• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.221-221
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• 2014

The present work proposes an improved numerical simulator for design and modification of large area capacitively coupled plasma (CCP) processing chamber. CCP, as notoriously well-known, demands the tremendously huge computational cost for carrying out transient analyses in realistic multi-dimensional models, because electron dissociations take place in a much smaller time scale (${\Delta}t{\approx}10-8{\sim}10-10$) than time scale of those happened between neutrals (${\Delta}t{\approx}10-1{\sim}10-3$), due to the rf drive frequencies of external electric field. And also, for spatial discretization of electron flux (Je), exponential scheme such as Scharfetter-Gummel method needs to be used in order to alleviate the numerical stiffness and resolve exponential change of spatial distribution of electron temperature (Te) and electron number density (Ne) in the vicinity of electrodes. Due to such computational intractability, it is prohibited to simulate CCP deposition in a three-dimension within acceptable calculation runtimes (<24 h). Under the situation where process conditions require thickness non-uniformity below 5%, however, detailed flow features of reactive gases induced from three-dimensional geometric effects such as gas distribution through the perforated plates (showerhead) should be considered. Without considering plasma chemistry, we therefore simulated flow, temperature and species fields in three-dimensional geometry first, and then, based on that data, boundary conditions of two-dimensional plasma discharge model are set. In the particular case of SiH4-NH3-N2-He CCP discharge to produce deposition of SiNxHy thin film, a cylindrical showerhead electrode reactor was studied by numerical modeling of mass, momentum and energy transports for charged particles in an axi-symmetric geometry. By solving transport equations of electron and radicals simultaneously, we observed that the way how source gases are consumed in the non-isothermal flow field and such consequences on active species production were outlined as playing the leading parts in the processes. As an example of application of the model for the prediction of the deposited thickness uniformity in a 300 mm wafer plasma processing chamber, the results were compared with the experimentally measured deposition profiles along the radius of the wafer varying inter-electrode gap. The simulation results were in good agreement with experimental data.

• 대한환경공학회지
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• 제37권12호
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• pp.689-695
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• 2015

부착성 미생물을 이용하여 기체상 오염물질을 여과 방식으로 처리하는 생물 공정은 기체상의 흐름 특성과 공정 인자간 관련성이 매우 복잡하게 작용하는 특징을 가진다. 본 연구는 기체상 공정의 특성으로 미세한 변화에도 반응이 급변하는 현상과 물질간 반응관계의 중요성을 고려하여 일반화된 plug flow계 반응조의 공정 분석 도구로 활용 가능한 1차원 동적 수치해석 모델을 개발하였다. 개발 모델은 물질수지 원리를 기초하여 확산을 단순화하고 물질간 경쟁, 상승, 억제 반응 등 상호 반응관계를 반영하여 구성이 용이하도록 하였다. 개발 모델의 적용성 평가는 저속과 고속으로 구분된 BTX 제거 실험에 대하여 보정과 검정 절차로 수행되었다. 개발 모델은 고속 조건의 toluene을 제외하고 모든 조건과 항목에서 상관계수($R^2$) 0.79 이상에서 실험 결과를 재현하였다. 개발 모델은 연속흐름(plug flow)계로써 기체상-생물막의 일반화된 공정에 적용할 수 있는 것으로 평가되었으며 복잡하고 다양한 공정 실험에서 설계 인자 분석 및 효율 평가에 유용한 도구로 사용될 수 있다.

• 대한기계학회논문집A
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• 제36권5호
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• pp.563-569
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• 2012

대용량 화력발전 보일러 과열기와 재열기 튜브는 과열에 취약하여 보일러 정지 시 튜브 내부의 산화 스케일 두께를 측정하여 과열상태를 평가한다. 산화스케일 두께측정에 의한 튜브 온도예측은 튜브의 발췌가 불가피하고 정확한 과열지점의 선정과 튜브의 초기운전온도가 확보되지 못하면 유의한 튜브온도예측결과를 얻을 수 없는 문제점이 있다. 또한 해석적 방법에 의해 튜브 온도를 예측하는 경우 튜브 외부 연소가스에 대한 연소, 복사, 대류 및 난류유동에 대한 방대한 해석이 필요한 반면 순시적인 부하의 변동, 탄종의 변화 및 운전방법의 변화를 반영할 수 없으므로 지속적인 튜브의 온도를 예측할 수 없는 단점이 있다. 본 논문에서는 보일러 운전정보와 유로망 해석을 통해 튜브의 열유속을 계산하고 이를 이용하여 단시간에 튜브의 온도를 예측할 수 있는 기법을 제시하였다. 본 기법을 Larson-Miller Parameter 법과 같은 실용적인 튜브 손상평가기법과 결합하면 유용한 고온손상감시의 수단으로 활용이 가능할 것으로 판단된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.239-240
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• 2012

