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Formation and Characteristics of the Fluorocarbonated SiOF Film by $O_2$/FTES-Helicon Plasma CVD Method

  • Kyoung-Suk Oh;Min-Sung Kang;Chi-Kyu Choi;Seok-Min Yun
    • Proceedings of the Korean Vacuum Society Conference
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    • 1998.02a
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    • pp.77-77
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    • 1998
  • Present silicon dioxide (SiOz) 떠m as intennetal dielectridIMD) layers will result in high parasitic c capacitance and crosstalk interference in 비gh density devices. Low dielectric materials such as f f1uorina뼈 silicon oxide(SiOF) and f1uoropolymer IMD layers have been tried to s이ve this problem. I In the SiOF ftlm, as fluorine concentration increases the dielectric constant of t뼈 film decreases but i it becomes unstable and wa않r absorptivity increases. The dielectric constant above 3.0 is obtain어 i in these ftlms. Fluoropolymers such as polyte$\sigma$따luoroethylene(PTFE) are known as low dielectric c constant (>2.0) materials. However, their $\alpha$)Or thermal stability and low adhesive fa$\pi$e have h hindered 야1리ru뚱 as IMD ma따"ials. 1 The concept of a plasma processing a찌Jaratus with 비gh density plasma at low pressure has r received much attention for deposition because films made in these plasma reactors have many a advantages such as go여 film quality and gap filling profile. High ion flux with low ion energy in m the high density plasma make the low contamination and go어 $\sigma$'Oss피lked ftlm. Especially the h helicon plasma reactor have attractive features for ftlm deposition 야~au똥 of i앙 high density plasma p production compared with other conventional type plasma soun:es. I In this pa야Jr, we present the results on the low dielectric constant fluorocarbonated-SiOF film d밑JOsited on p-Si(loo) 5 inch silicon substrates with 00% of 0dFTES gas mixture and 20% of Ar g gas in a helicon plasma reactor. High density 띠asma is generated in the conventional helicon p plasma soun:e with Nagoya type ill antenna, 5-15 MHz and 1 kW RF power, 700 Gauss of m magnetic field, and 1.5 mTorr of pressure. The electron density and temperature of the 0dFTES d discharge are measUI벼 by Langmuir probe. The relative density of radicals are measured by optic허 e emission spe따'Oscopy(OES). Chemical bonding structure 3I피 atomic concentration 따'C characterized u using fourier transform infrared(FTIR) s야3띠"Oscopy and X -ray photonelectron spl:’따'Oscopy (XPS). D Dielectric constant is measured using a metal insulator semiconductor (MIS;AVO.4 $\mu$ m thick f fIlmlp-SD s$\sigma$ucture. A chemical stoichiome$\sigma$y of 야Ie fluorocarbina$textsc{k}$영-SiOF film 따~si야영 at room temperature, which t the flow rate of Oz and FTES gas is Isccm and 6sccm, res야~tvely, is form려 야Ie SiouFo.36Co.14. A d dielec$\sigma$ic constant of this fIlm is 2.8, but the s$\alpha$'!Cimen at annealed 5OOt: is obtain려 3.24, and the s stepcoverage in the 0.4 $\mu$ m and 0.5 $\mu$ m pattern 킹'C above 92% and 91% without void, res야~tively. res야~tively.

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Assessment of the Combustion Diffusion Pattern and Fire Risk of a Water Purifier Damaged by a General Fire (일반화염에 의해 소손된 정수기의 연소 확산 패턴 및 화재위험성 평가)

  • Choi, Chung-Seog
    • Fire Science and Engineering
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    • v.26 no.3
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    • pp.35-39
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    • 2012
  • This paper analyzes the combustion diffusion pattern when a water purifier is artificially ignited outside and inside in order to provide data to examine the cause of fire of a water purifier damaged by fire. The analysis result of the combustion diffusion pattern of a water purifier shows that the combustion diffused at a higher speed when it was ignited inside the purifier than when ignited outside. It took approximately 360 seconds for the water purifier to be half-burned when ignited on the outside, and approximately 180 seconds when ignited from inside. That is, it is thought that the internal combustion speed is higher because the internal ignition causes the generated heat to be accumulated and radiated instantly. It was observed that the water purifier damaged by fire caused by external ignition showed a uniform carbonization pattern and the carbide burned down at the bottom were gradually deposited. The water purifier damaged by internal ignition showed a relatively clear boundary of carbonized surface, which formed a V-pattern. The difference in the combustion patterns presents an objective base from which to determine where the fire started. By the time the purifier was half-burned by fire, the built-in fuse had not melted and the power supply protection device did not operate. In addition, as was found in the case of the fuse damaged by a general fire, carbonization occurred at the metal holder, and it is thought that this fact may be used as a basis from which to determine the cause of a fire.

