by scopolamine); Group II was a experimental control group(AD injured by scopolamine and treatment tacrine); Group III was a group of tDCS application after AD injured by scopolamine; Group IV was a group of morris water maze training after AD injured by scopolamine. In cognition test, the outcome of group II was significantly lower than the groups(p<.001). and group III, IV were significantly low result at 14 days(p<.05). In histological finding, the experimental groups were destroy of micro vessels and finding of cell atropy and swelling. Group III, IV were decreased in degeneration of liver and kidney cells. In immuno- histochemistric response of BDNF and tau protein in hippocampus, BDNF expression of Group II was more increase than the other groups. and increase of BDNF expression was III, IV were higher than group I at 21 days. Tau protein expression of Group II was more decrease than the other groups. and decrease of Tau protein expression was III, IV were lower than group I at 21 days. These result suggest that improved tDCS and morris water maze training after scopolamine induced is associated with dynamically altered expression of BDNF and Tau protein in hippocampus and that is related with cognitive function.

• Journal of Korean Academy of Fundamentals of Nursing
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• v.12 no.1
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• pp.21-29
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• 2005

Purpose: The purpose of this study was to identify the frequency with which nursing interventions according to domains and classes, and core nursing interventions of the Nursing Intervention Classification (NIC) were performed by nurses on orthopedic surgery nursing units. Method: For this purpose, the third edition of NIC was used. Of the 486 nursing interventions, 424 were selected at 75% consent by experts. Data were collected from June, 2003 to July, 2003 5 hospitals and 69 nurses(return rate : 95.8%) in Gwang-ju and Chonnam region. 5 point Likert scale describing frequency was used. Results: The most frequently performed domain was 'physiological : basic'($2.97{\pm}.60$), followed by 'health system'($2.65{\pm}.65$) and 'physiological : complex'($2.55{\pm}.46$). The most frequently performed class was 'activity and exercise management'($3.82{\pm}.89$), followed by 'immobility management'($3.64{\pm}.62$), 'skin/wound management'($3.41 {\pm}.60$), 'physical comfort promotion'($3.23{\pm}.68$) and 'thermoregulation'($3.01{\pm}.91$). The most frequently performed nursing intervention was 'medication administration' ($4.96{\pm}.21$), followed by 'medication administration : intravenous'($4.93{\pm}.31$), 'analgesic administration'($4.91{\pm}.51$), 'pain management'($4.87{\pm}.34$) and 'medication administration : intramuscular'($4.78{\pm}.68$). Conclusion: In conclusion, the third edition of NIC was found to be a general and comprehensive classification system for application on orthopedic surgery nursing units. These findings will help in building of a standardized language for orthopedic surgery nursing units and enhance the quality of nursing care.

• Journal of dental hygiene science
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• v.9 no.2
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• pp.153-160
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• 2009

The purposed of this study was to investigate the effect of Gold bonding agent as intermediate layer between metal substrate and ceramic coating. Gold bonding agent used to seal off any surface porosity, to mask the greyish color of the metal, and to provide an underlying bright golden hue to the ceramic coverage. The adhesion between metal substrate and ceramic is related to diffusion of oxygen during ceramic firing. The oxide layer produced on non-precious alloy anti titanium was considered to have a potentially adverse effect on metal-ceramic bonding. The oxidation characteristics of titanium and non-precious alloys are the main problem. Every group were divided into test and control groups. Control groups are carried out process of degassing for product oxide layer. Au coating was applied on each Ni-Cr, Co-Cr alloys and cp-Ti specimens with difference surface condition or degassing. Specimens surfaces and cutting plane was characterized by SEM/EDS. Results suggested that Au coating is effective barriers to protect metal oxidation during ceramic firing.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.210-210
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• 2010

ABO2 형태를 가진 delafossite 구조 산화물은 p-type 투명전도체 소재로 유명하다. Delafossite 구조가 p-type 투명전도체에 적합한 결정적인 이유는 밴드갭이 넓고 공유결합에 유리하기 때문이다. 투명전도체는 가시광선의 흡수가 없도록 band gap을 넓히는 것이 우선인데 이러한 band gap이 넓은 구조가 delafossite이다. 또한 delafossite 구조는 구조적으로 각각의 산화물 이온들이 유사 사면체 배위(pseudo-tetrahedral coordination)을 갖는다. 이러한 사면체 배위결합구조에서 산소이온은 비결합면이 없기 때문에 더욱더 공유결합성을 향상시킬 것으로 생각된다. 여기서 A는 +1가 cation, B은 +3가 cation으로 구성되어 있다. A자리에는 1가 원소인 팔라듐, 플래티늄, 은, 구리 등을 가질 수 있고. B자리에 3가 원소이면서도 크기가 알루미늄보다는 크고 란타늄보다는 작은 금속이 들어갈 수 있다. Delafossite 구조는 상온에서 2종류의 polytype (상온에서 Rhombohedaral 구조와 hexagonal 구조)이 존재하며 이들은 각각 3R(Rm) 및2H (P63/mmc)의 결정 구조를 가지고 있다. CuCrO2는 일반적으로 3R결정구조를 가지는 것으로 알려져 있다. delafossite 구조는 전기적 이방성을 띄고 있는데 c-축 방향으로의 전기적 특성이 a-축 방향으로의 전기적 특성보다 약 1000배 높은 물성을 띈다고 한다. 이는 c-축 방향의 원자 위치 때문인데 CuCrO2의 경우 Cu-O-Cr-O-Cu로서 3d-2p-3d-2p-3d 궤도를 가지기 때문인 것으로 알려져 있다.[ref] 반면 c-축으로 에피성장된 박막의 경우 +3가 이온이 위치한 layer에서 hole hopping에 의해 캐리어가 전도된다고 알려져 있기도 하다. 본 연구에서는 PLD를 이용하여 c-plane 사파이어 기판위에 성장된 delafossite구조인 CuCrO2박막의 특성을 알아보았다. p-type 특성을 위하여 CuCrO2에 Ni를 첨가하였으며 그에 따른 구조적 전기적 특성을 조사하였다. 성장온도와 도핑농도를 변화시켜 특성을 연구하였다. 결정구조적 특성과 전기적 특성을 분석하려 한다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.166-166
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• 2010

Recently, TFTs based on amorphous oxide semiconductors (AOSs) such as ZnO, InZnO, ZnSnO, GaZnO, TiOx, InGaZnO(IGZO), SnGaZnO, etc. have been attracting a grate deal of attention as potential alternatives to existing TFT technology to meet emerging technological demands where Si-based or organic electronics cannot provide a solution. Since, in 2003, Masuda et al. and Nomura et al. have reported on transparent TFTs using ZnO and IGZO as active layers, respectively, much efforts have been devoted to develop oxide TFTs using aforementioned amorphous oxide semiconductors as their active layers. In this thesis, I report on the performance of thin-film transistors using amorphous indium gallium zinc oxides for an active channel layer at room temperature. $SiO_2$ was employed as the gate dielectric oxide. The amorphous indium gallium zinc oxides were deposited by RF magnetron sputtering. The carrier concentration of amorphous indium gallium zinc oxide was controlled by oxygen pressure in the sputtering ambient. Devices are realized that display a threshold voltage of 1.5V and an on/off ration of > $10^9$ operated as an n-type enhancement mode with saturation mobility with $9.06\;cm^2/V{\cdot}s$. The devices show optical transmittance above 80% in the visible range. In conclusion, the fabrication and characterization of thin-film transistors using amorphous indium gallium zinc oxides for an active channel layer were reported. The operation of the devices was an n-type enhancement mode with good saturation characteristics.