Park, Eunjeong;Lee, Hyunseop;Jeong, Hobin;Jeong, Haedo
Tribology and Lubricants
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v.31
no.3
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pp.79-85
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2015
RC delay is a critical issue for achieving high performance of ULSI devices. In order to minimize the RC delay time, we uses the CMP process to introduce high-conductivity Cu and low-k materials on the damascene. The low-k materials are generally soft and fragile, resulting in structure collapse during the conventional high-pressure CMP process. One troubleshooting method is electrochemical mechanical polishing (ECMP) which has the advantages of high removal rate, and low polishing pressure, resulting in a well-polished surface because of high removal rate, low polishing pressure, and well-polished surface, due to the electrochemical acceleration of the copper dissolution. This study analyzes an electrochemical state (active, passive, transpassive state) on a potentiodynamic curve using a three-electrode cell consisting of a working electrode (WE), counter electrode (CE), and reference electrode (RE) in a potentiostat to verify an electrochemical removal mechanism. This study also tries to find optimum conditions for ECMP through experimentation. Furthermore, during the low-pressure ECMP process, we investigate the effect of current density on surface roughness and removal rate through anodic oxidation, dissolution, and reaction with a chelating agent. In addition, according to the Faraday’s law, as the current density increases, the amount of oxidized and dissolved copper increases. Finally, we confirm that the surface roughness improves with polishing time, and the current decreases in this process.
Kim, Chan-Soo;Chu, Xiang-Qiang;Lagi, Marco;Chen, Sow-Hsin;Lee, Kwang-Ryeol
Proceedings of the Korean Vacuum Society Conference
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2011.02a
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pp.21-21
/
2011
A series of Quasi-Elastic Neutron Scattering (QENS) experiments helps us to understand the single-particle (hydrogen atom) dynamics of a globular protein and its hydration water and strong coupling between them. We also performed Molecular Dynamics (MD) simulations on a realistic model of the hydrated hen-egg Lysozyme powder having two proteins in the periodic box. We found the existence of a Fragile-to-Strong dynamic Crossover (FSC) phenomenon in hydration water around a protein occurring at TL=$225{\pm}5K$ by analyzing Intermediate Scattering Function (ISF). On lowering of the temperature toward FSC, the structure of hydration water makes a transition from predominantly the High Density Liquid (HDL) form, a more fluid state, to predominantly the Low Density Liquid (LDL) form, a less fluid state, derived from the existence of a liquid?liquid critical point at an elevated pressure. We showed experimentally and confirmed theoretically that this sudden switch in the mobility of the hydration water around a protein triggers the dynamic transition (so-called glass transition) of the protein, at a temperature TD=220 K. Mean Square Displacement (MSD) is the important factor to show that the FSC is the key to the strong coupling between a protein and its hydration water by suggesting TL${\fallingdotseq}$TD. MD simulations with TIP4P force field for water were performed to understand hydration level dependency of the FSC temperature. We added water molecules to increase hydration level of the protein hydration water, from 0.30, 0.45, 0.60 and 1.00 (1.00 is the bulk water). These confirm the existence of the FSC and the hydration level dependence of the FSC temperature: FSC temperature is decreased upon increasing hydration level. We compared the hydration water around Lysozyme, B-DNA and RNA. Similarity among those suggests that the FSC and this coupling be universal for globular proteins, biopolymers.
With using a subsample of 1,373 poor single mothers and their children from the Fragile Families and Child Wellbeing study, the present study examined the associations among mothers' economic hardship, depressive symptoms, and parenting stress, child abuse and neglect, and their children's behavior problems, delinquency, and social skill. These families were tracked through follow-up interviews at the time of birth, and when the children were three, five, and nine years old. The results indicated that mothers' economic hardship, depressive symptoms, and parenting stress were significant predictors to determine their children's abuse and neglect. Findings also suggest that higher levels of child abuse and neglect are positively associated with more behavior problems and delinquency, and negatively associated with social skills. Further discussions include policy and services to prevent child abuse and neglect and to alleviate mothers' financial difficulties, depression, and parenting stress.