With advancements in semiconductor device technologies, manufacturing processes are getting more complex and it became more difficult to maintain tighter process control. As the number of processing step increased for fabricating complex chip structure, potential fault inducing factors are prevail and their allowable margins are continuously reduced. Therefore, one of the key to success in semiconductor manufacturing is highly accurate and fast fault detection and classification at each stage to reduce any undesired variation and identify the cause of the fault. Sensors in the equipment are used to monitor the state of the process. The idea is that whenever there is a fault in the process, it appears as some variation in the output from any of the sensors monitoring the process. These sensors may refer to information about pressure, RF power or gas flow and etc. in the equipment. By relating the data from these sensors to the process condition, any abnormality in the process can be identified, but it still holds some degree of certainty. Our hypothesis in this research is to capture the features of equipment condition data from healthy process library. We can use the health data as a reference for upcoming processes and this is made possible by mathematically modeling of the acquired data. In this work we demonstrate the use of recurrent neural network (RNN) has been used. RNN is a dynamic neural network that makes the output as a function of previous inputs. In our case we have etch equipment tool set data, consisting of 22 parameters and 9 runs. This data was first synchronized using the Dynamic Time Warping (DTW) algorithm. The synchronized data from the sensors in the form of time series is then provided to RNN which trains and restructures itself according to the input and then predicts a value, one step ahead in time, which depends on the past values of data. Eight runs of process data were used to train the network, while in order to check the performance of the network, one run was used as a test input. Next, a mean squared error based probability generating function was used to assign probability of fault in each parameter by comparing the predicted and actual values of the data. In the future we will make use of the Bayesian Networks to classify the detected faults. Bayesian Networks use directed acyclic graphs that relate different parameters through their conditional dependencies in order to find inference among them. The relationships between parameters from the data will be used to generate the structure of Bayesian Network and then posterior probability of different faults will be calculated using inference algorithms.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.433-433
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• 2012

As the requirement in patterning geometry continuously shrinks down, the termination of etch process at the exact time became crucial for the success in nano patterning technology. By virtue of real-time optical emission spectroscopy (OES), etch end point detection (EPD) technique continuously develops; however, it also faced with difficulty in low open ratio etching, typically in self aligned contact (SAC) and one cylinder contact (OCS), because of very small amount of optical emission from by-product gas species in the bulk plasma glow discharge. In developing etching process, one may observe that coupon test is being performed. It consumes costs and time for preparing the patterned sample wafers every test in priority, so the coupon wafer test instead of the whole patterned wafer is beneficial for testing and developing etch process condition. We also can observe that etch open area is varied with the number of coupons on a dummy wafer. However, this can be a misleading in OES study. If the coupon wafer test are monitored using OES, we can conjecture the endpoint by experienced method, but considering by data, the materials for residual area by being etched open area are needed to consider. In this research, we compare and analysis the OES data for coupon wafer test results for monitoring about the conditions that the areas except the patterns on the coupon wafers for real-time process monitoring. In this research, we compared two cases, first one is etching the coupon wafers attached on the carrier wafer that is covered by the photoresist, and other case is etching the coupon wafers on the chuck. For comparing the emission intensity, we chose the four chemical species (SiF2, N2, CO, CN), and for comparing the etched profile, measured by scanning electron microscope (SEM). In addition, we adopted the Dynamic Time Warping (DTW) algorithm for analyzing the chose OES data patterns, and analysis the covariance and coefficient for statistical method. After the result, coupon wafers are over-etched for without carrier wafer groups, while with carrier wafer groups are under-etched. And the CN emission intensity has significant difference compare with OES raw data. Based on these results, it necessary to reasonable analysis of the OES data to adopt the pre-data processing and algorithms, and the result will influence the reliability for relation of coupon wafer test and whole wafer test.

