• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1082-1086
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• 2004

In silicon wafer manufacturing process, the grinding process has been adopted to improve the flatness of wafer. The grinding of wafer is usually used by the infeed grinding machine. The infeed grinding machine has been depended on imports. Therefore, it is necessary to develop the infeed grinding machine because the demand of the infeed grinding machine is increasing more and more. This paper describes the technologies of infeed grinding machine and intend to introduce the studies in the development of the intelligent grinding system for grinding of wafer. The air bearing spindle for the infeed grinding machine was developed by domestic technologies and the grinding part design of the intelligent grinding system for wafer grinding was completed.

• 한국기계연구소 소보
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• s.16
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• pp.83-94
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• 1986

Grinding machine, one of the precision machine tool, requires high accuracy in spindle system. But, recent Inspection and Test reports by KIMM shows high inferio¬rity ratio in home-made grinding machines and points out that this is mainly due to the lack of design ability and assembling technique of spindle system. In this paper, therefore, static stiffness, dynamic characteristics, thermal defor¬mation and error motion of spindle system were studied. With these results, we presented the general data to design and assemble the spindle system. Test of spindle system modified by this study showed that several factors affecting machining accuracy were improved largely.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.6
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• pp.76-82
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• 2000

This paper describes the machining characteristics of cylindrical plunge grinding. The study investigates the process using the current signals of a spindle motor through a hall sensor. Grinding experiments were conducted under various conditions such as wheel speeds, workpiece speeds and infeed rates with a conventional vitrified bonded wheel. Analyzing the current signal of the spindle motor, a relationship between current signals and the metal removal rate in terms of the in(red rate is induced. It was also shown that a hall sensor has similar capabilities in evaluation of grinding behavior compared to the AE signals, which are useful far monitoring the grinding process.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.557-558
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• 2006

In this study, the ultra precision centerless grinder for ferrule grinding was designed. As the good-qualified ferrule is required a precise and fine grinding, grinding machine for ferrule must have a high accuracy and a sufficient stiffness. The centerless grinder is composed of the high damping concrete bed, grinding wheel spindle unit, regulating wheel spindle unit, feeding table and dressing unit. For a newly developed centerless grinder, hydrostatic system with high precision feeding and high stiffness was proposed.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.5
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• pp.5-10
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• 2003

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1099-1104
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• 2004

As consumer in optics, electronics, aerospace and electronics industry grow, the demand for ultra precision aspherical surface lens increases higher. To enhance the precision and productivity of ultra precision aspherical surface micro lens, the following specification of ultra precision grinding system is required: the highest rotational speed of the grinder is 100,000rpm and its turning accuracy is $0.1{\mu}m$, positioning accuracy is $0.1{\mu}m$. The development process of the grinding system for the ultra precision aspherical surface micro lens for optoelectronics industry is introduced. In the work reported in this paper, an intelligent grinding system for ultra precision aspherical surface machining was designed by considering the factors affecting the surface roughness and profiles accuracy. An aerostatic form was adopted to build the spindle of the workpiece and the spindle of grinder and ultra precision LM guide way was adopted in this system.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.11
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• pp.233-243
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• 1998

The demand of high speed machining is increasing due to the high speed cutting and grinding provides high efficiency of process, short process time, improved metal removal capacity and better surface finish. Active magnetic bearings allow much high surface speed than conventional ball bearings and therefore greatly suitable for high speed cutting or grinding. This paper describes a design process of an active magnetic bearing system for a high speed grinding spindle with power 5.5kW and maximum speed 60,000rpm. Magnetic actuators are designed by the magnetic circuit theory considering static load condition, and examined with FEM analysis. Dynamic characteristics are also considered, such as bandwidth, stiffness, natural frequency and static deflection. System characteristics are simulated with a rigid rotor model.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.1
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• pp.96-100
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• 2011

The hydrostatic bearings have a relatively small run-out comparing to its shape error by fluid film effect in hydrostatic state as like pneumatic bearing and have a high stiffness, load capacity and damping characteristics. As there is no maintenance and semipermanent in these bearing type, it has been usually adopted as main spindle bearing for grinding machine. In this thesis, to develop hydrostatic bearing for high speed spindle, the cooler setting temperature, bearing clearance and nozzle pressure of belt-driven hydrostatic bearing are investigated. The bearing temperature is decreased, as the cooler setting temperature is lower, nozzle pressure is higher and bearing clearance is wider. The front temperature of bearing is nearly $8^{\circ}C$ higher than the rear one up to 13,000 rpm of spindle revolution. The thermal deflection of X-axis is ${\pm}16\;{\mu}m$ in range of 12,000 rpm-13,000 rpm. Therefore, it is conformed that the built-in motor hydrostatic bearing can be used to high speed spindle.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1105-1108
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• 2004

As recently optical communication industry is developed, request of optical communication part is increased. Ferrule is very important part which determines transmission efficiency and quality of information in the optical communication part. Most of ferrule processes are grinding which request high processing precision. The ultra precision centerless grinding machine for ferrule grinding was designed. The centerless grinding machine is composed of the high damping bed, grinding wheel spindle unit, regulating wheel spindle unit, feeding table and dressing unit. Reliability prediction was very important for the high quality design. In this study, centerless grinding machine was predicted reliability.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.10 no.1
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• pp.23-29
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• 2001

Cylindrical type of self-controlled restrictor are designed for hydrostatic bearing of grinding wheel spindle. Typical hydrostatic journal bearing with the designed restrictor is analytically model. According to the model, the affect of oper-ation parameters, such as, initial cross distance, supply pressure, diameter of two supply holes, pre-load of spring, and clearance between spindle and housing, on bearing stiffness are analyzed. From the results of the analysis, the optimum conditions of operation parameters that maximize the bearing stiffness are estimated.