• Title/Summary/Keyword: GSMAC-FEM

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GSMAC-FEM Analysis of Single-Crystal Growth by CUSP MCZ Method

  • Jung, Chung-Hyo;Takahiko Tanahashi;Yuji Ogawa
    • Journal of Mechanical Science and Technology
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    • v.15 no.12
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    • pp.1876-1881
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    • 2001
  • We present the numerical analysis of the growth of a silicon (Si) single crystal. In the MCZ (Magnetic-field-applied Czochralski) method, two magnetic fields that stand opposite to each other generate a cusp magnetic field. In this work, the three cusp magnetic fields used for the analysis are an extern magnetic field, a surface magnetic field and an internal magnetic field. Each case was evaluated mainly as to the degree of stirring, shaft symmetry and the stability of the flow. As a result, the cusp magnetic field that yielded to best conditions was the internal magneic field.

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