• Journal of Sensor Science and Technology
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• v.6 no.6
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• pp.445-450
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• 1997

An ammonia gas sensor with high sensitivity using thick-film technology were fabricated and examined. The material for sensing the ammonia gas was the mixture of oxide semiconductor, $FeO_{x}-WO_{3}-SnO_{2}$. The sensor exhibits resistance increase upon exposure to low concentration of ammonia gas. The resistance of the sensor is decreased, on the other hand, for exposure to reducing gases such as ethyl alcohol, methane, propane and carbon monoxide. A novel method for detecting ammonia gas quite selectively utilizing a sensor array consisting of an ammonia gas sensor and a compensation element were proposed and developed. The compensation element is a Pt-doped $WO_{3}-SnO_{2}$ gas sensor which shows opposite direction of resistance change in comparison with that of the ammonia gas sensor upon exposure to ammonia gas. Excellent selectivity has been achieved using the sensor array having two sensing elements.

• Journal of Sensor Science and Technology
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• v.10 no.2
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• pp.108-117
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• 2001

A sensor array with 10 discrete sensors integrated on a substrate w3s developed for discriminating the kinds and quantities of inflammable gases, like butane, propane, methane, LPG, carbon monoxide. The sensor array consisted of 10 metal oxide semiconductor gas sensors using the nano-sized $SnO_2$ as base material and had differentiated sensitivity patterns to specific gas. The sensor array was designed with uniform thermal distribution and had also high sensitivity and good reproductivity to low gas concentration through nano-sized sensing materials with different additives. By using the sensing patterns of the sensor array at $400^{\circ}C$, we could reliably discriminate the kinds and quantities of the tested inflammable gases under the lower explosion limit through the principal component analysis(PCA).

• Journal of Sensor Science and Technology
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• v.24 no.4
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• pp.258-263
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• 2015

In order to prevent drink-driving by detecting concentration of alcohol from driver's exhale breath, twenty chemical sensors fabricated. The one of purposes for sensor array which consists of those sensors is to discriminate between target gas(alcohol) and interference gases($CH_3CH_2OH$, CO, NOx, Toluene, and Xylene). Wilks's lambda was presented to achieve above purpose and optimal sensors were selected using the method. In this paper, step-wise sensor elimination based on Euclidean distance was investigated for selecting optimal sensors and compared with a result of Wilks's lambda method. The selectivity and sensitivity of sensor array were used for comparing performance of sensor array as a result of two methods. The data acquired from selected sensor were analyzed by pattern analysis methods, principal component analysis and Sammon's mapping to analyze cluster tendency in the low space (2D). The sensor array by stepwise sensor elimination method had a better sensitivity and selectivity compared to a result of Wilks's lambda method.

• Journal of the Korea Institute of Military Science and Technology
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• v.7 no.2 s.17
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• pp.81-87
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• 2004

Semiconductor thick film gas sensors based on tin oxide are fabricated and their gas response characteristics are examined for four simulant gases of chemical warfare agent (CWA)s. The sensing materials are prepared in three different sets. 1) The Pt or Pd $(1,\;2,\;3\;wt.\%)$ as catalyst is impregnated in the base material of $SnO_2$ by impregnation method.2) $Al_2O_3\;(0,\;4,\;12,\;20\;wt.\%),\;In_2O_3\;(1,\;2,\;3\;wt.\%),\;WO_3\;(1,\;2,\;3\;wt.\%),\;TiO_2\;(3,\;5,\;10\;wt.\%)$ or $SiO_2\;(3,\;5,\;10\;wt.\%)$ is added to $SnO_2$ by physical ball milling process. 3) ZnO $(1,\;2,\;3,\;4,\;5\;wt.\%)$ or $ZrO_2\;(1,\;3,\;5\;wt.\%)$ is added to $SnO_2$ by co-precipitation method. Surface morphology, particle size, and specific surface area of fabricated sensing films are performed by the SEM, XRD and BET respectively. Response characteristics are examined for simulant gases with temperature in the range 200 to $400^{\circ}C$, with different gas concentrations. These sensors have high sensitivities more than $50\%$ at 500ppb concentration for test gases and also have shown good repetition tests. Four sensing materials are selected with good sensitivity and stability and are fabricated as a sensor array A sensor array Identities among the four simulant gases through the principal component analysis (PCA). High sensitivity is acquired by using the semiconductor thick film gas sensors and four CWA gases are classified by using a sensor array through PCA.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.251-252
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• 2006

A development of surface acoustic wave gas sensor to detecting volatile gas has been observed by monitoring output signal as function of time onto the network analyzer. The SAW sensor with a center frequency of 200MHz was fabricated on $42^{\circ}$ S-T Quartz substrates. Using the gas chromatography column has been selectivity. Experimental results, which show the phase change of output signal under the absorption of volatile gas onto sensors, were presented. The proposed sensor has the properties of high sensitivity compare to the conventional SAW gas sensor and chemical selectivity. Thus, it is thought these results are applicable for use in sensor array of an high performance electronic nose system.

