• 한국세라믹학회지
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• 제28권10호
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• pp.777-784
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• 1991

Diamond films have been growth by the hot-filament chemical vapor deposition (HFCVD) using CH4 and H2 gaseous mixture on the Si substrate. The experimental results indicated that the deposits were pure diamond and contained no amount of non-diamond phases such as amorphous carbon or graphite. The diamond films were deposited well at the conditions: the filament temperature of 210$0^{\circ}C$, the substrate temperature of 77$0^{\circ}C$, the CH4 concentration of 1.76%, the reactor pressure of 30 torr, and the deposition time of 7 hr. At this growth condition, the maximum deposition rate was 2 ${\mu}{\textrm}{m}$/hr. X-ray diffraction patterns and texture coefficient results showed that preferred orientation of the diamond films was {111} orientation under all experimental conditions.

• Journal of Microbiology and Biotechnology
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• 제14권5호
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• pp.1043-1046
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• 2004

The stability and electrochemical properties of a self-assembled layer of spinach ferredoxin on a quartz substrate and on a highly oriented pyrolytic graphite electrode were investigated. To fabricate the ferredoxin self-assembly layer, dimyristoylphosphatidylcholine was first deposited onto a substrate for ferredoxin immobilization. Surface analysis of the ferredoxin layer was carried out by atomic force microscopy to verify the ferredoxin immobilization. To verify ferredoxin immobilization on the lipid layer and to confirm the maintenance of redox activity, absorption spectrum measurement was carried out. Finally, cyclic-voltammetry measurements were performed on the ferredoxin layers and the redox potentials were obtained. The redox potential of immobilized ferredoxin had a formal potential value of -540 mV. It is suggested that the redox-potential measurement of self-assembled ferredoxin molecules could be used to construct a biosensor and biodevice.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.290-290
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• 2011

In this study Diamond-like carbon (DLC) films were deposited on p-type Si substrates using a Radio-Frequency magnetron Sputtering system. The DLC film was deposited by bombarding graphite target with a N2/Ar plasma mixture with various conditions: substrate, pressure, deposition time, temperature of substrate, power and ratio of gas mixture. The effect on the conduction and hardness of DLC thin films were investigated. The conduction of DLC films were measured by I-V measurement. In addition, Raman analysis was performed to study the chemical bonding structure. The hardness was measured by Nano indentation. Atomic Force Microscopy was used for determined surface morphology of DLC film.

• 한국전기전자재료학회논문지
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• 제19권5호
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• pp.492-497
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• 2006

The study on laser-ablation plasmas has been strongly interested in fundamental aspects of laser-solid interaction and consequent plasma generation. In particular, this plasma has been widely used for the deposition of thin solid films and applied to the semiconductors and insulators. In this paper, we developed and discussed the generation of carbon ablation plasmas emitted by laser radiation on a solid target, graphite. The progress of carbon plasmas by laser-ablation was simulated using Monte-Carlo particle model under the pressures of vacuum, 1 Pa, 10 Pa and 66 Pa. At the results, carbon particles with low energy were deposited on the substrate as the pressure becomes higher However, there was no difference of deposition distributions of carbon particles on the substrate regardless of the pressure.

• 대한기계학회논문집B
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• 제33권2호
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• pp.101-106
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• 2009

The disjoining pressure is an important physical property in modeling the small-scale transport phenomena on thin film. It is a very useful definition in characterizing the non-continuum effects that are not negligible in heat and mass transport of the film thinner than submicro-scales. We present the calculated values of disjoining pressure of He, Kr and Xe thin films absorbed on graphite substrate using Molecular Dynamics Simulation (MD). The disjoining pressure is accurately calculated in the resolution of a molecular scale of the film thickness. The characteristics of the pressure are discussed regarding the molecular nature of the fluid system such as molecular diameter and intermolecular interaction parameters. The MD results are also compared with those based on the continuum approximation of the slab-like density profile and the results on other novel gases in the previous study. The discrepancies of the continuum model with MD results are shown in all three configurations and discussed in the view point of molecular features.

