• 조명전기설비학회논문지
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• 제25권4호
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• pp.65-70
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• 2011

Perfluorocompounds (PFCs) gases were decomposed by gliding arc plasma generated by AC pulse power. $N_2$ gas of 10 LPM flow rate and $H_2$ gas of 0.5 LPM were introduced into the gliding arc plasma generated between a pair of electrodes with SUS 303 material, and the PFCs gases were injected in the plasma and thereby were decomposed. The PFCs gas-decomposition-characteristics through the gliding arc plasma were analyzed by FT-IR, where pure $N_2$ and $H_2$-added $N_2$ environment were used to generate the gliding arc plasma. The PFCs gas-decomposition-properties were changed by electric power for gliding arc plasma generation and the H2 gas addition was effective to enhance the PFCs decomposition rate.

• 대한기계학회논문집B
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• 제33권11호
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• pp.869-875
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• 2009

The purpose of this paper is to investigate the optimal condition of the syngas production by reforming of propane using Gliding arc plasma reformer. The gliding arc plasma reformer in 3 phases has been newly designed and developed with a quick starting and fast response time. It can be applicable to the various types of fuels (Hydrocarbons $C_xH_y$), and it has a high conversion rate of fuels and high production of hydrogen. The parametric screening studies were carried out according to the changes of a steam feed amount i.e., steam/carbon ratio, total gas flow rate and input electric power. The optimum operating conditions were S/C ratio 2.8, total gas flow rate of 14 L/min and input electric power of 2.4 kW. The result of optimum operating conditions showed the 55 % $H_2$, 14 % CO, 15 % $CO_2$, 10 % $C_3H_8$ and 4 % $CH_4$. Also, $C_3H_8$ conversion, $H_2$ yield and $H_2$ selectivity were 90 %, 42 %, 15 %, respectively. The energy efficiency and specific energy requirements were 37 % and 334 kJ/mol respectively.

• Environmental Engineering Research
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• 제17권2호
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• pp.89-94
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• 2012

Pyrolysis/gasification technology utilizes an energy conversion technique from various waste resources, such as biomass, solid waste, sewage sludge, and etc. to generating a syngas (synthesis gas). However, one of the major problems for the pyrolysis gasification is the presence of tar in the product gas. The tar produced might cause damages and operating problems on the facility. In this study, a gliding arc plasma reformer was developed to solve the previously acknowledged issues. An experiment was conducted using surrogate benzene and naphthalene, which are generated during the pyrolysis and/or gasification, as the representative tar substance. To identify the characteristics of the influential parameters of tar decomposition, tests were performed on the steam feed amount (steam/carbon ratio), input discharge power (specific energy input, SEI), total feed gas amount and the input tar concentration. In benzene, the optimal operating conditions of the gliding arc plasma 2 in steam to carbon (S/C) ratio, 0.98 $kWh/m^3$ in SEI, 14 L/min in total gas feed rate and 3.6% in benzene concentration. In naphthalene, 2.5 in S/C ratio, 1 $kWh/m^3$ in SEI, 18.4 L/min in total gas feed rate and 1% in naphthalene concentration. The benzene decomposition efficiency was 95%, and the energy efficiency was 120 g/kWh. The naphthalene decomposition efficiency was 79%, and the energy yield was 68 g/kWh.

• 한국대기환경학회지
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• 제30권4호
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• pp.339-349
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• 2014

$CO_2$ emission has been gradually increased due to rising fossil fuel use. A gliding arc plasma scrubber (GAPS) was proposed to destruct $CO_2$. For optimum design of GAPS, a CFD analysis has been conducted in different configuration for the system. The parameters considered included gas injection velocity at the nozzle and gas flow rate to gap between electrodes. The reactor configuration affected velocity fields which caused changes in the mixture fraction and the retention time. The mixing effect of $CO_2$ and supplied gas ($CH_4$ and steam) was enhanced by installing a orifice baffle. This revealed that the orifice baffle is effective in $CO_2$ conversion by positioning the reactants in the gas into the center of plasma discharge.

• 공업화학
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• 제22권1호
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• pp.31-36
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• 2011

사불화탄소($CF_4$)는 반도체 제조공정에서 플라즈마 에칭과 화학기상증착(CVD)에서 사용되어온 가스이다. $CF_4$는 적외선을 강하게 흡수하고 대기 중 잔류시간이 길어서 지구온난화에 영향을 미치기 때문에 고효율의 분해가 필요하다. 본 연구에서는 플라즈마와 워터젯을 결합하여 방전영역을 증가시키고 다량의 OH 라디칼을 생성시켜 $CF_4$를 고효율로 분해할 수 있는 워터젯 글라이딩 아크 플라즈마 시스템을 개발하였다. 실험 변수로 전극 형태, 전극 각도, 가스 노즐직경, 전극 간격과 전극 길이를 취하였다. 변수실험을 통하여 Arc 형태의 전극에서 전극 각도가 $20^{\circ}$, 가스 노즐 직경이 3 mm, 전극 간격이 3 mm, 전극 길이가 120 mm일 때 $CF_4$ 분해율은 최고 93.4%까지 도달하였다.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2006년도 제32회 KOSCO SYMPOSIUM 논문집
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• pp.144-148
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• 2006

