• Journal of the Korean Physical Society
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• v.73 no.12
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• pp.1827-1833
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• 2018

X-ray grating interferometry has been an active area of research in recent years. In particular, various studies have been carried out for the practical use of the x-ray grating interferometer in medical and industrial fields. For the commercialization of the system, it needs to be optimized for its application. In this study, we have developed a prototype of the compact high energy x-ray grating interferometer of which the high effective energy and compactness is of our primary feature of design. We have designed the Talbot-Lau x-ray interferometer in a symmetrical geometry with an effective energy of 54.3 keV. The system has a source-to-analyzer grating distance of 788.4 mm, which is compact enough for a commercial product. In a normal operation, it took less than ten seconds to acquire a set of phase stepping images. The acquired images had a maximum visibility of about 15%, which is relatively high compared with the visibilities of the other high-energy grating interferometric systems reported so far.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.8
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• pp.906-912
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• 2012

This paper presents the new method for a six-degree-of-freedom (DOF) motion measurement and those dynamic characterizations in an ultraprecision linear stage using angle sensor-implemented grating interferometry. It consists of a diffractive optical element, a corner cube, four separate two-dimensional position sensitive detectors, four photodiodes and auxiliary optics components. From the previous study, it was confirmed that the proposed optical system could measure a six-DOF motion error in a linear stage. In this article, six-DOF motion dynamic characteristics of the stage were investigated through the step response and with respect to the conditions with a different speed of a slide table. As a result, the natural frequency and damping ratio according to a six-DOF direction was obtained. Also, it was seen that the speed of slide table had an significant effect on a six-DOF displacement motion, especially, X, which was considered as the effect of friction mechanism and local elastic mechanical deformation in a slide guide.

• Journal of Institute of Control, Robotics and Systems
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• v.15 no.8
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• pp.798-803
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• 2009

This paper proposes a grating scanner which is driven by a stack-type piezoelectric element. The mechanism of the grating scanner is based on flexure hinges. Using some constraints, the compliant mechanism is designed and then verified by Finite Element Analysis. The designed compliant mechanism is manufactured by wire electro-discharge machining, and then integrated with a stack-type piezoelectric element for actuation and a capacitance displacement sensor for measuring ultra-precision displacement. Experiments demonstrates the characteristics and the performances of the grating scanner using the terms of working range, resonance frequency, bandwidth and resolution. The grating scanner is applicable to a Moire interferometry for measuring 3-dimensional microscopic surface.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.32 no.2
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• pp.186-193
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• 2008

[ $Moir{\acute{e}}$ ] interferometry is an optical method, providing whole field contour maps of in-plane displacements with high resolution. The demand for enhanced sensitivity in displacement measurements leads to the technique of microscopic $moir{\acute{e}}$ interferometry. The method is an extension of the $moir{\acute{e}}$ interferometry, and employs an optical microscope for the required spatial resolution. In this paper, the sensitivity of $moir{\acute{e}}$ interferometry is enhanced by an order of magnitude using an immersion interferometry and the optical/digital fringe multiplication(O/DFM) method. In fringe patterns, the contour interval represents the displacement of 52 nm per fringe order. In order to estimate the reliability and the applicability of the optical system implemented, the measurements of rigid body displacements of grating mold and the coefficient of thermal expansion(CTE) for an aluminium block are performed. The system developed is applied to the measurement of thermal deformation in a flip chip plastic ball grid array package.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.161-166
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• 1997

A improved method to measure the wavefront aberration of aspheric lens is described. In this study, which is a kind of lateral shearing interferometry, a sinusoidal diffraction grating is used for better quality of interferogram. Also,the grating is inclined to horizontal axis for obtaining the two orthogonal derivatives and minimizing moving error simultaneously. Measurement result shows that the repeatability is about 6 times better then that of previouse Ronchi Test.

• Korean Journal of Optics and Photonics
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• v.14 no.6
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• pp.643-648
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• 2003

The phase-shifting diffraction-grating interferometer proposed in the investigation uses a diffraction grating that performs manifold functions of beam splitting, beam recombination, and phase shifting. The reference and measurement waves generated by means of diffraction have different amplitudes depending on their orders of diffraction, so the interference fringe pattern resulting from the two waves tends to yield poor visibility. To cope with this problem, we select a phase grating of reflection type and attempt to improve the interference visibility with optimization of the groove shape of the grating through electromagnetic analysis.

• Journal of the Korean Society for Nondestructive Testing
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• v.12 no.1
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• pp.16-24
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• 1992

Moire interferometry using a diffraction grating and a laser is a powerful technique for analizing small deformation of a specimen. In the method, the x and y-directional fringe patterns are obtained by using the x and y-directional sets of two beams. If the both sets of two beams are simultaneously incident to the specimen, the x and y-directional fringe patterns are super imposed. In this case, it is difficult to separate each directional fringe pattern. Therefore each fringe pattern has been separately recorded by selecting each set of two beams. In order to analyze a two-dimensional strain changing with time, Moire interferometry using the two-dimensional fourier transform method is proposed and the x and y-directional fringes are separated. By this method, the thermal deformation of a glass plate is analyzed.

• Journal of radiological science and technology
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• v.42 no.1
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• pp.67-75
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• 2019

Grating interferometry based imaging technology is a kind of radiation imaging system, which can acquire not only absorption image but also phase difference and dark field image using the Talbot pattern. However, because of the technological difficulties and high cost of fabricating the gratings that make up the system, much efforts are being made to look for ways to replace them. The is a preliminary study to see how the Talbot pattern transfer through various kinds of scintillators and if the optical grating can be a way to replace the conventional absorption gratings. The geometry of the interferometer, the scintillator model, and the scintillator thickness are the main inputs for our simulation. We have used the concept of modulation for quantitative analysis of the contrast ratio of the Talbot pattern. This research is expected to provide very useful information on the design of optical gratings, which is an alternative way to analyze the Talbot pattern, which we have filed a patent on.

• Korean Journal of Optics and Photonics
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• v.14 no.4
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• pp.392-398
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• 2003

We present a novel concept of a phase-shifting diffraction-grating interferometer, which is intended for the optical testing of concave mirrors with high precision. The interferometer is configured with a single reflective diffraction grating, which performs multiple functions of beam splitting, beam recombination, and phase shifting. The reference and test wave fronts are generated by means of reflective diffraction at the focal plane of a microscope objective with large numerical aperture, which allows testing fast mirrors with low f-numbers. The fiber-optic confocal design is adopted for the microscope objective to focus a converging beam on the diffractive grating, which greatly reduces the alignment error between the focusing optics and the diffraction grating. Translating the grating provides phase shifting, which allows measurement of the figure errors of the test mirror to nanometer accuracy.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.12
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• pp.169-179
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• 1998

Plane mirror type laser interferometers are popularly being used in many modern ultraprecision machines, as they can perform simultaneous measurements of multiple axis positions with nanometer resolution capabilities. One important issue in this application of laser interferometers is to provide a good level of alignment between the reflecting mirrors and the laser beams so that measurement errors due to undesirable coupling effects can be avoided in multiple axis measurements In this investigation, a thorough metrological analysis is given to develop an suitable mathematical model for a precision x-y stage in which the orthogonality misalignment between the reflecting mirrors significantly affects overall x-y mea-surement results. Then a noble calibration method is suggested in which two-dimensional displacement sensors of moire gratings of concentric circles are used to realize the reversal principle of orthogonality evaluation in situ. Finally, actual experimental results are discussed to verify that the suggested method can effectively calibrate the orthogonality error with an uncertainty of 0.2667 arcsec.