Proceedings of the Korea Water Resources Association Conference
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2016.05a
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pp.1-1
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2016
Many of the world's large ecosystems are severely stressed due to population growth, water quality and quantity problems, vulnerability to flood and drought, and the loss of native species and cultural resources. Consequences of climate change further increase uncertainties about the future. These major societal challenges must be addressed through innovations in governance, policy, and ways of implementing management strategies. Science and engineering play a critical role in helping define possible alternative futures that could be achieved and the possible consequences to economic development, quality of life, and sustainability of ecosystem services. Science has advanced rapidly during the past decade with the emergence of science communities coalescing around 'Grand Challenges' and the maturation of how these communities function has resulted in large interdisciplinary research networks. An example is the River Experiment Center of KICT that engages researchers from throughout Korea and the world. This trend has been complemented by major advances in sensor technologies and data synthesis to accelerate knowledge discovery. These factors combine to allow scientific debate to occur in a more open and transparent manner. The availability of information and improved communication of scientific and engineering issues is raising the level of dialogue at the science-policy interface. However, severe challenges persist since scientific discovery does not occur on the same timeframe as management actions, policy decisions or at the pace sometimes expected by elected officials. Common challenges include the need to make decisions in the face of considerable uncertainty, ensuring research results are actionable and preventing science being used by special interests to delay or obsfucate decisions. These challenges are explored in the context of examples from the United States, including the California Bay-Delta system. California transfers water from the wetter northern part of the state to the drier southern part of the state through the Central Valley Project since 1940 and this was supplemented by the State Water Project in 1973. The scale of these activities is remarkable: approximately two thirds of the population of Californians rely on water from the Delta, these waters also irrigate up to 45% of the fruits & vegetables produced in the US, and about 80% of California's commercial fishery species live in or migrate through the Bay-Delta. This Delta region is a global hotspot for biodiversity that provides habitat for over 700 species, but is also a hotspot for the loss of biodiversity with more than 25 species currently listed by the Endangered Species Act. Understanding the decline of the fragile ecosystem of the Bay-Delta system and the potential consequences to economic growth if water transfers are reduced for the environment, the California State Legislature passed landmark legislation in 2009 (CA Water Code SS 85054) that established "Coequal goals of providing a more reliable water supply for California and protecting, restoring, and enhancing the Delta ecosystem". The legislation also stated that "The coequal goals shall be achieved in a manner that protects and enhances the unique cultural, recreational, natural resource, and agricultural values of the Delta as an evolving place." The challenges of integrating policy, management and scientific research will be described through this and other international examples.
Precast concrete elements in accelerated bridge construction (ABC) extends from superstructure to substructure, precast pile foundation has proven a benefit for regions with fragile ecological environment and adverse geological condition. There is still a lack of knowledge of the seismic behavior and performance of the precast pile foundation. In this study, a 1/8 scaled model of precast pile foundation with elevated cap is fabricated for quasi-static test. The failure mechanism and responses of the precast pile-soil interaction system are analyzed. It is shown that damage occurs primarily in precast pile-soil interaction system and the bridge pier keeps elastic state because of its relatively large cross-section designed for railways. The vulnerable part of the precast pile with elevated cap is located at the embedded section, but no plastic hinge forms along the pile depth under cyclic loading. Hysteretic curves show no significant strength degradation but obvious stiffness degradation throughout the loading process. The energy dissipation capacity of the precast pile-soil interaction system is discussed by using index of the equivalent viscous damping ratio. It can be found that the energy dissipation capacity decreases with the increase of loading displacement due to the unyielding pile reinforcements and potential pile uplift. It is expected to promote the use of precast pile foundation in accelerated bridge construction (ABC) of railways designed in seismic regions.
Even though, the Korean private Security Guard's industry is developing, it did not reached at the expected quality services because of the below cost tendering from flooded small security companies, consequently low pays and fragile benefits occur therefore, the skill level and morale decreased. Also, the private security guards field's education, training and development of expert certification system is not enough. One of the plans to solve these problems can be invigorate the certification system. The improving ways are suggested after the research and the analysis of the certification system as below. First, the qualification system to become a security leader will need to add directly related subject, skill examination and continuous refresh training. Moreover, it needs accurate needed the number of the securities and the reduction of the 1st examination exemption object. Second, the qualified system to be become securities will need to strengthen on standard of qualification and focus on skill evaluation, the job education need to state by the law, also exemption for applicant who approached requirements.
Purpose: This research was conducted to explore the experience of middle-aged women parting with their children and to develop a grounded theory. Method: The participants were 11 women in their 50's who had experienced parting with their children due to schooling, military service and marriage. The grounded theory methodology based on symbolic interactionism was used. Results: 106 concepts, 30 subcategories and 14 categories were derived from the analysis through processes of open coding, axial coding and selective coding. The central phenomenon was 'happy but sad' and the core category was a process of 'independence that is sorrowful yet delightful'. Four types were identified; the independent-type; submissive -type; family-reliant-type ; and fragile-type; based on the attachment to the child, state of mind, satisfaction of the situation, family support system and self-achievement. Conclusion: This research identified that the modern Korean middle-aged women who are considered to be the 'sandwich generation' since they have experienced a turbulent history and the change from a confucian parent-child lifestyle to a couple-oriented one, moved away from an attitude dependent on children in parting with them and started preparing for an independent late life. Based on the results, the verification research is advised on the variables that affect the experience of parting with children.