Development on Glass Formulation for Aluminum Metal and Glass Fiber (유리섬유 및 알루미늄 금속 혼합물 유리조성 개발)

  • Cho, Hyun-Je;Kim, Cheon-Woo
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.10 no.4
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    • pp.247-254
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    • 2012
  • Vitrification technology has been widely applied as one of effective processing methods for wastes generated in nuclear power plants. The advantage of vitrifying for low- and intermediate-level radioactive wastes has a large volume reduction and good durability for the final products. Recently, a filter using on HVAC(Heating Ventilating & Air Conditioning System) is composed with media (glass fiber) and separator (aluminum film) has been studied the proper treatment technology for meeting the waste disposal requirement. Present paper is a feasibility study for the filter vitrification that developing of the glass compositions for filter melting and melting test for physicochemical characteristic evaluation. The aluminum metal of film type is preparing with 0.5 cm size for proper mixing with glass frit, glass fiber is also preparing with 1 cm size within crucible. The glass compositions should be developed considering molten glass are related with wastes reduction. Glass compositions obtained from developing on glass formulation are mainly composed of $SiO_2$ and $B_2O_3$ for aluminum metal. A variety of factors obtained from the glass formulation and melting test are reviewed, which is feeding rate and glass characteristics of final products such as durability for implementing the wastes disposal requirement.

The Evaluation of Minimum Cooling Period for Loading of PWR Spent Nuclear Fuel of a Dual Purpose Metal Cask (국내 경수로 사용후핵연료의 금속 겸용용기 장전을 위한 최소 냉각기간 평가)

  • Dho, Ho-Seog;Kim, Tae-Man;Cho, Chun-Hyung
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.14 no.4
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    • pp.411-422
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    • 2016
  • Recently, because the wet pool storage facilities of NPPs in Korea has become saturated, there has been much active R&D on an interim dry storage system using a transportation and storage cask. Generally, the shielding evaluation for the design of a spent fuel transportation and storage cask is performed by the design basis fuel, which selects the most conservative fuel among the fuels to be loaded into the cask. However, the loading of actual spent fuel into the transportation metal cask is not limited to the design basis fuel used in the shielding evaluation; the loading feasibility of actual spent fuel is determined by the shielding evaluation that considers the characteristics of the initial enrichment, the maximum burnup and the minimum cooling period. This study describes a shielding analysis method for determining the minimum cooling period of spent fuel that meets the domestic transportation standard of the dual purpose metal cask. In particular, the spent fuel of 3.0~4.5wt% initial enrichment, which has a large amount of release, was evaluated by segmented shielding calculations for efficient improvement of the results. The shielding evaluation revealed that about 81% of generated spent fuel from the domestic nuclear power plants until 2008 could be transported by the dual purpose metal cask. The results of this study will be helpful in establishing a technical basis for developing operating procedures for transportation of the dual purpose metal cask.

An Epidemiological Study on the Neurological Sequelae of Acute Carbon Monoxide Poisoning (급성일산화탄소중독(急性一酸化炭素中毒)의 신경학적(神經學的) 후유증(後遺症)에 관(關)한 역학적(疫學的) 연구(硏究))

