• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.221-221
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• 2013

Vertical LED (VLED) has been recognized as a way to obtain the high-power LED due to their advantages [1]. However, approximately 4% of the light generated from the active region is extracted, if the light extraction from side walls and back side is neglected because of Fresnel reflection (FR) and total internal reflection (TIR) [2,3]. In this study, the optical simulation of the VLED with the various microstructures was performed. Among them, the microlens having the diameter of 3 ${\mu}m$ and the height of 1.5 ${\mu}m$ shown the best result was chosen, and then, optimized microlens was formed on a GaN template using conventional semiconductor process. Various microstructures were proposed to improve the light extraction efficiency (LEE) of the VLED for the simulation. The LEE was simulated using LightTools based on a Monte Carlo ray tracing. The microstructures with hemisphere, cone, truncated and cylinder pattern having diameter of 3 ${\mu}m$ were employed on the top layer of the VLED respectively. The improvement of the LEE by using the microstructure is 87% for the hemisphere, 77% for the cone, 53% for the truncated, 21% for the cylinder, compared with the LEE of the flat surface at the reflectance of 85%. The LEE was increased by 88% at the height of 1.5 ${\mu}m$, compared with the LEE of the flat surface. We found that the microlens on the top layer is the most suitable for increasing the LEE. In order to apply the proposed microlens on n-GaN surface, we fabricated microlens on a GaN template. A photoresist array having hexagonal-closed packed microlens was fabricated on the GaN template. Then, optimization of etching the GaN template was performed using a dry etching process with ICP-RIE. The dry etching carried out using a gas mixture of Cl2 and Ar, each having a flow rate of 16 sccm and 10 sccm, respectively with RF power of 50 W, ICP power of 900 W and chamber pressure of 2 mTorr was the optimum etching condition as shown in Fig. 2(a).

• Korean Journal of Materials Research
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• v.9 no.3
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• pp.244-250
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• 1999

MOCVD TiN films were prepared from a new TiN precursor, tetrakis(etylmethylamino)titanium (TEMAT) and ammonia. Deposition of TiN films from a single precursor, TEMA T yielded the growth rates of $70 to 1050\AA$/min, depending on the deposition temperature. Furthermore, the excellent bottom coverage of -90% over $0.35\mu\textrm{m}$ contacts was obtained at $275^{\circ}C$. The addition of ammonia to TEMA T lowered the resistivity of as- deposited TiN film to ~ $800\mu\omega-cm$ from $3500~6000\mu\omega-cm$ and improved the stability of TiN film in air. Examination of the films by Auger electron spectroscopy(AES) showed that the oxygen and carbon contents decreased with the addition of ammonia. However, increasing ammonia flow rate decreased the bottom coverage of TiN films over $0.5\mu\textrm{m}$ contacts, probably due to the high sticking coefficient of intermediate species produced from the gas phase reaction of TEMA T and ammonia. Based on the byproduct gases detected by the quadrupole mass spectrometer (QMS), the transammination reaction was proposed to be responsible for TiN deposition. In addition, XPS analysis revealed that the carbon in the films made from TEMA T and ammonia was metallic carbon, suggesting that $\beta$-hydrogen activation process occurs competitively with the transammination reaction.

• Journal of Energy Engineering
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• v.15 no.4 s.48
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• pp.277-283
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• 2006

In this study, butane 100% was used as fuel to verify the real fuel effect such as vapor pressure variation due to temperature change. A MPI fuel injection system for V-6 engine, which has reverse 'L' type cross section to minimize the possibility of liquid phase injection, was composed and one bank was operated under sequential injection scheme. Flow rate were measured according to injection duration, interval, and pressure. Also occurring of liquid phase injection was monitored with varying vaporizer and fuel rail temperature. The result shows that basic characteristics of injection is a relatively difference between air and LPG injection. Under cold start condition, however, the occurrence of liquid injection becomes more severe as the pressure increases, and sufficiently high temperature both in vaporizer and fuel rail is very important to insure gaseous injection. In addition, the temperature of vaporizer plays more important role in keeping LPG vapor state and the reverse 'L' type cross section of the rail is available to prevent liquid injection.

