• Proceedings of the Korean Vacuum Society Conference
• /
• 2015.08a
• /
• pp.181.2-181.2
• /
• 2015

Sputtering is one of the most popular physical deposition methods due to their versatility and reproducibility. Synthesis of Cr thin films by DC magnetron sputtering using glancing angle deposition (GLAD) has been reported. Chromium thin films have been prepared at two different working pressure($2.0{\times}10-2$, 30, $3.3{\times}10-3torr$) on Si-wafer substrate using magnetron sputtering with glancing angle deposition (GLAD) technique. The thickness of Cr thin films on the substrate was adjusted about 1 mm. The electrical property was measured by four-point probe method. For the measurement of density in the films, an X-ray reflectivity (XRR) was carried out. The sheet resistance and column angle increased with the increase of glancing angle. However, nanohardness and density of Cr thin films decreased as the glancing angle increased. The measured density for the Cr thin films decreased from 6.1 to 3.8 g/cc as the glancing angle increased from $0^{\circ}$ to $90^{\circ}$ degree. The low density of Cr thin films is resulted from the isolated columnar structure of samples. The evolution of the isolated columnar structure was enhanced at the conditions of low sputter pressure and high glancing angle. This GLAD technique can be potentially applied to the synthesis of thin films requiring porous and uniform coating such as thin film catalysts or gas sensors.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.27 no.12
• /
• pp.1772-1780
• /
• 2003

An optimal soot blowing system has been developed for an optimal operation of power utility boilers by both minimization of the use of steam and the number of soot blowers worked during soot blowing. Traditionally, the soot blowing system has been operated manually by operators. However, it causes the reduction of power and thermal performance degradation because all soot blowers installed in the plant should be worked simultaneously even there are lots of tubes those are not contaminated by slagging or fouling. Heat transfer area is divided into four groups, furnace, convection area including superheater, reheater and economizer, and air preheater in the present study. The condition of cleanness of the tubes is calculated by several parameters obtained by sensors. Then, a part of soot blowers works automatically where boiler tubes are contaminated. This system has been applied in a practical power plant. Therefore, comparison has been done between this system and manual operation and the results are discussed.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2009.11a
• /
• pp.33.1-33.1
• /
• 2009

To date, nanostructured tungsten oxides with a variety of stoichiometries, such as WO3, WO2.9, W18O49, and WO2, have been prepared, because they are promising candidates for applications such as gas sensors, photocatalysts, electrochromic devices, and field emission devices. Among them, W18O49 and WO2 have been widely studied due to their outstanding chemical sensing, catalytic, and electron emissive properties. Here we report, for the first time, a one-pot solution-phase route to synthesizing a novel composite hierarchical hollow structure without adding catalysts, surfactants, or templates. The products, consisting of a WO2 hollow core sphere surrounded by a W18O49 nanorod shell (yielding a sea urchin-like structure), were generated as discrete structures via Ostwald ripening. To our knowledge, this type of composite hierarchical core/shell structure has not been reported previously. The morphological evolution and the detailed growth mechanism were carefully studied. We also demonstrate that the size of the hollow urchins is readily tunable by controlling the reactant concentrations.Interestingly, although bulk tungsten oxides are weakly paramagnetic or diamagnetic, the as-prepared products show unusual ferromagnetic behavior atroom temperature. The urchin structures also show a very high Brunauer-Emmet-Teller (BET) surface area, suggesting that they may potentially be applied to chemical sensor or effective catalyst technologies.

• Transactions of the Korean Society of Automotive Engineers
• /
• v.7 no.9
• /
• pp.36-47
• /
• 1999

Three-way catalyst converter, cleaning up the exhaust gas contamination of SI engine, has the best efficiency when A/F ratio is near the stoichiometry . The feedback control using oxygen sensors in the exhaust manifold has limits caused by the system delays. So the accurate measurement of air flow rate to an engine is essential to control the fuel injection rate especially on transient condition like the rapid throttle opening and closing. To measure the rapid change of flow rates. the air flow meter for the engine requires quick response, flow reversal detection, and linearity . Tjhe proposed integration type air flow meter (IFM), composed of an ultrasonic flow meter with an integration circuit, has significantly improved the measurement accuracy of air mass inducted through the throttle body. The proposed control method estimated the air mass at the cylinder port using the measured air mass at the throttle . For the fuel dynamic model, the two constant fuel model is introduced . The control parameters from air and fuel dynamics are tuned to minimize the excursion of the air fuel ratio. As a result A/F ratio excursion can be reduced within 5% when throttle rapidly opens and closes at the various engine conditions.

• Journal of Sensor Science and Technology
• /
• v.13 no.4
• /
• pp.303-308
• /
• 2004

This paper descibes on the characteristics of Ta-N(tantalum nitride) ceramic thin-film strain gauges which were deposited on Si substrates by DC reactive magnetron sputtering in an argon-nitrogen atmosphere (Ar-$(4{\sim}16%)N_{2}$) for high-temperature applications. These films were annealed in $2{\times}10^{-6}$ Torr vacuum furnace at the range of $500{\sim}1000^{\circ}C$. Optimum deposition atmosphere and annealing temperature were determined at $900^{\circ}C$ for 1 hr. in 8% $N_{2}$ gas flow ratio. Under optimum formation conditions, the Ta-N thin-film for strain gauges was obtained a high-resistivity of $768.93{\mu}{\Omega}{\cdot}cm$, a low temperature coefficient of resistance (TCR) of -84 ppm/$^{\circ}C$ and a good longitudinal gauge factor (GF) of 4.12.

