• Journal of the Korean Physical Society
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• 제73권12호
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• pp.1827-1833
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• 2018

X-ray grating interferometry has been an active area of research in recent years. In particular, various studies have been carried out for the practical use of the x-ray grating interferometer in medical and industrial fields. For the commercialization of the system, it needs to be optimized for its application. In this study, we have developed a prototype of the compact high energy x-ray grating interferometer of which the high effective energy and compactness is of our primary feature of design. We have designed the Talbot-Lau x-ray interferometer in a symmetrical geometry with an effective energy of 54.3 keV. The system has a source-to-analyzer grating distance of 788.4 mm, which is compact enough for a commercial product. In a normal operation, it took less than ten seconds to acquire a set of phase stepping images. The acquired images had a maximum visibility of about 15%, which is relatively high compared with the visibilities of the other high-energy grating interferometric systems reported so far.

• 한국정밀공학회지
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• 제29권8호
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• pp.906-912
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• 2012

This paper presents the new method for a six-degree-of-freedom (DOF) motion measurement and those dynamic characterizations in an ultraprecision linear stage using angle sensor-implemented grating interferometry. It consists of a diffractive optical element, a corner cube, four separate two-dimensional position sensitive detectors, four photodiodes and auxiliary optics components. From the previous study, it was confirmed that the proposed optical system could measure a six-DOF motion error in a linear stage. In this article, six-DOF motion dynamic characteristics of the stage were investigated through the step response and with respect to the conditions with a different speed of a slide table. As a result, the natural frequency and damping ratio according to a six-DOF direction was obtained. Also, it was seen that the speed of slide table had an significant effect on a six-DOF displacement motion, especially, X, which was considered as the effect of friction mechanism and local elastic mechanical deformation in a slide guide.

• 제어로봇시스템학회논문지
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• 제15권8호
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• pp.798-803
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• 2009

This paper proposes a grating scanner which is driven by a stack-type piezoelectric element. The mechanism of the grating scanner is based on flexure hinges. Using some constraints, the compliant mechanism is designed and then verified by Finite Element Analysis. The designed compliant mechanism is manufactured by wire electro-discharge machining, and then integrated with a stack-type piezoelectric element for actuation and a capacitance displacement sensor for measuring ultra-precision displacement. Experiments demonstrates the characteristics and the performances of the grating scanner using the terms of working range, resonance frequency, bandwidth and resolution. The grating scanner is applicable to a Moire interferometry for measuring 3-dimensional microscopic surface.

• 대한기계학회논문집A
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• 제32권2호
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• pp.186-193
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• 2008

[ $Moir{\acute{e}}$ ] interferometry is an optical method, providing whole field contour maps of in-plane displacements with high resolution. The demand for enhanced sensitivity in displacement measurements leads to the technique of microscopic $moir{\acute{e}}$ interferometry. The method is an extension of the $moir{\acute{e}}$ interferometry, and employs an optical microscope for the required spatial resolution. In this paper, the sensitivity of $moir{\acute{e}}$ interferometry is enhanced by an order of magnitude using an immersion interferometry and the optical/digital fringe multiplication(O/DFM) method. In fringe patterns, the contour interval represents the displacement of 52 nm per fringe order. In order to estimate the reliability and the applicability of the optical system implemented, the measurements of rigid body displacements of grating mold and the coefficient of thermal expansion(CTE) for an aluminium block are performed. The system developed is applied to the measurement of thermal deformation in a flip chip plastic ball grid array package.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.161-166
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• 1997

A improved method to measure the wavefront aberration of aspheric lens is described. In this study, which is a kind of lateral shearing interferometry, a sinusoidal diffraction grating is used for better quality of interferogram. Also,the grating is inclined to horizontal axis for obtaining the two orthogonal derivatives and minimizing moving error simultaneously. Measurement result shows that the repeatability is about 6 times better then that of previouse Ronchi Test.

• 한국광학회지
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• 제14권6호
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• pp.643-648
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• 2003

위상편이 회절격자 간섭계의 회절격자는 간섭을 일으키는 측정광과 기준광을 분할하고, 재결합하여 간섭무늬를 생성하고, 또한 위상을 편이시키는 다양한 용도로 사용되는 핵심부품이다. 위상편이 회절격자 간섭계는 회절격자에서 회절되는 다양한 회절차수의 광들을 측정광과 기준광으로 선정하고 서로 간섭시켜 간섭무의를 얻을 수 있는데, 그 회절차수와 사용하는 회절격자의 형상에 따라서 측정광과 기준광의 효율이 달라져서 간섭무늬의 가시도가 달라진다. 본 논문에서는 두 가지 위상편이 회절격자 간섭계에서 측정광과 기준광의 상대적인 효율을 격자에서 일어나는 회절현상의 전자기학적인 수치모사를 통해 산출해내어 각 간섭계에 최적인 회절격자의 형상을 선정한다.

