• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.196.1-196.1
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• 2013

반도체의 device design rule이 shrink 됨에 따라 공정이 난이도가 높아지고 이에 따른 관리가 어려워지고 있다. 특히 미세 particle에 대한 제어의 필요성은 보다 커졌다. 진공 chamber 발생하는 미세 particle의 주요 원인으로는 공정 중 발생한 polymer, chamber 내 부품의 식각 및 스퍼터링에 의한 부산물 등이 있다. Plasma 공정 도중 발생한 particle은 plasma 내 전자에 의해 대전되어 음의 전하량을 가지게 된다. 음의 전하량을 가진 particle은 plasma와 wafer의 경계면에서 형성되는 sheath 때문에 wafer에 도달하지 못하고 plasma 내에 부유하게 된다. 이러한 particle은 plasma가 꺼지게 되면 sheath가 사라지면서 wafer에 도달하게 되고 wafer의 오염을 유발하게 되고 생산 수율을 저하시키는 요인이 된다. 이러한 이유로 최근 plasma 공정에서는 공정 중 발생하는 부유성 particle에 대한 관리가 중요해졌다. 이를 관리하기 위해 plasma를 끄기 전 부유성 particle을 제거하는 방안을 고안하고 평가를 진행하였다. 공정이 끝나고 plasma가 꺼지기 전 plasma를 유지하여 부유성 particle이 wafer에 도달하지 못하는 상태에서 gas purge를 실시한다. 이러한 과정 후 plasma를 끄게 되면 부유성 particle이 wafer에 도달하는 것을 감소시키게 된다. 이번 평가를 통해 부유성 particle에 대해서 대략 20%의 감소 효과를 볼 수 있었다. 이를 토대로 향후 조건 최적화 후 적용 시 particle 감소뿐 만 아니라 수율 향상에도 기여할 수 있을 것이라 기대된다.

• Journal of Hydrogen and New Energy
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• v.33 no.6
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• pp.819-826
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• 2022

Fuel cell systems are being supplied to households and buildings to reduce greenhouse gases. The fuel cell systems have problems of high cost and slow startup due to fuel processors. Greenhouse gas reduction of the fuel cell systems is also limited by using natural gas. The problems can be solved by using a hydrogen generator consisting of a reformer and pressure swing adsorption (PSA). However, part load operation of the hydrogen generator is required depending on the hydrogen consumption. In this paper, PSA operation strategies are investigated for part load of the hydrogen generator. Adsorption and purge time were changed in the range of part load ratio between from 0.5 to 1.0. As adsorption time increased, hydrogen recovery increased from 29.09% to 48.34% at 0.5 of part load ratio. Hydrogen recovery and hydrogen purity were also improved by increasing adsorption and purge time. However, hydrogen recovery dramatically decreased to 35.01% at 0.5 of part load ratio.

• Journal of Energy Engineering
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• v.17 no.2
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• pp.47-53
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• 2008

The objective of this paper is to clarify the flow characteristic, velocity distribution, pressure loss, and other such fundamental data for the canister during loading and purging. The amount of gas that is loaded increases as the loading rate is decreased and the time increased, and the purging improves as the purge rate is increased. The hydrocarbons that are purged initially have a high concentration, and a large amount is purged. During loading and purging, the temperature initially increases and decreases drastically due to heat generation and heat loss.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2005.11a
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• pp.353-357
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• 2005

LOx post damage occurs from the development process of the full-scale gas generator which is necessary to 30 tonf class engine development was described. The cause and analysis for damage was described. The combustion test result of 4 injector, the full-scale gas generator and redesigned injector was described. Combustion instability, purge, the low momentum of LOx spray, small recess number, the low flow of LOx, and the high spray angle is main reason the possibility of knowing. The redesign for the injector in the direction of increase of recess number, increase of LOx and fuel spray angle, decrease of gap interval between the LOx post outer wall and fuel screen and increase of LOx post wall thick became accomplished.

• Bulletin of the Korean Chemical Society
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• v.35 no.10
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• pp.2995-3000
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• 2014

A sensitive concentration method utilising modified gas-purge microsyringe extraction (GP-MSE) was developed. Concentration (reduction in volume) to a microlitre volume was achieved. PAHs were utilised as semivolatile analytes to optimise the various parameters that affect the concentration efficiency. The injection rate and temperature were the key factors that affected the concentration efficiency. An efficient concentration (75.0-96.1%) of PAHs was obtained under the optimised conditions. The method exhibited good reproducibility (RSD values that ranged from 1.5 to 9.0%). The GP-MSE concentration method enhances the volume reduction (concentration factor), leading to a low method detection limit ($0.5-15ngL^{-1}$). Furthermore, this method offers the advantage of small-volume sampling, enabling even the detection of diurnal hourly changes in the concentration of PAHs in ambient air. Utilising this method in combination with GC-MS, the diurnal hourly flux of PAHs from the gas phase of ambient air was measured. Indeed, the proposed technique is a simple, fast, low-cost and environmentally friendly.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.13-13
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• 2009

본 연구는 MLCC 구성성분의 증발/비등에 의한 저분자물질의 제거가 bar 수축에 미치는 영향도를 평가하기 위해, 압착 bar에서 발생하는 고농도의 out gas를 정량하기 위한 최적 system을 구축하고자 하였다. gas 포집에 범용적으로 사용하는 Purge & Trap sampler 대신 Heating block를 사용하여 gas를 발생시키고 동시에 solvent에 용해시킴으로써 고농도의 시료가 희석될 수 있는 전처리 장치를 디자인하였다. 그 결과 고농도 gas 주입에 의한 장비오염과 peak saturation 문제가 해결되었고, gas phase의 시료를 liquid phase로 상전이 시켜 autosampler를 이용한 정확한 량의 시료 주입이 가능하였다. System의 Gage Linearity와 Bias는 각각 1.7%와 1.3%로 개선이 필요없는 수준의 정확도를 가졌다.

