• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1996년도 추계학술대회 논문집
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• pp.342-345
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• 1996

This paper presents the basic characteristics of thin-film strain gauges using Cr thin-films, in which the Cr thin-films were deposited by DC magnetron sputtering. The optimized deposition conditions as a strain gauge were the input DC power was 7 W/$\textrm{cm}^2$ and the Ar vacuuming pressure was 9 mTorr. The characteristics of fabricated Cr thin-film strain gauge were the gauge factor(GF) was 5.86 in longitudinal strain and -2.04 in transverse one, the TCR was under 400 ppm/$^{\circ}C$ and the TCS was around 0 ppm/$^{\circ}C$.

• 감성과학
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• 제22권1호
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• pp.89-100
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• 2019

본 연구에서는 수면무호흡증이 다양한 합병증을 유발하는 질병으로서, 이를 위한 표준화된 수면다원검사가 고가이며 측정이 불편함을 고려하여, 환자가 익숙한 환경에서 검사를 받을 수 있도록 스트레치 섬유센서를 이용한 무구속 상태의 웨어러블 모니터링 시스템을 개발하고자 한다. 또한, 의복과 일체화된 디자인으로 제품화하여 그 유용성을 제안하고자 한다. 성인 남성용 롱 슬리브 티셔츠 형태로 착용형 수면무호흡 모니터링 스마트 의류를 개발하여, 수면무호흡 진단 지표 중 섬유형 센서를 기반으로 측정하는 호흡수(breathing rate)측정용 섬유센서, 산소포화도(oxygen saturation), 호흡기류(airflow)를 실시간 측정하였다. 최적의 조합비 샘플 4가지를 통한 gauge factor를 측정한 결과, gauge factor 20.3을 확인하였고, 3회 숨을 크게 내쉴 때 호흡유량이 최대 2048ml였다. 산소포화도 69.45%로 최소 측정 가능 산소포화도 70% 정도의 결과를 나타내었다. 세탁 후 인장에 따른 센서 성능 평가 결과는 전체적으로 gauge factor 18 수준의 값으로, 세탁에 대한 내구성이 입증되었다. 본 연구를 통하여 수면무호흡증 환자의 수면효율이 떨어지고 여러 합병증을 동반하는 문제에 대해, 가정에서 쉽게 사용할 수 있는 착용형 수면무호흡 모니터링 스마트 의류를 개발하여 호흡수, 호흡유량, 산소포화도의 3가지 지표를 측정 가능함을 확인하였다.

• 센서학회지
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• 제20권3호
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• pp.213-218
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• 2011

The load cell is a force sensor and a transducer that is used to convert a physical force into a electrical signal for weighing equipment. Most conventional load cells are widely used a metal foil strain gauge for sensing element when force being applied spring element in order to converts the deformation to electrical signals. The sensitivity of a load cell is limited by its low gauge factor, hysteresis and creep. But silicon-based sensors perform with higher reliability. This paper presents the basic design and development of the silicon type load cell with an SUS630 diaphragm. The load cell consists of two parts the silicon strain gauge and the SUS630 structure with diaphragm. Structure analysis of load cell was researched by theory to optimize the load cell diaphragm design and to determine the position of peizoresistors on a silicon strain gauge. The piezo-resistors are integrated in the four points of silicon strain gauge processed by ion implantation. The thickness of the silicon strain gauge was polished by CMP under 100 ${\mu}M$. The 10 mm diameter SUS630 diaphragm was designed for loads up to 10 kg with 300 ${\mu}M$ of diaphragm thickness. The load cell was successfully tested, the variation of ${\Delta}$R(%) of four points on the silicon strain gauge is good linearity properties and sensitivity.

• 생물환경조절학회지
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• 제7권3호
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• pp.268-274
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• 1998

열수지 경류센서에 의한 멜론의 흡수량 측정오차는 최저 0.3%에서 최대 31.8% 범위 내에 있었으며, 일사량 20MJ.m$^{-2}$ .d$^{-1}$에서는 오차가 적었으나 일사량이 이보다 많아지면 많아질수록 센서측정 경류량이 실측양액 소비량보다 적어지는 경향이었고 일사량이 적어질수록 센서측정 경류량이 실측양액 소비량보다 많아지는 경향이었다. 센서간의 오차는 최저 0.1%에서 최대 13.0%의 오차율을 보였다. 열수지센서측정 경류량은 일사량이나 온도와 고도의 부의 상관관계를 보였다. 그러므로 이를 이용 보정계수를 산출하면 보다 정확한 멜론의 경류량을 측정할 수 있을 것으로 판단되었다.

