• 반도체디스플레이기술학회지
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• 제19권4호
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• pp.18-21
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• 2020

Undetected wafer slip during the lift pin-down motion in semiconductor equipment may affect the center to edge variation, wafer warpage, and pattern misalignment in plasma equipment. Direct measuring of the amount of wafer slip inside the plasma process chamber is not feasible because of the hardware space limitation inside the plasma chamber. In this paper, we demonstrated a practice for the wafer lift pin-up and down motions with respect to the gear ratio, operating voltage, and pulse width modulation to maintain accurate wafer position using remote control linear servo motor with an experimentally designed chamber mockup. We noticed that the pin moving velocity and gear ratio are the most influencing parameters to be control, and the step-wised position control algorithm showed the most suitable for the reduction of wafer slip.

• 대한기계학회논문집A
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• 제26권8호
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• pp.1506-1511
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• 2002

A computer aided expert system fur spur, helical, bevel and worm gears was newly developed by using AutoiCAD system and its AutoLISP computer language in the present study. Two methods are available for a designer to draw a gear. The first method needs the gear design parameters such as pressure, module, number of tooth, shaft angle, velocity, materials, etc. When the gear design parameters are inputted, a gear is drawn in AutoCAD system and maximum allowable power and shaft diameter are calculated additionally. The second method calculates all dimensions and gear design parameters to draw a gear when the information such as transmission, reduction ratio, nm, materials and pressure are inputted. The system includes four programs. Each program is composed of a data input module, a database module, a strength calculation module, a drawing module, a text module and a drawing edit module. In conclusion, the CAD system would be widely used in companies to find the geometric data and manufacturing course.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.458-461
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• 2002

This study presents development of a machine for shrink wrapping of cans or drink bottles with thermoplastic films. The accurate position-control, the safety factor of chains, the reduction-ratio of the chain and gear, the appropriate heating temperature for banding vinyl are discussed for the optimum shrink wrapping M/C design.

• Tribology and Lubricants
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• 제3권2호
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• pp.72-80
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• 1987

A planocentric torque driver comprises a stationary internal gear with the teeth of a circular concave profile and an external gear of an epitrochoid curve. The contact mechanism of the teeth is examined and analyzed by means of computer simulation. Analyses of load variation on the tooth and strength of appliance is carried out. And the output device is examined. Finally, the design of a 59:1 reduction ratio torque driver is presented.

• Tribology and Lubricants
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• 제4권2호
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• pp.60-67
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• 1988

Conventional theory of gear mechanism can't be applied to analyze the harmonic drive due to specific movement of the teeth. This paper deals with an analysis of kinematics and geometry of the tooth engagement of a harmonic drive comprising circular spline, flexspline and wave generator. A theoretical new tooth profile of the flexspline in meshing internal rigid gear with involute profile is obtained. Characteristics of harmonic drive reducer are shown according to parameters such as deviation coefficient, deviation distance, addendum modification coefficient. As an example, the design of harmonic drive with 1:80 reduction ratio is presented.

• 한국기계가공학회지
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• 제19권9호
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• pp.116-121
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• 2020

In recent times, fuel economy enhancement and environmental regulation compliance have become the main topics of interest in the automobile industry. Electric vehicles are desirable alternatives to the existing cars that employ internal combustion engines. Specifically, electric vehicles are equipped with inverters, motors, and a gearbox instead of engines and transmission mechanisms. The gearbox is a key component, used to transmit power from the electric motor to the wheel. Therefore, the design of the gearbox is critical. However, most engineers design gears based only on their experience because no standards pertaining to the design factor exist, other than those for the gear ratios. To overcome this problem, the structural stabilities must be examined considering the design factors of the gears. In this study, we considered the module and number of teeth as the main factors. The constraints corresponded to the final gear ratio and fixed distance between each axle of the shafts. Moreover, a structural analysis was conducted, and the variation trend of the maximum equivalent stress against changes in the gear module and number of teeth was examined. By performing such an analysis, the structural stability in the design of a gear system could be effectively investigated.