• Proceedings of the IEEK Conference
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• 2003.07b
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• pp.727-730
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• 2003

Thin tin oxide film with nano-size particle was prepared on silicon substrate by hydrothermal synthetic method and successive sol-gel spin coating method. The fabrication method of tin oxide film with ultrafine nano-size crystalline structure was tried to be applied to fabrication of micro gas sensor array on silicon substrate. The tin oxide film on silicon substrate was well patterned by chemical etching upto 5${\mu}{\textrm}{m}$width and showed very uniform flatness. The tin oxide film preparation method and patterning method were successfully applied to newly proposed 2-dimensional micro sensor fabrication.

• Journal of Sensor Science and Technology
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• v.32 no.2
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• pp.95-99
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• 2023

Forest healing is an activity that enhances immunity and human health using various elements of nature, such as fragrance and scenery. Particularly, phytoncide composed of terpene, a natural volatile substance emitted by forest plants, activates the immune function and is an important raw material in health-related products, such as antibacterial and insect repellents. Moreover, phytoncide is used as a measure to evaluate the impact of the forest atmosphere on the human body. This study aims to implement a highly sensitive gas sensor system that can measure phytoncide in real-time, which is an essential element for realizing a forest healing environment. A gas generation apparatus was implemented by using an adsorption tube in consideration of filed applicability in a laboratory atmosphere to enable the measurement of α-pinene and limonene, which are among the main components of phytoncide. Throughout the experimental trials, the sensitivity of gas sensor arrays to α-pinene and limonene was confirmed. In addition, the classification results demonstrated the AVOCs and NVOCs can be well discriminated using PCA. The primary results confirmed the possibility of developing a high-sensitivity gas sensor system for phytoncide sensing in real time.

• Korean Journal of Materials Research
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• v.33 no.5
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• pp.195-204
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• 2023

Micro-electronic gas sensor devices were developed for the detection of carbon monoxide (CO), nitrogen oxides (NO_x), ammonia (NH₃), and formaldehyde (HCHO), as well as binary mixed-gas systems. Four gas sensing materials for different target gases, Pd-SnO₂ for CO, In₂O₃ for NO_x, Ru-WO₃ for NH₃, and SnO₂-ZnO for HCHO, were synthesized using a sol-gel method, and sensor devices were then fabricated using a micro sensor platform. The gas sensing behavior and sensor response to the gas mixture were examined for six mixed gas systems using the experimental data in MEMS gas sensor arrays in sole gases and their mixtures. The gas sensing behavior with the mixed gas system suggests that specific adsorption and selective activation of the adsorption sites might occur in gas mixtures, and allow selectivity for the adsorption of a particular gas. The careful pattern recognition of sensing data obtained by the sensor array made it possible to distinguish a gas species from a gas mixture and to measure its concentration.

• Journal of Sensor Science and Technology
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• v.23 no.1
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• pp.15-18
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• 2014

We present gas sensing performance based on $2{\times}2$ sensor array with four different elements ($TiO_2$, $SnO_2$, $WO_3$ and $In_2O_3$ thin films) fabricated by rf sputter. Each thin film was deposited onto the selected $SiO_2$/Si substrate with Pt interdigitated electrodes (IDEs) of $5{\mu}m$ spacing which were fabricated on a $SiO_2$/Si substrate using photolithography and dry etching. For 5 ppm $NO_2$ and 50 ppm CO, each thin film sensor has a different response to offers the distinguishable response pattern for different gas molecules. Compared with the conventional micro-fabrication technology, $2{\times}2$ sensor array with such remarkable response pattern will be open a new foundation for monolithic integration of high-performance chemoresistive sensors with simplicity in fabrication, low cost, high reliablity, and multifunctional smart sensors for environmental monitoring.

• ETRI Journal
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• v.27 no.5
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• pp.585-594
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• 2005

A small electronic nose (E-Nose) system has been developed using an 8-channel vapor detection array and personal digital assistant (PDA). The sensor array chip, integrated on a single microheater-embedded polyimide substrate, was made of carbon black-polymer composites with different kinds of polymers and plasticizers. We have successfully classified various volatile organic compounds such as methanol, ethanol, i-propanol, benzene, toluene, n-hexane, n-heptane, and c-hexane with the aid of the sensor array chip, and have evaluated the resolution factors among them, quantitatively. To achieve a PDA-based E-Nose system, we have also elaborated small sensor-interrogating circuits, simple vapor delivery components, and data acquisition and processing programs. As preliminary results show, the miniaturized E-Nose system has demonstrated the identification of essential oils extracted from mint, lavender, and eucalyptus plants.