Determination of the initial cross-sections for the $C_4F_6$ molecule from the electron drift velocity
($C_4F_6$ -Ar혼합기체에서의 Plasma Discharge Simulation을 위한 $C_4F_6$ 초기단면적 결정)
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- Proceedings of the KIEE Conference
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- 2011.07a
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- pp.1544-1545
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- 2011