• 한국산학기술학회논문지
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• 제21권1호
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• pp.277-283
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• 2020

기계식 기어의 치를 영구자석으로 대체한 동심 마그네틱 기어에서 원주방향을 따라 놓인 모든 자석이 동력 전달에 관여하므로 감속비를 결정하는 자석의 극수비는 마그네틱 기어의 거동 특성에 큰 영향을 미친다. 본 논문에서는 극수비를 변화시켜가며 마그네틱 기어에서 생성되는 전달토크의 밀도, 동손을 고려한 토크의 효율, 코깅 특성을 포함한 토크의 품질 등을 유한요소 해석을 이용하여 비교 분석하였다. 구동측의 극수를 2극에서 5극까지 변화시킬 때 전달토크가 최대가 되는 최적의 극수비가 존재함을 확인하였으며 이는 모듈레이터를 통한 구동측 자기장의 필터링 성분에 직접적인 영향을 받다. 전달 효율 역시 와전류 생성 밀도와 자기장간에 비례특성이 있으므로 전달 토크 밀도와 유사한 경향을 나타내는 것을 알 수 있으며 낮은 기어비에서는 95% 이상의 효율을 보인다. 제한된 극수를 갖는 영구자석의 상호작용에 기인하는 코깅 특성은 일반적인 동기 모터에서와 같이 구동측 자석의 개수와 모듈레이터 치의 개수간의 최소공배수에 반비례하는 것을 확인할 수 있었다. 전달 토크 평가를 위해 실제 시험 모델이 제작되었고 실증시험이 진행되었다.

• 한국기계가공학회지
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• 제21권9호
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• pp.21-27
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• 2022

The rotorcraft engine gearbox transmits the power generated by the turboshaft engine to the rotor by reducing the rotational speed and increasing the torque. The core of the rotorcraft engine gearbox is lightweight performance, which requires maximum weight reduction within the range that meets various requirements and constraints. Therefore, lightweight design through gear macro geometry optimization is necessary. In this study, gear macro geometry optimization was performed to reduce the weight of a rotorcraft engine gearbox. NSGA-III was used for the optimization, resulting in a combination of the gear ratio and macro geometry that minimizes the weight of the total gear. In addition, the safety factor of the gears satisfied the given conditions.

• 한국자동차공학회논문집
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• 제10권3호
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• pp.218-226
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• 2002

This study was carried out to develop continuously variable-speed transmission(CVT) fur an agricultural tractor. The full-toroidal variator mechanism with flour discs and six rollers was utilized as a device fur changing speed ratio continuously. In system layout design, the sizes of the roller cylinders and the end-load cylinder, which were critical factors for controlling the variator, were designed. The planetary gear unit and six pairs of the gear assemblies were designed to establish the maximum speed of the vehicle at 30 ㎞/hr. In addition, the hydraulic clutch, the silent chain, the hydraulic manifold and the electronic controller were designed. Based on the design, a prototype CVT was developed and tested. Test results show that the CVT developed in this study could successfully provide variable speed of the tractor.

• 한국산학기술학회논문지
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• 제18권7호
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• pp.726-733
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• 2017

마그네틱 셔터 기어는 원주상에 마주하는 영구자석 레이어간의 자기장을 고조파 모듈레이터를 통해 동기화시켜 동력을 전달하는 장치이다. 이러한 장치는 기계식 감속기에 필적할만한 토크를 발생시키기 위해 과다한 희토류 영구자석이 이용되기 때문에 본 논문에서는 영구자석간의 자기 경로를 변화시켜 영구자석의 양을 기존 마그네틱 기어 대비 50% 수준으로 감소시킨 새로운 방식의 축형 마그네틱 기어를 제안한다. 제안한 시스템의 토크 크기는 공극 자기장의 고조파 분석과 유한 요소 해석을 통해 기존 시스템과 비교된다. 모듈레이터 두께와 개방비가 전달 토크의 크기에 영향을 미치는 주요 설계변수로 고려되어 민감도 해석이 수행되며 고속측과 저속측의 영구자석 극수에 의해 결정되는 기어비에 따른 코깅의 크기가 분석된다. 기계적인 접촉없이 커플링되어 동력을 전달하는 고속측과 저속측 사이의 동적 지배 모델이 유도된다. 2관성 공진계의 동특성을 갖는 유도된 모델을 기초로 하여 선형 제어기를 설계하여 고속측의 계단 입력 위치 제어를 수행하였다.