  • Park, Byung-Joo;Cho, Soo-Hun;Ahn, Yoon-Ok;Shin, Young-Soo;Yun, Dork-Ro
    • Journal of Preventive Medicine and Public Health
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    • v.17 no.1
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    • pp.5-24
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    • 1984
  • There has been an immense need for elaborate studies on the complications and the neuological sequelae generated by acute carbon monoxide (CO) poisoning which is highly prevalent in Korea due to widespread adoption of the anthracite coal briquette as domestic fuel for heating and for cooking. For this epidemiological study, a total of 444 subjects who received hospital emergency care for acute CO poisoning during the period of March 1982 to February 1983 were randomly selected from the emergency patients's lists of 13 general hospitals in Seoul area. Informations on the neurological sequelae were elucidated by means of home visiting with prearranged questionnaire consisting questions and concise neurological examination. The findings obtained were summarized as follows; 1. The complications were found in 18% of the surveyed and acute decubitus was comprised 67.5% of the complications. 2. The total cumulative incidence of the neurological sequelae was 41.2 per 100 patients and the absolute incidence rate regardless of the duration after poisoning was 40.8%. 3. The incidence of the neurological sequelae was higher in the older age than in the younger and also higher in female than in male. Twice higher incidence was observed in the admitted patients than in the non-admitted patients and the incidence became higher in proportion to the duration of CO exposure, coma and admission. The poorer the consciousness level of patients found, at emergency room and at discharge, the higher the incidence. The incidence of the neurological sequelae by emergency care was higher in hyperbaric oxygen therapy group(51.9%) than in 100% $O_2$ group(38.0%) 4. A total of five variables significantly associated with the occurrence of the neurological sequelae were selected by the stepwise discriminant analysis. The variables were following course of emergency care, age, consciousness level at discharge, admission duration, and consciousness level at emergency room in their sequence of discriminant power. Eight variables were selected as those associated with the degree of the neurological sequelae through the stepwise multiple regression analysis. Of these variables, the acute decubitus alone explained 21.1% of the total variation ana all the eight variables could explain 36.5% of the same. The remaining seven variables listed in the order of their relative importance were: age, consciousness level at discharge, admission duration, coma duration and consciousness level at emergency room. 5. It was postulated that unexpectedly high incidence of the neurological sequelae of the CO poisoning in this epidemiological study was mainly due to the inadequate emergency care and the lack of efficient and sophisticated treatment measure. In the effort to minimize the incidence of grave neurological sequelae of acute CO poisoning, new guidelines for the emergency care and treatment should be pursued with efficient ways.

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A Study on the Gradation Effect of the Property of Roller Compacted Concrete Pavement (골재 입도분포가 도로포장용 롤러전압 콘크리트에 미치는 영향 연구)

  • Song, Si Hoon;Lee, Seung Woo
    • International Journal of Highway Engineering
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    • v.17 no.3
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    • pp.49-58
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    • 2015
  • PURPOSES : The use of environmentally friendly construction methods has been recently encouraged to reduce fuel consumption and the effects of global warming. For this purpose, the roller compacted concrete pavement (RCCP) construction method has been developed. RCCP is more environmentally friendly and economically efficient than general concrete by reducing the amount of CO2 generated through the application of a smaller amount of cement. RCCP has a number of advantages such as an easy construction method, low cost, high structural hydration performance, and aggregate interlocking. However, mix design standards and construction guidelines of RCCP are required for domestic application. In addition, a study on aggregate selection, which has an effect on the characteristics of RCCP, is necessary owing to a limited number of researches. Thus, the aggregate effect on the performance of RCCP in securing the required strength and workability was evaluated in consideration of domestic construction. METHODS : Sand and coarse aggregates of both 19mm and 13mm in maximum size were used in this study. Four types of aggregate gradations (s/a = 30%, 58%, and 70% for the sand and coarse aggregate of 19mm in maximum size, and s/a = 50% for a combination of the three types of aggregates) were set up to investigate the effects of the PCA band on the RCC characteristics. The conditions of s/a = 30% and 70% were evaluated to check the gradation effect outside of the recommended band. The conditions of s/a = 58% and 50% were used because they are the optimum combination of the two and three types of aggregates, respectively. RCCP gradation band was suggested gradation with a proper construction method of RCCP by synthetically comparing and analyzing the correlation of optimum water content, maximum dry density, and strength of requirements through its consistency and compaction test. RESULTS : The lower and upper limit lines are insufficient to secure a relatively strong development and workability compared to an aggregate gradation in the RCCP gradation band region. On the other hand, the line in the RCCP gradation band and the 0.45 power curve in the RCCP gradation band region were satisfactory, ensuring the required strength and workability. CONCLUSIONS : The suitable aggregate gradation on RCCP process should meet the RCCP gradation band area; however, fine particles passing through a #60 sieve do not need to be within the recommended gradation band because the influence of this region on such fine particles is small.

Identification of Korean Poaceae Weeds Based on DNA Sequences (DNA 염기서열에 기초한 벼과 잡초의 분자생물학적 동정)

  • Lee, Jeongran;Kim, Chang-Seok;Lee, In-Yong;Oh, Hyun-Ju;Kim, Jung Hyun;Kim, Sun Yu
    • Weed & Turfgrass Science
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    • v.4 no.1
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    • pp.26-34
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    • 2015
  • Korean Poaceae includes approximately 80 species of the agricultural weeds. Precise species identification is the first step for more effective weed management in the agricultural fields. However, the identification of species in Poaceae is not easy without the assistance of taxonomists or identification experts although they are relatively easy to distinguish from the plants of the other family by the unique characteristics of caryopsis. Thus, DNA barcode was suggested as an alternative powerful technique for species identification by using short sections of DNA from a specific region of the genome. Two standard barcode markers of vascular plants, chloroplast rbcL and matK, and a supplementary nuclear ribosomal Internal Transcribed Spacer (ITS) region were used for barcode of major Korean Poaceae weeds, 403 individuals of 84 taxa. All the barcode markers revealed a good level of sequencing success with the lowest 73.7% for matK and the highest 88.8% for rbcL. The barcode sequences were deposited to the National Center for Biotechnology Information (NCBI) database for public use. Combined matK and ITS showed very high resolving power with 92.9%. Besides the identification of weeds for weed managment, the generated DNA barcode data could be used for many other applications such as rapid biodiversity assessment and conservation prioritization.