• Journal of Sensor Science and Technology
• /
• v.13 no.4
• /
• pp.298-302
• /
• 2004

Thick films of $LaNiO_{3}$ having perovskite structure impregnated with indium and bismuth oxides have been used as sensing material for acetonitrile ($CH_{3}CN$) gas. The sensor response for $CH_{3}CN$ is quite good with an excellent recovery for partial pressure from 3 ppm to 20 ppm between 200 and $250^{\circ}C$. $LaNiO_{3}$ alone has exhibited low response, but after impregnation of $In_{2}O_{3}$ and $Bi_{2}O_{3}$ have given increased sensitivity even with 3 ppm partial pressure of $CH_{3}CN$ at $200^{\circ}C$. It is assumed that $CH_{3}CN$ is undergoing oxidation reaction on surface of the film.

• Journal of Sensor Science and Technology
• /
• v.21 no.4
• /
• pp.283-286
• /
• 2012

This paper presents the optical hydrogen sensor based on transparent 3C-SiC membrane and photovoltaic effect. Gasochromic materials of Pd and Pd/$WO_3$ were deposited by sputter on 3C-SiC membrane for gas sensing area. Gasochromic materials change to transparency by exposure to hydrogen. The variations of light intensity by hydrogen generate the photovoltaic of P-N junction between N-type 3C-SiC and P-type Si. Single layer of Pd shows higher photovoltaic compared with Pd/$WO_3$. However, phase transition from ${\alpha}$ to ${\beta}$ is shown at 6 %. Pd/$WO_3$ structure show the more linear response to hydrogen range of 2 % ~10 %. Also, almost 2 times fast response and recovery characteristics are shown at Pd/$WO_3$. These fast performances are come from the fact that Pd promoted the chemical reaction between hydrogen and $WO_3$.

• Journal of Sensor Science and Technology
• /
• v.22 no.3
• /
• pp.191-196
• /
• 2013

A particulate matter sensor fabricated by MEMS process is proposed. It is developed to accommodate Euro6 on-board diagnostics regulation for diesel automobile. In the regulation, emission of diesel particulate matter is restricted to 9 mg/km. Particulate matter sensor is designed to use induced charges by charged particulate matter. To increase sensitivity of the sensor, groove is formed on sensor surface because wider surface area generates more induced charges. Sensitivity of the sensor is measured 10.6 mV/(mg/km) and the sensor shows good linearity up to 15.7 mg/km. Also its minimum detectable range is about 0.25 mg/km. It is suitable to detect failure of a diesel particulate filter which should filter particulate matter more than 9 mg/km. For removing accumulated particulate matter on the sensor which can disturb normal operation, platinum heater is designed on the backside of the sensor. The developed sensor can sense very low amount of particulate matter from exhaust gas in real-time with good linearity.

• Journal of Sensor Science and Technology
• /
• v.22 no.3
• /
• pp.181-184
• /
• 2013

Highly ordered porous materials having mesopores in the walls of macropores showed improved adsorption dynamics results for VOC molecules, especially bulky molecules. These meso/macroporous mataerials were synthesized by the dual templating method, and mesopore and macropore size were controlled by adjusting the templates for each pore size regime. In the case of adsorption and desorption of small VOC molecules (toluene), although meso/macroporous MCM-41 with smaller mesopore size showed improved results, meso/macroporous SBA-15 with larger mesopore size was not improved regardless of the existence of macropores, since there was no limitation of movement through the larger mesopore. However, the adsorption dynamics of bulky VOC molecules (p-xylene) over meso/macroporous SBA-15 were drastically improved by increasing the macropore size.

• KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
• /
• v.12 no.1
• /
• pp.27-34
• /
• 2006

Nanotechnology is playing an increasingly important role in the development on most areas of science and technology. Because of its potential of providing novel performance at the nanoscale, the nanotechnology can influence a wide range of applications such as information, energy, environment and biology, all essential for socioeconomic development in the near future. In the packaging industry, the main applications of nanotechnology are (1) to enhance durability, (2) improve gas and oxygen barriers of raw materials for films and packaging, (3) create new functional sensors, and (4) lengthen shelf life for the packaged food quality and will also help in pharmaceuticals and cosmetics. Nanotechnology is growing in an international interactions which accelerate in science, education, and industrial R&D. Government, industries and the business sector in Korea have shown a strong ambition towards the development of nanotechnology for the future. Meanwhile, a strategic investment in packaging area is much smaller compared to supporting research and development (R&D) of various major research areas. This article were reviewed the status and trends of current packaging research and development activities using nanotechnology in Korea, USA, Japan, and other international nations.