Characteristics of a plasma reactor for partial oxidation of methane, especially focused on the role and effectiveness of plasma chemistry, is investigated. Partial oxidation of methane is investigated using a rotating arc which is a three dimensional version of a typical glidingarc. The rotating arc has both the characteristics of equilibrium and non-equilibrium plasma. Non-equilibrium characteristics of the rotating gliding arc can be increased by rotating an elongated arc string attached at both the tip of inner electrode and the edge of outer electrode. In this way, plasma chemistry can be enhanced and hydrogen selectivity can reach almost 100% that is much higher than thermal equilibrium condition. As a result, the present study enables the strategic approach of the plasma reforming process by means of appropriate reactor design to maximize plasma effect and resulting in maximized reaction efficiency.

• 한국연소학회지
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• 제11권2호
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• pp.15-21
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• 2006

Characteristics of a plasma reactor for partial oxidation of methane, especially focused on the role and effectiveness of plasma chemistry, are investigated. Partial oxidation of methane is investigated using a rotating arc which is a three dimensional version of a typical gliding arc. Three different modes of operation were found. Each mode shows different reforming performance. The reason for the difference is due to the difference in relative role of thermal and plasma chemistry in overall process. A mode with high temperature results higher methane conversion and hydrogen selectivity in contrast to the mode with lower temperature where poor methane conversion and higher selectivity of $C_2$ species are observed. In this way, we can confirm that by controlling characteristic of process or controlling relative strength of plasma chemistry and thermal chemistry, it is possible to map an optimal condition of reforming process by rotating arc.

• 한국기후변화학회지
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• 제8권1호
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• pp.63-71
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• 2017

It is recognized that tetrafluoromethane ($CF_4$) has a great influence on global warming. The $CF_4$ is known to have a large impact on climate change due to its large global warming index. In this study, a waterjet plasma scrubber (WPS) was designed and manufactured for the $CF_4$ decomposition. The WPS is a novel technology which is combined a gliding arc plasma and water injection at the center of the plasma discharge. This can give an innovative way for $CF_4$ decomposition by achieving larger plasma columnand generating OH radicals. A performance analysis was achieved for the design factors such as waterjet flow rate, total gas flow rate, consumption electric power, and electrode gap. The highest $CF_4$ decomposition and energy efficiencies were 64.8% and 6.43 g/kWh, respectively; Optimal operating conditions were 20 mL/min of waterjet flow rate, 200 L/min total gas flow rate, 5.3 kW consumption electric power, and 4.4 mm electrode gap. As for the 2 stage reactor of the WPS, the $CF_4$ decomposition efficiency improved as the 85.3% while the energy efficiency decreased as the 5.57 g/kWh.

• Korean Chemical Engineering Research
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• 제49권4호
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• pp.485-490
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• 2011

사불화탄소($CF_4$)는 반도체 제조공정에서 에칭과 반응기 세척에서 사용되어온 가스이다. $CF_4$는 적외선을 강하게 흡수하고 대기 중 잔류시간이 길어서 지구온난화에 영향을 미치기 때문에 고효율의 분해가 필요하다. 본 연구에서는 플라즈마와 워터젯을 결합하여 워터젯 글라이딩 아크 플라즈마 시스템을 개발하고, 이를 이용하여 $CF_4$를 고효율로 분해할 수 있도록 방전영역을 증가시키고 다량의 OH 라디칼을 생성시킬 수 있는 최적의 조업 조건을 결정하였다. 공정 실험 변수로는 워터젯 주입량, $CF_4$ 초기 농도, 전체 가스량과 주입에너지량(SEI : Specific energy input)을 선정하였다. 변수실험을 통하여 워터젯 주입량이 25.5 mL/min, $CF_4$ 초기 농도 2.2%, 전체 가스량 9.2 L/min, SEI 7.2 kJ/L일 때 $CF_4$ 분해율은 최고 97%까지 도달하였다.

• 한국대기환경학회지
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• 제26권6호
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• pp.624-632
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• 2010

Perfluorocarbons (PFCs) are widely used in semiconductor industry. These gases need to be removed efficiently because of their strong absorption of infrared radiation and long atmospheric lifetimes which cause the global warming effect. To destruct $CF_4$, a waterjet gliding arc plasma was designed and manufactured. The highest $CF_4$ destruction showed at waterjet plasma case, compared to plasma discharge only or water scrubber only, respectively. In addition, it could be known that the $CF_4$ destruction should be associated with the electron and OH radicals. The operating conditions such as waterjet flow rate, initial $CF_4$ concentration, total gas flow rate, specific energy input were investigated experimentally using a plasma waterjet scrubber. Through the parametric studies, the highest $CF_4$ destruction of 94.5% was achieved at 0.2% $CF_4$, 2.1 kJ/L SEI, 20 L/min total gas flow rate and 18.5 mL/min waterjet flow rate.