Preparation of $YBa_2Cu_3O_{7-y}$ Superconducting Thin Films by on-axis Sputtering
(on-axis 스퍼터링 방법에 의한 $YBa_2Cu_3O_{7-y}$ 초전도 박막 제조)
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- Journal of the Korean Vacuum Society
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- v.4 no.2
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- pp.172-176
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- 1995