• Clean Technology
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• v.24 no.4
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• pp.323-331
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• 2018

The results of an experimental investigation on the co-firing characteristics and slagging behavior of dried and hydrothermal carbonization sewage sludge, sub-bituminous coal, and wood pellet in a fluidized bed were presented. Combustion tests were conducted in a lab-scale bubbling fluidized bed system at the uniform fuel-air equivalence ratio, air flow rate, and initial bed temperature to measure bed temperature distribution and combustion gas composition. 4 different fuel blending cases were prepared by mixing sewage sludge fuels with coal and wood pellet with the ratio of 50 : 50 by the heating value. $NO_x$ was mostly NO than $NO_2$ and measured in the range of 400 to 600 ppm in all cases. $SO_2$ was considered to be affected mostly by the sulfur content of the sewage sludge fuels. The cases of hydrothermal carbonization sewage sludge mixture showed slightly less $SO_2$ emission but higher fuel-N conversion than the dried sewage sludge mixing cases. The result of fly ash composition analysis implied that the sewage sludge fuels would increase the possibility of slagging/fouling considering the contents of alkali species, such as Na, K, P. Between the two different sewage sludge fuels, dried sewage sludge fuel was expected to have the more severe impact on slagging/fouling behavior than hydrothermal carbonization sewage sludge fuel.

• Journal of Korean Society of Forest Science
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• v.111 no.4
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• pp.490-501
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• 2022

In this study, the isoprene and terpene emissions from 32 major urban tree species were investigated. We conducted sampling using a dynamic enclosure system between June and July 2021. Seedlings aged < three years were enclosed in a chamber consisting of a 400 L transparent Tedlar bag. The air flow from the outlet of the chamber was sampled using Tenax-filled sorbent tubes under standard conditions (temperature: 30°C; PAR: 1,000 μmol/m²/sec). A thermal desorption gas chromatography/mass spectrometry system was used to analyze the following 38 biogenic volatile organic compounds: isoprene, monoterpenes, sesquiterpenes, oxygenated monoterpenes, and oxygenated sesquiterpenes. Isoprene emitters included Quercus mongolica, Salix koreensis, Robinia pseudoacacia, and Salix chaenomeloides. Monoterpene emitters included Pinus strobus, Cedrela sinensis, and Cercis chinensis. The monoterpene emission profiles were dominated by á-pinene, myrcene, camphene, and limonene. The predominant oxygenated monoterpene and oxygenated sesquiterpene were eucalyptol and caryophyllene oxide, respectively. For all species, the contributions of sesquiterpenes and oxygenated sesquiterpenes were relatively low.

• Korean Chemical Engineering Research
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• v.61 no.2
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• pp.240-246
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• 2023

This study was performed to convert NO_x in atmosphere by photochemical reaction utilizing the eco-friendly solar energy. The mortar specimen coated with photocatalyst was fabricated and the photochemical conversion efficiency of NO_x was analyzed. The photocatalyst coated concrete was fabricated by first adding TiO₂ photocatalyst on the bottom of mold first and next adding cement mortar and, then, curing the concrete mortar. The grease was sprayed on the bottom of mold in advance so that the concrete can be demolded easily after curing. The conversion efficiencies of NO_x by photochemical reactions were investigated systematically by changing the process variable conditions of amount of TiO₂ coating, UV-A light intensity, total gas flow rate, relative humidity and initial NO_x concentration. It was confirmed that the photocatalyst coated concrete fabricated in this study could convert NO_x successfully for various process conditions in atmosphere. In future, we believe this research result can be utilized as basic data to design the infrastructure of building, tunnel and road for controlling efficiently the air pollutants such as NO_x, SO_x, and VOCs.

• Analytical Science and Technology
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• v.19 no.1
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• pp.1-8
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• 2006

The isotope dilution method was used for the determination of Br impurity in $1000{\mu}g/g$ Cl standard solution. Since relatively pure KCl salt was used for the preparation of the Cl standard solution, the Br impurity determination suffers from both spectral and non-spectral interferences due to the presence of a large amount of K and Cl matrices. AG2-X8 anion-exchange resin was employed to separate the Br analyte from the matrices, and RF power was raised to 1500 W and nebulizer gas flow rate was lowered to 0.77 L/min to reduce background from the $ArArH^+$ molecular ions. The Br impurity in the $1000{\mu}g/g$ Cl standard solution was determined to be 43.7 ng/g with the standard addition method. The analytical result was in good agreement with 41.2 ng/g (RSD 1.6%) determined by the isotope dilution method to lower uncertainty from poor reproducibility of the anion-exchange process.

