• 전력전자학회논문지
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• 제11권5호
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• pp.471-479
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• 2006

LCD 원판이 세대별로 대형, 중량화됨에 따라 제조, 공정라인의 자동 반송장비도 대형화 되어 가고 있는 추세다. 기존 스토커는 크레인의 주행축에 회전형 전동기와 기계적 동력변환 장치를 사용하고 있어, 복잡한 구조와 기계적 마찰에 의한 잦은 유지, 보수가 필요하게 되고 파티클 발생을 최소화 시켜야 하는 문제점을 안고 있다. 이런 문제점들을 해결하기 위해, 본 논문에서는 단위면적당 추력이 큰 영구자석 여자 횡자속 선형전동기를 적용하고 제안된 제어 알고리즘 및 제어기, 전력변환장치를 제작해서 대형, 고출력, 장거리화 되고 있는 7세대 스토커의 주행축에 실험, 검증하였다.

• 한국결정성장학회지
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• 제7권4호
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• pp.610-618
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• 1997

반응용침법으로 제조된 $Al_2O_3$/Al 복합재료는 900-$1200^{\circ}C$의 온도범위에서 $Al_2O_3$ 분말성형체에 용융Al을 침투시켜 제조하였다. 용융침투는 각 온도에서 잠복기를 거친후 발생하였으며, 복합재료의 성장속도는 시간에 따라 선형적으로 비례하였다. 제조된 복합재료의 주성분은 $Al_2$O$_3$와 Al이었고 소량의 Si이 탐지되었다. 복합재료의 상대밀도는 $Al_2O_3$ 입자크기가 증가함에 따라 증가하였고 용융 침투온도가 높을수록 감소하였다.

• 한국재료학회지
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• 제15권5호
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• pp.285-292
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• 2005

Anti-reflection film was coated by using spherical silica nano colloids. Silica colloid sol was reserved between two inclined slide glasses by capillary force, and particles were convectively stacked to form a film onto the substrate as the water evaporates. As the sliding speed increased, the thickness of the film decreased and the wavelength at the maximum transmittance decreased. The microstructure observed by SEM showed that silica particles were nearly close packed, which enabled the calculation of the effective refractive index of the film. The film thickness was measured by proffer and calculated from the wavelength of maximum transmittance and the effective refractive index. The effective refractive index of the film could be controlled by a subtle controlling of the coating speed and by mixing two different sized silica particles. When the 100 nm and 50 m particles were mixed at 4:1-5:1 volume ratio, the maximum transmittance of $95.2\%$ for one-sided coating was obtained. This is the one that has increased by $3.8\%$ compared to bare glass substrate, and shows that $99.0\%$ of transmittance or $1.0\%$ of reflectance can be achieved by the simple process if both sides of the substrate are coated.

• 한국전기전자재료학회논문지
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• 제21권6호
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• pp.499-502
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• 2008

In this work, Ga-doped ZnO (GZO) thin films for gas sensor application were deposited on low temperature co-fired ceramics (LTCC) substrates, by RF magnetron sputtering method. The LTCC substrate is one of promising materials for this application since it has many advantages (e.g., low cost production, high manufacturing yields and easy realizing 3D structure etc.). The LTCC substrates with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The structural properties of the fabricated GZO thin film with thickness of 50 nm is analyzed by X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM). The film shows good adhesion to the substrate. The GZO gas sensors are tested by gas measurement system and show fast response and recovery characteristics to $NO_x$ gas that is 27.2 and 27.9 sec, recpectively.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2007년도 춘계학술대회
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• pp.309-312
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• 2007

Sputter deposition followed by surface treatment was studied using reactive RF plasma as a method for preparing titanium oxide($TiO_{2}$) films on indium tin oxide(ITO) coated glass substrate for dye-sensitized solar cells(DSSCs). Anatase structure $TiO_{2}$ films deposited by reactive RF magnetron sputtering under the conditions of $Ar/O_{2}$(5%) mixtures, RF power of 600W and substrate temperature of $400^{\circ}C$ were surface-treated by inductive coupled plasma(ICP) with $Ar/O_{2}$ mixtures at substrate temperature of $400^{\circ}C$, and thus the films were applied to the DSSCs, The $TiO_{2}$ Films made on these exhibited the BET specific surface area of 95, the pore volume of $0.3cm^{2}$ and the TEM particle size of ${\sim}25$ nm. The DSSCs made of this $TiO_{2}$ material exhibited an energy conversion efficiency of about 2.25% at $100mW/cm^{2}$ light intensity.

