• 전기의세계
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• 제30권5호
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• pp.306-312
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• 1981

The Townsend discharge domain is generally observed with stable positive characteristics in N$_{2}$ gas discharge at low pressures differently in the others, which transfer immediately to glow dischage after self-sustaining discharge starts. In this paper, the presence of the stable Townsend discharge, applied voltage-discharge current characteristics and the effect of disgased electrode surface on stable townsend discharge are studied experimentaly in N$_{2}$ gas mixed with 0.05% of No in volume. As the result of this experiment, the stable Townssend discharge is observed only in pure nitrogen with the valve of pd.geq.8[torr.cm] (p=gas pressure, d=gap spacing), but not in gas mixtures. This is considered that No gas in gas mixtures disexcites effectively the metestble state of nitrogen.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.904-907
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• 2002

In this study, the plasma-assisted $CO_2$ conversion characteristics were investigated in the streamer corona discharge and silent discharge reactors with dielectric of $Al_2O_3$, to improve the conversion efficiency $CO_2$. Some discharge characteristics of $CO_2$ as parameters of gap spacing and applied voltage frequency, in both corona and silent discharge reactor were also obtained. The maximum $CO_2$ conversion rate was 10.1 [%] under the 5.2 [W] of discharge power and 250 [Hz] of applied voltage frequency.

• 한국전기전자재료학회논문지
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• 제15권11호
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• pp.985-990
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• 2002

The electrical breakdown characteristics of liquid nitrogen(LN$\sub$2/) were studied under simulated quenching conditions for application of HTS apparatus. The experimental results for various quenching condition revealed that the breakdown voltage of LN$\sub$2/ with bubble flow velocity and gap spacing. In the case, breakdown voltage decreases gradually with the bubble velocity. When it is bubble velocity from 0 to 1 $\ell$ /min, breakdown voltage rapidly decreases but decreases from 2 $\ell$/min to 10 $\ell$/min slowly. The breakdown voltage for vertical electrode arrangement is higher than that for horizontal electrode arrangement. Also, it did a electric field and potential distribution interpreting at the liquid nitrogen when the bubble existed. The plots of equipotential lines for three cases are also shown.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.227-227
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• 1999

Plasma display panel(PDP) is a leading technology for large-area flat panel displays. A current issue in operating the PDP cell is that the efficiency of the PDP cell is very low. To increase the efficiency of the PDP cell, the visible light needs to be maximized and the power consumption minimized. Since the excited xenons are related to the production of the visible light, it is important to optimize the cell geometry and the gas composition that produce the excited xenons more efficiently. A 2D-fluid code (FL2P) is developed and used to simulate the plasma dynamics and the radiation transport in the PDP cell. The cell is optimized with the code for various operating conditions and cell dimensions such as the voltage pulse, electrode length, electrode spacing, gap size, dielectric constant, gas mixture ratio, pressure, and pulse duration.

• 대한전자공학회논문지
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• 제27권4호
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• pp.527-533
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• 1990

Zone-melting recrystallization (ZMR) system using two graphite heaters(a stationary sheet and a narrow movable bar) was constructed and implemented in recrystallization op Si films on insulating layers. The recystallized Si films were examined by Nomarski contrast optical microscopy after Dash etching, transmission electron diffraction pattern, and x-ray diffraction. With optimum conditions of process parameters(input powers of the bottom and upper heater, scanning speed of the upper heater, and the gap between sample and upper heater), the recrystallized Si layer has a (100) texture, but contains many subboundaries. The subgrains are misoriented by < 0.5\ulcorner and the average spacing between subboundaries is about 25\ulcorner.

• Transactions on Electrical and Electronic Materials
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• 제3권3호
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• pp.14-17
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• 2002

The HDP (High Density Plasma) CVD process consists of a simultaneous sputter etch and chemical vapor deposition. As CMOS process continues to scale down to sub- quarter micron technology, HDP process has been widely used fur the gap-fill of small geometry metal spacing in inter-metal dielectric process. However, HBP CVD system has some potential problems including plasma-induced damage. Plasma-induced gate oxide damage has been an increasingly important issue for integrated circuit process technology. In this paper, thin gate oxide charge damage caused by HDP deposition of inter-metal dielectric was studied. Multiple step HDP deposition process was demonstrated in this work to prevent plasma-induced damage by introducing an in-situ top SiH$_4$ unbiased liner deposition before conventional deposition.