• 한국방재학회 논문집
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• 제9권6호
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• pp.51-56
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• 2009

안전 및 품질 평가시스템은 유해물질 재난을 예방하기 위해 유해물질의 생산 저장 수송 취급에 매우 중요하다. 현재 유해물질은 플라스틱, 가정의 세척제, 비료 또는 석유관련제품으로 우리의 일상생활 어디에서든지 존재하고 있다. 그러나 유해물질은 인간이나 환경에 누출되었을 때 매우 위험한 물질이다. 유해물질은 석유기반 경제시대에 매우 폭넓게 사용되고 있다. 우리나라의 환경부는 전세계적으로 유해물질의 유형이 약 십만개가 넘을 것으로 추산하고 있다. 또한 매년 4백개 이상의 새로운 물질이 개발되고 있다. 따라서 유해물질 관리측면에서 우리는 유해물질 사고로부터 안전한가에 대해 의문이 제기될 수 있다. 1984년에 발생해 6,400명이 넘는 사망자와 3만명 이상의 부상자를 낸 인도 보팔사고는 이러한 우리의 유해물질 안전에 대한 불안을 증폭시키는 대표적인 사례이다. 우리나라는 최근 산업의 고도화로 각종 유해물질 사고가 빈번하게 발생하고 있다. 따라서 낙후된 유해물질 관리시스템을 자기관리가 가능한 안전시스템으로 전환하기 위한 위험평가시스템의 구축이 우리사회에 요구되고 있다. 본 연구는 유해물질 위험평가시스템 구축을 위한 기반을 제공하기 위해 지난 10년동안 유해물질 관련시설에서 발생한 사고사례들을 연구의 대상으로 하여 유해물질 시설사고의 특성을 빈도분석, 교차분석 등의 통계기법을 적용하여 분석하였다. 분석결과 사고시설 유형과 연도, 계절, 발생지역, 사망자 발생간 관계가 있는 것으로 나타났다.

• 약학회지
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• 제52권2호
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• pp.137-146
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• 2008

Even though driving under the influence of drug (DUID) is a worldwide problem, we, Korea has no regulation system yet except for alcohol, and there are little cases reported related to DUID. In order to investigate the type of abused drugs for drivers in Korea, we tried to analyze controlled and non-controlled drugs in alcohol-positive blood samples. 275 whole bloods, which were positive for alcohol on the roadside test, were collected from the police for two months ($Nov.{\sim}Dec.$ 2006). The analytical strategy was constituted of three steps: First, alcohol in blood samples were confirmed and quantified by gas chromatography. Second, controlled drugs were screened by $Evidence_{investigator}\;^{TM}$ (Randox, U.K.) as preliminary test. It was based on immunoassay by biochip array analyzer. Nine groups of drug abuse were screened: amphetamines, methamphetamines, cannabis, cocaine, opiates, barbiturates, methadone, benzodiazepines I (oxazepam) & II (lorazepam). Finally, confirmation of these drugs was performed by GC-MS. Blood samples were extracted by solid-phase extraction by $RapidTrace^{TM}$ (Zymark, U.S.A.). After trimethylsilyl (TMS) derivatization, eluates were analyzed to GC-MS. Total 49 drugs were investigated in this study including controlled drugs, antidepressants, 1st generation antihistamines, dextromethorphan, nalbuphine, ketamine, etc. For rapid detection, we developed the automated identification system. It was made up a new software, "DrugMan", modified Chemstation data analysis menu and newly developed macro modules. A series of peak selection, identification and reporting of the results were performed automatically by this system. Concentrations of alcohol in 275 blood samples were ranged from 0.011 to 0.249% (average, 0.119%). Among 149 blood samples, just six samples (4.0%) were showed positive results to the immunoassay: one methamphetamine and five benzodiazepines group I. By GC-MS confirmation, only benzodiazepines were detected and methamphetamine was not detected from immunoassay positive blood sample. Besides these drugs, 5 chlorpheniramines, dextromethorphan, diazepam, doxylamine, ibuprofen, lidocaine and topiramate were also detected in whole bloods by GC-MS. Conclusively, the frequency of drug abuse for Korean drivers was relatively low. There was none case which illegal drug was detected. However these results were limited to alcohol positive blood samples, so it is necessary to analyze more samples including alcohol negative blood.