• 청정기술
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• 제19권3호
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• pp.300-305
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• 2013

ZnO(산화아연)와 rGO(환원 흑연산화물, reduced graphite oxide)로 구성된 복합체를 제조하여 중저온 영역($300-500^{\circ}C$)에서 $H_2S$(황화수소) 흡착실험을 수행하였다. rGO에 붙어있는 수산화기, 에폭시기, 그리고 카르복실기와 같은 산소를 포함하는 관능기들이 $H_2S$흡착에 미치는 영향을 조사하기 위해서 다양한 특성분석(TGA, XRD, FT-IR, SEM, 그리고 XPS)을 실시하였다. GO(흑연산화물, graphite oxide)를 rGO로 환원시키기 위해서 마이크로파 조사법을 사용하였다. 마이크로파 조사법에 의한 환원공정에서는 온화한 환원분위기를 조성하여 rGO 표면에 상당량의 산소 관능기들이 남아있는 것을 확인하였다. 이러한 관능기들은 나노 크기의 ZnO가 2D rGO 표면에 균일하게 부착되도록 유도하여 고온 영역에서도 ZnO의 응집 및 소결이 일어나는 것을 방지하는 효과가 있다. 이로 인해 ZnO/rGO 복합체는 순수한 ZnO와 비교하여 3.5배 정도의 흡착량을 보여주었다.

• 한국결정성장학회지
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• 제5권1호
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• pp.50-59
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• 1995

자체 제작된 승화법에 의한 결정성장 장치를 이용하여, 6H-SiC 단결정을 성장하였다. Acheson 법으로 얻어진 6H 결정을 seed substrate로 사용하였으며, SiC source 로부터 분해된 승화 증기가 seed상에서 육성되도록 흑연 도가니내의 온도구배 및 성장온도와 압력을 유기적으로 조절하였다. 성장 전 graphite 도가니 구성부와 SiC 원료에 대한 purification을 행함으로써 성장결정 내부로의 불순물 혼입이 억제되도록 하엿다. 결정 성장시의 육성조건으로 도가니 바닥의 온도는 $2300~2400^{\circ}C$였으며, 성장로 내부의 분위기 압력은 200~400 torr에서 양질의 단결정을 얻을 수 있었다. 성장된 결정을 두께 1.5 mm의 wafer로 제작하여 XRD와 optical microscope로 관찰하였고, FT-IR spectrum으로 분석하였다.

• 한국세라믹학회지
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• 제45권4호
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• pp.245-249
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• 2008

The SiC and ZrC are critical and essential materials in TRISO coated fuel particles since they act as protective layers against diffusion of metallic and gaseous fission products and provides mechanical strength for the fuel particle. However, SiC and ZrC have critical disadvantage that SiC loses chemical integrity by thermal dissociation at high temperature and mechanical properties of ZrC are weaker than SiC. In order to complement these problems, we made new combinations of the coating layers that the ZrC layers composed of SiC. In this study, after Silicon carbide(SiC) were chemically vapor deposited on graphite substrate, Zirconium carbide(ZrC) were deposited on SiC/graphite substrate by using Zr reaction technology with Zr sponge materials. The different morphologies of sub-deposited SiC layers were correlated with microstructure, chemical composition and mechanical properties of deposited ZrC films. Relationships between deposition pressure and microstructure of deposited ZrC films were discussed. The deposited ZrC films on SiC of faceted structure with smaller grain size has better mechanical properties than deposited ZrC on another structure due to surface growth trend and microstructure of sub-deposited layer.

• 공업화학
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• 제8권1호
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• pp.84-91
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• 1997

대기압하에서 수소를 첨가한 연소염장치를 이용하여 몰리브덴 기판 위에 다이아몬드 필름을 증착시켰다. 기판 온도의 증가에 따라 핵생성밀도가 증가하였으며, $1000^{\circ}C$ 이상에서는 흑연화되고 이것이 수소 원자에 의해 에칭되었다. $C_2H_2/O_2$ 유량비를 증가시킬수록 핵생성밀도는 증가하였지만 결정형태가 구형화되며 비정질카본이 많이 증착되었다. $H_2$를 첨가하면, 표면 활성도가 향상되어 다이아몬드 핵생성밀도가 증가되었으며, 비정질카본을 에칭시켜 우수한 결정성의 다이아몬드 필름을 얻을 수 있었다. 증착시간을 증가시키면 다이아몬드 필름의 두께가 증가하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.250-250
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• 2011

Zinc oxide (ZnO) structures have great potential in many applications. Currently, the most commonly used method to grow ZnO nanostructres are the vapor transport method (VPT). The morphology of the ZnO structures largely related to the growth conditions, including growth temperature, distance between the substrate and source, and gas ambient. Previously ZnO nanosturecutres with high crystallinity were obtained at the growth temperature of 800$^{\circ}C$, in the argon and oxygen gas ambient. In this study, we report the properties of the ZnO nanostructures, which were synthesized on Au-catalyzed Si substrate by VPT, using a mixture of ZnO and graphite powders as source material under the different condition, including gas ratio of argon/oxygen and distance between substrate and source at the growth temperature of 800$^{\circ}C$. The structural and optical properties of the ZnO nanostructures were investigated by field-emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), and photoluminescence (PL).