• Analytical Science and Technology
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• v.22 no.6
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• pp.514-518
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• 2009

Coenzyme $Q_{10}$($CoQ_{10}$), a vitamin E-like substance, represents a components of the complex antioxidant system of the human organism. $CoQ_{10}$ levels in human plasma were determined by high performance liquid chromatography (HPLC) with UV detection. It was dissociated from lipoproteins by methanol and extracted into n-hexane with liquid-liquid extraction procedure, after centrifugation, the supernatant was dried under nitrogen gas stream. The residue was dissolved in the absolute ethanol. Determination of $CoQ_{10}$ was performed on a $C_{18}$ reversed-phase analytical column with ultraviolet detection at 275 nm and the mobile phase containing 15% (v/v) ethanol in methanol at a flow rate of 1.7 mL/min. The low limit of quantitation was 0.02 mg/L (S/N=10), the linearity between the concentration and peak height is from 0.1 to 2.0 mg/L. Twenty-four randomly selected plasma samples from apparently healthy, 27 to 44 year old individuals (males and females) were analyzed for total $CoQ_{10}$. The average level in these subjects was $0.62{\pm}0.13mg/L$ with the range of 0.41-0.98 mg/L. This method has a specific and a sufficient limit of quantitation (LOQ) for analysis of $CoQ_{10}$ in human plasma in both a clinical study and research at laboratories.

• Korean Chemical Engineering Research
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• v.51 no.2
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• pp.267-271
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• 2013

Test bed studies with highly efficient amine $CO_2$ solvent (KoSol-4) developed by KEPCO research institute were performed. For the first time in Korea, evaluation of post-combustion $CO_2$ capture technology to capture 2 ton $CO_2$/day from a slipstream of the flue gas from a coal-fired power station was performed. Also the analysis of solvent regeneration energy was conducted to suggest the reliable performance data of the KoSol-4 solvent. For this purpose, we have tested 5 campaigns changing the operating conditions of the solvent flow rate and the stripper pressure. The overall results of these campaigns showed that the $CO_2$ removal rate met the technical guideline ($CO_2$ removal rate: 90%) suggested by IEA-GHG and that the regeneration energy of the KoSol-4 showed about 3.0~3.2 GJ/$tCO_2$ which was, compared to that of the commercial solvent MEA (Monoethanolamine), about 25% reduction of regeneration energy. Based on these results, we could confirm the good performance of the KoSol-4 solvent and the $CO_2$ capture process developed by KEPCO research institute. And also it was expected that the cost of $CO_2$ avoided could be reduced drastically if the KoSol-4 is applied to the commercial scale $CO_2$ capture plant.

• Journal of the Korean Vacuum Society
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• v.18 no.2
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• pp.85-91
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• 2009

There has been a rapid progress for flexible polymer-based MEMS(Microelectromechanical Systems) technology. Polycarbonate (PC) and Poly Methyl Methacrylate (PMMA), so-called acrylic, have many advantages for optical, non-toxic and micro-device application. We studied dry etching of PC and PMMA as a function of % gas ratio in the $O_2/SF_6/CH_4$ temary plasma. A photoresist pattern was defined on the polymer samples with a mask using a conventional lithography. Plasma etching was done at 100 W RIE chuck power and 10 sccm total gas flow rate. The etch rates of PMMA were typically 2 times higher than those of PC in the whole experimental range. The result would be related to higher melting point of PC compared to that of PMMA. The highest etch rates of PMMA and PC were found in the $O_2/SF_6$ discharges among $O_2/SF_6$, $O_2/CH_4$ and $SF_6/CH_4$ and $O_2/SF_6/CH_4$ plasma composition (PC: ${\sim}350\;nm/min$ at 5 sccm $O_2/5$ sccm $SF_6$, PMMA: ${\sim}570\;nm/min$ at 2.5 sccm $O_2/7.5$ sccm $SF_6$). PC has smoother surface morphology than PMMA after etching in the $O_2/SF_6/CH_4$ discharges. The surface roughness of PC was in the range of 1.9$\sim$3.88 nm. However, that of PMMA was 17.3$\sim$26.1 nm.