Nayoung, Kim;Do Won, Kim;Nam Su, Park;Gyeong Hun, Kim;Yang Do, Kim;Chang-Seok, Kim
Current Optics and Photonics
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v.7
no.1
/
pp.38-46
/
2023
Optical Fourier-domain reflectometry (OFDR) sensors have been widely used to measure distances with high resolution and speed in a noncontact state. In the electroplating process of a printed circuit board, it is critically important to monitor the copper-plating thickness, as small deviations can lead to defects, such as an open or short circuit. In this paper we employ a phase-based OFDR sensor for in situ relative distance sensing of a sample with nanometer-scale resolution, during electroplating. We also develop an optical-path difference (OPD)-regulated sensing probe that can maintain a preset distance from the sample. This function can markedly facilitate practical measurements in two aspects: Optimal distance setting for high signal-to-noise ratio OFDR sensing, and protection of a fragile probe tip via vertical evasion movement. In a sample with a centimeter-scale structure, a conventional OFDR sensor will probably either bump into the sample or practically out of the detection range of the sensing probe. To address this limitation, a novel OPD-regulated OFDR system is designed by combining the OFDR sensing probe and linear piezo motors with feedback-loop control. By using multiple OFDR sensors, it is possible to effectively monitor copper-plating thickness in situ and uniformize it at various positions.
Journal of the Microelectronics and Packaging Society
/
v.28
no.3
/
pp.33-38
/
2021
Recently, rollable and foldable displays are attracting great attention in the flexible display market due to their excellent form factor. To predict and prevent the mechanical failure of the display panels, it is essential to accurately understand the mechanical properties of brittle SiNx thin films, which have been used as an insulating film in flexible displays. In this study, tensile properties of the ~130 nm- and ~320 nm-thick SiNx thin films were successfully measured by coating a ~190 nm-thick organic nano-support-layer (PMMA, PS, P3HT) on the fragile SiNx thin films and stretching the films as a bilayer state. Young's modulus values of the ~130 nm and ~320 nm SiNx thin films fabricated through the controlled chamber pressure and deposition power (A: 1250 mTorr, 450 W/B: 1000 mTorr, 600 W/C: 750 mTorr, 700 W) were calculated as A: 76.6±3.5, B: 85.8±4.6, C: 117.4±6.5 GPa and A: 100.1±12.9, B: 117.9±9.7, C: 159.6 GPa, respectively. As a result, Young's modulus of ~320 nm SiNx thin films fabricated through the same deposition condition increased compared to the ~130 nm SiNx thin films. The tensile testing method using the organic nano-support-layer was effective in the precise measurement of the mechanical properties of the brittle thin films. The method developed in this study can contribute to the robust design of the rollable and foldable displays by enabling quantitative measurement of mechanical properties of fragile thin films for flexible displays.
Kang, Kyung Min;Sung, Se Ra;Park, Ji Eun;Shin, Yun Jeong;Park, Sang Hee;Chin, Mi Uk;Lyu, Sang Woo;Cha, Dong Hyun;Shim, Sung Han
Journal of Genetic Medicine
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v.13
no.1
/
pp.14-19
/
2016
Purpose: We examined the prevalence and CGG/AGG repeat structure of expanded alleles of the FMR1 gene in preconceptional and pregnant Korean women. Materials and Methods: The CGG repeats in the FMR1 genes of 1,408 women were analyzed by polymerase chain reaction and Southern blot analysis. To estimate the prevalence of expansion alleles, the individuals were divided into low risk and high risk group. Results: Within this population, 98.4% had normal alleles and 1.6% had abnormal alleles including intermediate (0.6%), premutation (0.5%), full mutation (0.1%), and hemizygous (0.4%) alleles. There were 2 premutation alleles (1:666, 95% confidence interval [CI] 1:250-1,776) in the low risk group and 5 premutation alleles (1:15, 95% 1:6-36) in the high risk group. There were 8 intermediate alleles (1:167, 95% CI 1:130-213) in the low risk group and 1 intermediate alleles (1:76, 95% CI 1:11-533) in the high group. Six of the 7 premutation alleles did not contain AGG interruptions within the repeats and 1 had a single AGG interruption. Four of the 9 intermediate alleles contained 2-3 AGG, 4 had a single AGG, and 1 had no AGG interruptions. Conclusion: Our study demonstrates the prevalence and CGG/AGG structure of expansion alleles in Korean women. The identified premutation prevalence is higher than that of other Asian populations and lower than that of Caucasian populations. Although our study is limited by size and population bias, our findings could prove useful for genetic counseling of preconceptional or pregnant women.
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