• 센서학회지
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• 제14권1호
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• pp.56-61
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• 2005

This paper present characteristics of chromium oxide thin-film as piezoresistive sensors, which were deposited on Si substrates by DC reactive magnetron sputtering in an argon-Oxide atmosphere for high temperature applications. The chemical composition, physical and electrical properties and thermal stability ranges of the $CrO_{x}$ sensing elements have studied. $CrO_{x}$ thin films with a linear gauge factor(GF${\fallingdotseq}$15), high electrical resistivity (${\rho}$ = $340{\mu}{\Omega}cm$) and TCR<-55 ppm/$^{\circ}C$ have been obtained. These $CrO_{x}$ thin films may allow high temperature pressure sensor miniaturization to be achieved.

• 센서학회지
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• 제13권4호
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• pp.303-308
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• 2004

This paper descibes on the characteristics of Ta-N(tantalum nitride) ceramic thin-film strain gauges which were deposited on Si substrates by DC reactive magnetron sputtering in an argon-nitrogen atmosphere (Ar-$(4{\sim}16%)N_{2}$) for high-temperature applications. These films were annealed in $2{\times}10^{-6}$ Torr vacuum furnace at the range of $500{\sim}1000^{\circ}C$. Optimum deposition atmosphere and annealing temperature were determined at $900^{\circ}C$ for 1 hr. in 8% $N_{2}$ gas flow ratio. Under optimum formation conditions, the Ta-N thin-film for strain gauges was obtained a high-resistivity of $768.93{\mu}{\Omega}{\cdot}cm$, a low temperature coefficient of resistance (TCR) of -84 ppm/$^{\circ}C$ and a good longitudinal gauge factor (GF) of 4.12.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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• pp.97-100
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• 2001

This paper presents the characteristics of Ta-N thin-film strain gauges as high-temperature strain gauges, which were deposited on Si substrate by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(4~16%)$N_2$). These films were annealed for 1 hour in $2{\times}10^{-6}$ Torr vaccum furnace range $500\sim1000^{\circ}C$. The optimized conditions of Ta-N thin-film strain gauges were annealing condition($900^{\circ}C$, 1 hr.) in 8% $N_2$ gas flow ratio deposition atmosphere. Under optimum conditions, the Ta-N thin-films for strain gauges is obtained a high resistivity, $\rho=768.93$ ${\mu}{\Omega}cm$, a low temperature coefficient of resistance, TCR=-84 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal gauge factor, GF=4.12.

• 한국철도학회논문집
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• 제5권3호
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• pp.148-157
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• 2002

A health monitoring system becomes a useful tool to obtain information on long term behavior of the important railway structures such as very long span and special type bridges. The health monitoring system not only gives the direct measurement data of the railway bridges but also provides the basic data on the maintenance of the structures. Therefore, periodic calibrations of the health monitoring system will be a necessary step toward precise and accurate assessment of the railway bridges. In this study, the calibration and gauge factor readjustment process made for the health monitoring system installed in the railroad bridges is reviewed and some findings are explained in detail: specifically, the calibrators made for this purpose are illustrated and the regression processes of the calibration on long-term displacement using water level sensor, longitudinal displacement using LVDT sensor, instantaneous displacement using LVDT sensors and accelerometer are described in full length. Based on the regression results, it was found that the gauge factors need to be readjusted according to the regression equation but, since the deviation or shift is not serious so far, long-term observation on each sensor is also recommended. Future work will be concentrated on the long-term analysis of each sensor and on the database creation so that the assessment of the structures is possible.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 하계학술대회 논문집
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• pp.573-576
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• 2000

The physical, electrical and piezoresitive characteristics of CrN(chromium nitride) thin-films on silicon substrates have been investigated for use as strain gauges. The thin-film depositions have been carried out by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(5∼25 %)Na$_2$). The deposited CrN thin-films with thickness of 3577${\AA}$ and annealing conditions(300$^{\circ}C$, 48 hr) in Ar-10 % N$_2$deposition atmosphere have been selected as the ideal piezoresistive material for the strain gauges. Under optimum conditions, the CrN thin-films for the strain gauges is obtained a high electrical resistivity, $\rho$=1147.65 ${\mu}$$\Omega$cm, a low temperature coefficient of resistance, TCR=-186 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal gauge factor, GF=11.17.

• 물과 미래
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• 제25권3호
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• pp.79-86
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• 1992

ARF(Areal Reduction Factor) have been developed and used to convert point I-D-F to areal I-D-F in many countries. In Korea, through ARF was calculated in Han river basin by several researchers, it has limit to apply to other regions \ulcorner 새 low density of rainfall gauge station and shortage of data. In this study ARF has developed in areas of high density of rainfall gauge station, Pyungchang river(han river), Wi stream(nakdong river), and Bochung stream(Guem river) basin by fixed-area method. And coefficient of variation of annual mean precipitation was presented to use ARF in othere areas and its applicability was analyzed.