• 한국자동차공학회논문집
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• 제10권5호
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• pp.45-57
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• 2002

In this paper, the results gained by applying many impingement models to the cylinder and flat plate were analyzed in comparison with the experimental data to study a spray/wall interaction phenomena. To begin with, the behavior of spray injected normal to the wall was analysed using three different impingement models ; Naber and Reitz model(NR model), Watkins and Wang model(WW model) and Park and Watkins model(PW model) in the present calculation. The results obtained from these models were compared with experimental data of Katsura et. al. The results indicated that PW model was in better agreement with experimental data than the NR and WW model. Also f3r spray injected at 30DEG , the result of three models were compared with experimental data of Fujimoto et. al. The results showed that m model overpredicted the penetration in the radial direction because this model was based on the inviscid jet analogy. WW model did not predicted the radius and height of the wall spray effectively. It might be thought that this discrepancy was due to the lack of consideration of spray film velocity occurred at impingement site. The result of PW model agrees with the experimental data as time goes on. In particular, a height of the spray droplets was predicted more closely to the experimental data than the other two models. The results of PW model in which the spray droplets were distributed densely around the edge of droplet distribution shaped in a circle had an agreement with the experimental data of Fujimoto et. al. Therefore, it was concluded that PW model performed better than M and WW model for prediction of spray behavior. The numerical calculation using PW model performed to the cylinder similar to the real shape of DI engine. The results showed that vortex strength near the wall in the cylinder was stronger than that in the case of flat plate. Contrary to the flat plat, an existence of the side wall in the cylinder caused the tangential velocity component to be reduced and the normal velocity component to be increased. The flow tends to rotate to the inside of cylinder going upward to the right side wall of cylinder gradually as time passes. Also, the results showed that as the spray angle increases, the gas velocity distribution and the tumble flow seemed to be formed widely.

• 한국기후변화학회지
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• 제4권4호
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• pp.371-384
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• 2013

최근 기후변화로 인해 잇따라 발생하는 전 지구적 이상기후의 출현은 사회 전반에 걸쳐 직 간접적으로 많은 영향을 미친다. 특히, 자연을 통해 기본 에너지를 얻는 농업은 기상환경에 따라 작물의 생장과 수확이 직접적으로 영향을 받기 때문에, 기후변화와 관련된 사회적 중요 관심사가 되었다. 본 연구에서는 국내 주요 수입곡물중 큰 부분을 차지하고 있는 옥수수와 밀에 대하여 주요 수출국인 미국과 중국을 대상으로 생산량에 많은 영향을 끼치는 온도의 변화 경향을 통해 취약성 평가를 하였다. 주요 곡물 생산국들의 곡물 생산성에 영향을 미치는 재배기간을 문헌 및 기존 연구를 통해 국가별로 파악하여 주요 재배기간으로 정하고, 옥수수와 밀에 대한 생산국별 주요 재배기간에 해당하는 미래 기상은 RCP8.5 기후변화 시나리오를 기반으로 구축하였다. 기온의 변화경향을 나타내는 적응성과 기온의 변화 정도를 나타내는 민감도를 이용하여 중국과 미국 간의 곡물별 생산취약성을 분석한 결과, 과거에 밀은 미국이 생산에 유리하고, 옥수수는 중국이 유리하였지만, 미래에는 두 곡물 모두 미국이 생산에 유리한 것으로 나타났다. 본 연구를 통해 도출된 생산성 취약성 평가 결과는 기후변화로 인한 미래 수입 곡물 가격변동에 대한 대비 자료로 이용될 수 있을 것으로 판단된다.

• 한국건설관리학회논문집
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• 제20권5호
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• pp.21-30
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• 2019

최근 전 세계적으로 지구온난화에 따른 이상기온과 화석연료 고갈 등 환경과 에너지문제는 인류의 생존을 위협하는 중대 과제로 대두되고 있다. 이에 따라 건축물 에너지 절감 및 온실가스 감축에 획기적으로 기여할 수 있는 혁신적인 건축물로서 제로에너지빌딩에 대한 관심이 높아지고 있다. 그러나 시장에서는 추가되는 건설비용은 제로에너지 인증 활성화에 큰 걸림돌이 되고 있다. 본 연구에서는 일반적인 민간 분양아파트를 연구의 대상으로 선정하고 초기 설계단계부터 제로에너지 인증을 위한 세부 요소들을 친환경주택 건설기준에 근거하여 제시하였으며, 인증 세부요소들의 비용효율분석을 통해 적정 가산비용을 제시하였다. 아직까지 기술수준과 물리적인 한계로 인하여 공동주택에서는 3등급까지만 인증이 구현 가능 한 것으로 분석되었다. 또한 생애주기동안 비용추이를 검토해본 결과 아직까지 제로에너지빌딩 5등급의 경우에서만 준공 후 13년 이내 모든 비용의 회수가 가능한 것으로 검토되었다. 앞으로 발주예정인 공동주택 사업 검토 시 본 연구에서 제시된 추가사업비가 적절히 반영되어 제로에너지빌딩 인증 활성화에 기여하고자 한다.