Preliminary Analyses of the Deep Geoenvironmental Characteristics for the Deep Borehole Disposal of High-level Radioactive Waste in Korea (고준위 방사성폐기물 심부시추공 처분을 위한 국내 심부지질 환경특성 예비분석)

  • LEE, Jongyoul;LEE, Minsoo;CHOI, Heuijoo;KIM, Geonyoung;KIM, Kyungsu
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.14 no.2
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    • pp.179-188
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    • 2016
  • Spent fuels from nuclear power plants, as well as high-level radioactive waste from the recycling of spent fuels, should be safely isolated from human environment for an extremely long time. Recently, meaningful studies on the development of deep borehole radioactive waste disposal system in 3-5 km depth have been carried out in USA and some countries in Europe, due to great advance in deep borehole drilling technology. In this paper, domestic deep geoenvironmental characteristics are preliminarily investigated to analyze the applicability of deep borehole disposal technology in Korea. To do this, state-of-the art technologies in USA and some countries in Europe are reviewed, and geological and geothermal data from the deep boreholes for geothermal usage are analyzed. Based on the results on the crystalline rock depth, the geothermal gradient and the spent fuel types generated in Korea, a preliminary deep borehole concept including disposal canister and sealing system, is suggested.

Composting of Compostable Household Wastes in a Home Composter without Additives (소형 퇴비화용기에 의한 가정쓰레기의 무첨가 퇴비화)

  • Seo, Jeoung-Yoon;Lee, Geun-Sun;Choi, Hyoung-Sub
    • Korean Journal of Environmental Agriculture
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    • v.17 no.2
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    • pp.160-163
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    • 1998
  • In this study, the compostable household wastes from a house were composted in a home composter without adding any bulking agent and microorganisms. Every day wastes of 1kg were added to the composter during the experimental period. The following results were obtained : 1. Each component of the compostable household wastes generated every day showed very difference. 2. While composting proceeded at room temperature by suppling 1,1322 l air per hour, the composting material maintained the water content of 74.36 ${\sim}$ 85.14%, whereas while composting proceeded at $45^{\circ}C$ by suppling 427 l air per hour, the compost had optimal water content. The electric power of 132kwh a month was required by operating the composting unit at $45^{\circ}C$. 3. During 20 day, decomposition of 28% at room temperature and 44% at $45^{\circ}C$ were obtained respectively. 4. The accumulation of inorganic compound contents were not shown during the composting period, However, the content of salt and Cd was very high. Therefore, using the compost for agriculture has to be careful. 5. The biofilter removed the odorous substants efficiently at the room temperature due to increasing surface loading.

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Quality Characteristics and Antioxidant Properties of Black and Yellow Soybeans (검은 콩 및 노란 콩의 품질 특성 및 콩 부위별 항산화 활성)

  • Lee, Lan-Sook;Choi, Eun-Ji;Kim, Chang-Hee;Kim, Young-Boong;Kum, Jun-Seok;Park, Jong-Dae
    • Korean Journal of Food Science and Technology
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    • v.46 no.6
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    • pp.757-761
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    • 2014
  • The objective of this study was to investigate the content of phenolic compounds and their contribution to antioxidant activity in the seed coats, dehulled and whole black and yellow soybeans. The total phenolic and total anthocyanin contents were analyzed. FRAP, DPPH and ABTS assays were carried out to determine the antioxidant activities. The 100-seed weight and color values were also analyzed. Black seed coats had significantly greater total phenolic and total anthocyanin contents as compared to whole beans, dehulled beans, and yellow seed coats. Moreover, black seed coats exhibited the highest antioxidant activity among the samples, regardless of the utilized method. The antioxidant activities determined in all assays positively correlated with the total phenolic ($0.980{\leq}r{\leq}0.991$) and anthocyanin contents ($0.990{\leq}r{\leq}0.997$) as well as among themselves ($0.992{\leq}r{\leq}0.996$). It is anticipated that the information generated from this study will help support the development of soybean products for improving health.