• 센서학회지
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• 제31권2호
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• pp.107-114
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• 2022

The effects of ring radius and coupling spacing on the free spectral range (FSR), full width at half maximum (FWHM), quality factor, and sensitivity of single-channel and add-drop channel slot ring resonators were systematically investigated using FIMMPROP and PICWAVE numerical software. The single-channel ring resonator exhibited better characteristics, namely, a wider FSR and narrower FWHM compared with the add-drop structure; thus, it was evaluated to be more suitable for biochemical sensors. The FSR, FWHM, quality factor, and sensitivity for a single channel ring resonator with a radius of 59.4 ㎛ and coupling gap of 0.5 ㎛ were 2.4 nm, 0.087 nm, 17677, and 550 [nm/RIU], respectively.

• 대한기계학회논문집B
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• 제22권6호
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• pp.860-873
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• 1998

In a low speed open-type wind tunnel, a group of parallel wakes downstream of two dimensional grid model consisting of several circular cylinders were experimentally investigated to study the response of the wake flows to the acoustic excitation, in hoping to promote the understanding of the underlying mechanism behind the gross flow change due to artificial excitation. In the unexcited wake flows, the development of the individual wakes behind cylinders was almost uniform for the ratio of the spacing to the cylinder diameter of s/d.geq.1.5. For smaller s/d, however, the jet streams issued through the gaps between the cylinders became biased in one side and the cylinders had wakes of different sizes. At s/d=1.25, the gap flow directions change in time, leading to unstable wake patterns. Further reduction in s/d made this unstable flip-flopping of the jets stable. The most effective excitation frequency was found to be in the Strouhal number range of St=0.5-0.6. This frequency was related to the vortex shedding. At s/d=1.75, the excitation frequency was 2 or 4 times the vortex shedding frequency. When the flow was excited at this frequency, the vortex sheddings were energized, and pairings between neighboring vortices were generated. Also, the merging process between individual wakes was accelerated. The unstable and unbalanced wake patterns at s/d=2.15 were made stable and balanced. The unstable and unbalanced wake patterns at s/d=2.15 were made stable and balanced. For smaller spacing of s/d .leq,1.0, the acoustic excitation became less effective in controlling the flow.

• Current Photovoltaic Research
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• 제8권1호
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• pp.27-32
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• 2020

CuS thin films were deposited on glass substrates at room temperature by RF magnetron sputtering. The structural and optical properties of CuS thin films grown by varying RF-power from 40 W to 100 W were studied. From the XRD analysis, we confirmed hexagonal crystal structures grown in the preferred orientation of the (110) plane in all CuS thin films, and the intensity of the main diffraction peak increased in proportion to the increase of RF-power. In the case of CuS thin film deposited at 40W, small-sized particles formed a thin and dense surface morphology with narrow pore spacing, relatively. As the power increased, the grain size and grain boundary spacing increased sequentially. The peaks for the binding energy of Cu 2p_3/2 and Cu 2p_1/2 were determined at 932.1 eV and 952.0 eV, respectively. The difference in binding energy for the Cu²⁺ states was the same at 19.9 eV regardless of process parameters. The transmittance and band gap energy in the visible region tended to decrease with increasing sputtering powers.

• 공업화학
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• 제30권2호
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• pp.254-259
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• 2019

본 연구에서는 마그네슘-층상규산염(MgP) 층간에 솔잎 추출물(PLE)이 삽입되어 겹겹이 쌓여있는 샌드위치 구조의 나노입자(PLE/MgP)를 one-pot으로 합성하였다. XRD 분석을 통해 팔면체와 사면체 구조로 MgP가 성공적으로 합성되었으며, PLE가 층간에 삽입되어 MgP 간의 층간거리(d-spacing)가 벌어진 것을 확인하였다. HR-TEM을 통해 모폴로지 변화를 관찰하였으며, 열중량분석법을 통해 PLE가 MgP 대비 10%까지 함유된 것을 확인하였다. 최소저해농도(MIC) 및 최소 사멸농도(MBC) 분석을 통해 피부 상재균에 대한 항균 활성을 검토한 결과 MgP 또는 PLE보다 PLE/MgP의 항균 활성이 더욱 향상된 것을 확인하였다. 이러한 결과는 본 연구에서 개발한 PLE/MgP 유/무기 복합 소재가 화장품 소재, 의료용 소재 등의 다양한 분야에 적용 가능함을 확인하였다.