• Korean Journal of Microbiology
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• v.36 no.1
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• pp.52-57
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• 2000

A method for quantitative and qualitative analysis of geosmin, odorant produced by several actinomycetes and cyanobacteria, was established and optimized. The effects of environmental conditions on the growth of Phormidium sp. NIVA-CYA7 were examined and the production and release of geosmin by the species was analyzed by using the purge and trap-gas chromatographic technique. One of the major advantages of the technique established in the present study is that the preparation of sample is simpler and purge time is shorter. Under the culture conditions (pH 7.9, $20^{\circ}C$, 120-140 $\mu$E/$m^2$/s and Z8 medium), Phormidium showed growth characteristics with a lag phase for 8 days and an exponential phase for 14 days followed by a stationary phase. Reduction of inorganic nitrogen concentrations in the culture medium from 250 to 100 or 25 $\mu$M brought no significant effect on the cell growth. However, the cell growth was significantly inhibited with decreasing concentrations of inorganic phosphorus from 25 to 10 or 2.5 $\mu$M. When the inorganic phosphorus concentration in the medium was lowered from 25 to 10 $\mu$M, the levels of geosmin in the organism expressed as percentages per unit TOC and chlorophyII-$\alpha$ increased by 35% and 68%, respectively. When the initial pH of the medium was 9.4, geosmin content was 0.0824 $\mu$g/mg C, which was 2-fold higher than that at pH 7.9 Consequently, the level of geosmin in Phormidium was found to vary with growth phases of the culture, external inorganic phosphorus concentration and external pH, while the release of geosmin was not significantly affected by the factors.

• Journal of the Korea Society of Computer and Information
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• v.21 no.9
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• pp.11-18
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• 2016

In this paper, we propose a gas classification method using combined features for an electronic nose system that performs well even when some loss occurs in measuring data samples. We first divide the entire measurement for a data sample into three local sections, which are the stabilization, exposure, and purge; local features are then extracted from each section. Based on the discrimination analysis, measurements of the discriminative information amounts are taken. Subsequently, the local features that have a large amount of discriminative information are chosen to compose the combined features together with the global features that extracted from the entire measurement section of the data sample. The experimental results show that the combined features by the proposed method gives better classification performance for a variety of volatile organic compound data than the other feature types, especially when there is data loss.

• Journal of the Korea Safety Management & Science
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• v.12 no.4
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• pp.93-98
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• 2010

본 연구에서는, 반도체, LCD 공정에서 금속막을 증착하기 위하여 PECVD장비에 화재, 폭발 위험성과 독성을 가진 Silane가스를 사용하게 되는 장비인 gas cabinet, pipeline, VMB(Valve manifold box), MFC(mass flow controller)장비 등, 전반적인 시스템에 대하여 영국 HES의 ALARP개념을 도입하여 위험성 평가를 실시하여 문제점을 도출하고 대책을 강구 하는데 목적이 있고, 여러 가지 문제점중 절대적으로 수용 할 수 없는 Critical Risk로는 Gas Cylinder를 사용하여 Silane을 공급하고자 할 때에는 필히 Gas Cabinet을 사용하여 공급하여야 하고, Tube Trailer를 사용하여 공급하고자 할 때에는 필수적으로 Purge System을 갖추어 공급하여야 한다. 선택적으로 수용할 수 있는 High, Medium Risk로는 Gas Cylinder 또는 Tube Trailer를 사용하여 Silane을 공급하고자 할 때는 Inlet 부분에 RFO(Resticted Flow Orifice)를 설치하여 사용하고 Gas Supply Room에는 CO2소화설비를 적용하지 말고 Water Mist등 물 분무설비를 적용하여야한다.

• Proceedings of the Korean Society of Food Hygiene and Safety Conference
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• 2001.10a
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• pp.140-140
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• 2001

A sensitive analytical method based on gas chromatograpy-mass spectrometry with a selected ion monitoring (GC/MS-SIM) with the purge-and-trap concentration and with headspace method (in limited applications) was developed for determining of epichlorohydrin in canned beverages coated with epoxy resin. The calibration curve in the range of $0.5\sim50ng$ had correlation coefficient greater than 0.998 and a detection limit of $0.l\mug/L$ was obtained using a sample volume of 20ml. The predominant ions of epichlorohydrin produced in MSD using electron ionization(EI) were m/z 57 ([M-CI]+) and 62/64 $([M-CH_2O]+)$. In survey of epichlorohydrin in thirty commercial canned beverage samples, none of them was detected.