DFT Study on the Gas Phase Decomposition of Tungsten Imido Guanidinate Complex W(NiPr)Cl3[iPrNC(NMe2)NiPr] for Chemical Vapor Deposition of Tungsten Carbonitride Films
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- Bulletin of the Korean Chemical Society
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- v.31 no.8
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- pp.2416-2418
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- 2010