• 한국대기환경학회지
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• 제13권4호
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• pp.285-296
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• 1997

The suspended particulate matters had been collected on quartz fiber fiters by a cascade impactor having 9 size stages for 4 years (Sep. 1991 to Dec. 1995) in Kyung Hee University-Suwon Campus. Membrane filters were used to collected the particulate matters on each stage. The weight concentration on each stage was obtained by a microbalance and further chemical element levels were determined by an x-ray fluorescence system. Based on these chemical information, our study focused on applying the target transformation factor analysis (TTFA), a receptor model, to identify aerosol sources and to apportion quantitatively their mass contribution. There are total of 63 ambient data sets. Each data set consists of the 8 size-ranged subdata sets characterized by 16 elemental variables. By the results, four to five sources were extracted from each size range and some sources reappeared in other size ranges. Then total of 8 source profiles were statistically generated from all the ranges, such as oil burning source, soil source, field burning source, gasoline related source, coal burning source, marine source, glass related source, and unknown sources. Apportioning aerosol mass to each source was intensively examined by investigating emission inventories near the study area. The results showed that soil particle source was the most significant contributor. However, coal and oil burning sources were the major anthropogenic ones. The study finally proposed some air quality control strategies to achieve the clean air quality in Suwon area.

• 한국지반공학회:학술대회논문집
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• 한국지반공학회 2010년도 춘계 학술발표회
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• pp.448-456
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• 2010

The mechanical behavior of granular soils is affected by particle bonding including natural cementation. This study addresses a simple model of small strain stiffness and salt concentration based on wave measurements of salt-cemented particulate media. Published models of artificially cemented soils with different curing methods and several types of cementation agents are reviewed. Glass beads with the median diameter of D50 = 0.5mm are prepared in rectangular cells using the water-pluviated method in salt water with different concentrations. Piezo disk elements and bender elements embedded in the cell are used for the measurements of compressional and shear waves. The relationships between elastic wave velocities and salt concentration show an exponential function. The measured small strain stiffness matches well the predicted small strain stiffness based on micromechanics for simple cubic monosized sphere particles. This study demonstrates that the salt concentration in salt-cemented specimen may be evaluated by using elastic wave velocities.

• 한국환경보건학회지
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• 제34권2호
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• pp.148-152
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• 2008

Coated filters were developed to replace the glass impinger methods that use reagent solutions. The purpose of this study was to simultaneously measure nitrogen dioxide ($NO_2$) and respirable suspended particles (RSP) by a filtration method with a cyclone connected to a pump. A first pre-filter for RSP and second filter for $NO_2$, which was soaked in a TEA (Triethanolamine) solution, were loaded into a filter cassette with a pump flow rate of 1.7 l/m. After sampling, the TEA soaked filter was removed from the cassette, placed in a large test tube (10 ml), mixed, and allowed time to develop. The absorbance (abs) of the diazo compound of the $NO_2$ and N-(1-Napthylethylenediamine dihydrochloride) in the color reagent was measured at 545 nm on a spectrophotometer. The collection efficiency(%) of $NO_2$ by each 3 filter soaked in TEA solution and used in the cyclone with a pump flow rate 1.7 l/m was $89{\pm}3%$ and the correlation coefficient between the true $NO_2$ concentration and that determined by the TEA soaked filters was 0.993(p<0.001).

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 춘계학술대회 논문집
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• pp.13-13
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• 2010

Piezoelectric sensors are extensively used to measure force because of their high sensitivity and low cost. however, the development of device with reduced size but with improved sensitivity is highly important. Low-temperature co-fired ceramic (LTCC) is one of promising materials for this application than a silicon substrate because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of PZT thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.204-204
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• 2010

A development of device with reduced size and improved sensitivity is highly impotant Pb(Zr,Ti)$O_3$ thin films are widely used both to make actuator and sensor due to their high sensitivity and low cost. In this study, the feasibility of a piezoelectric presssure sensors based on hybrid low-temperaute co-fired ceramic (LTCC) technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. PZT thin films were successfully prepared on between top and bottom Au electrode with LTCC substrates using RF magnetron sputtering. In addition, The frequency response characteristics of the sensor under varing pressure has been analysed. by Network Analyser (HP-8722D). A frequency shift range has been obseved from 1.7GHz to 1.8GHz with a good linearity for applied pressure from 0 psi up to 25 psi.