• Korean Journal of Optics and Photonics
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• v.31 no.3
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• pp.134-141
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• 2020

Optical three-dimensional (3D) measurement systems based on digital fringe projection are used in many contactless measurement applications. The system which can measure a dozen micrometers uses a liquid-crystal display (LCD) as the projection unit for generating a digital fringe pattern, because a flexible fringe pattern can be easily made by computer software. According to the gamma nonlinearity of the LCD projection unit, the digital fringe projection error on the object affects the accuracy of 3D object measurement. An improved method of LCD gamma-nonlinearity error reduction is proposed, by using the inverse function of the intensity transfer function to improve the accuracy. The improvement due to the proposed method is shown by measuring the difference in precision between a computer-generated sine wave and a camera-obtained sine wave for a standard semiconductor specimen.