• 비파괴검사학회지
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• 제12권1호
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• pp.16-24
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• 1992

Moire interferometry using a diffraction grating and a laser is a powerful technique for analizing small deformation of a specimen. In the method, the x and y-directional fringe patterns are obtained by using the x and y-directional sets of two beams. If the both sets of two beams are simultaneously incident to the specimen, the x and y-directional fringe patterns are super imposed. In this case, it is difficult to separate each directional fringe pattern. Therefore each fringe pattern has been separately recorded by selecting each set of two beams. In order to analyze a two-dimensional strain changing with time, Moire interferometry using the two-dimensional fourier transform method is proposed and the x and y-directional fringes are separated. By this method, the thermal deformation of a glass plate is analyzed.

• 대한방사선기술학회지:방사선기술과학
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• 제42권1호
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• pp.67-75
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• 2019

Grating interferometry based imaging technology is a kind of radiation imaging system, which can acquire not only absorption image but also phase difference and dark field image using the Talbot pattern. However, because of the technological difficulties and high cost of fabricating the gratings that make up the system, much efforts are being made to look for ways to replace them. The is a preliminary study to see how the Talbot pattern transfer through various kinds of scintillators and if the optical grating can be a way to replace the conventional absorption gratings. The geometry of the interferometer, the scintillator model, and the scintillator thickness are the main inputs for our simulation. We have used the concept of modulation for quantitative analysis of the contrast ratio of the Talbot pattern. This research is expected to provide very useful information on the design of optical gratings, which is an alternative way to analyze the Talbot pattern, which we have filed a patent on.

• 한국광학회지
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• 제14권4호
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• pp.392-398
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• 2003

구면 거울을 정밀하고 정확하게 측정할 수 있는 위상천이 회절격자 간섭계를 제시한다. 간섭계는 하나의 회절격자를 이용하여 간섭계의 기준광과 측정광을 분할하고, 다시 결합시켜 간섭무늬를 생성시키고 위상천이 시키는 간단한 구조로 설계되었다. 광원으로부터의 광을 큰 수치구경인 고정도의 집속렌즈의 초점에 위치한 회절격자 위에 집속하여 반사회절된 파면을 기준파면과 측정파면으로 사용한다 부가적인 기준면이 없이 회절격자 위의 매우 작은 영역이 기준면을 대신하므로 시스템 오차가 작다. 광섬유 형태의 공초점현미경 구조를 광원과 집속렌즈 사이에 설치하여 집속렌즈와 회절격자사이의 정렬오차를 최소화 하였다. 회절격자를 광축에 수직한 방향으로 이송함으로써 기준파면과 측정파면사이에 상대적인 위상천이를 일으켜서 일련의 위상천이된 간섭무늬를 쉽게 획득할 수 있다. 간섭계를 제작하고, 결상렌즈와 CCD를 이용해서 얻은 위상천이된 대상구면 거울의 간섭무늬들을 해석하여 전체적인 간섭계 시스템의 성능을 평가해 보았다.

• 한국정밀공학회지
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• 제15권12호
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• pp.169-179
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• 1998

Plane mirror type laser interferometers are popularly being used in many modern ultraprecision machines, as they can perform simultaneous measurements of multiple axis positions with nanometer resolution capabilities. One important issue in this application of laser interferometers is to provide a good level of alignment between the reflecting mirrors and the laser beams so that measurement errors due to undesirable coupling effects can be avoided in multiple axis measurements In this investigation, a thorough metrological analysis is given to develop an suitable mathematical model for a precision x-y stage in which the orthogonality misalignment between the reflecting mirrors significantly affects overall x-y mea-surement results. Then a noble calibration method is suggested in which two-dimensional displacement sensors of moire gratings of concentric circles are used to realize the reversal principle of orthogonality evaluation in situ. Finally, actual experimental results are discussed to verify that the suggested method can effectively calibrate the orthogonality error with an uncertainty of 0.2667 arcsec.