• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.1131-1135
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• 2004

In the virtual environment, force feedback to the human operator makes virtual experiences more realistic. However, the force feedback using active actuators such as motors can make the system active and sometimes unstable. To ensure the safe operation and enhance the haptic feeling, stability should be guaranteed. Both motors and brakes are commonly used for haptic device. A brake can generate a torque only against its rotation, but it is intrinsically stable. Consequently, motors and brakes are complementing each other. In this research, a two degree-of-freedom (DOF) haptic device equipped with both motors and brakes has been developed to provide better haptic effects. Each DOF is actuated by a pair of motor and brake. Modeling of the environment and the control method are needed to utilize both actuators. For various haptic effects, contact with the virtual wall and representation of friction effect are extensively investigated in this paper. It is shown that the hybrid haptic system is more suited to some applications than the motor-based active haptic system.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.05a
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• pp.80-87
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• 2003

On this study, an End-Effector for the 300mm wafer transfer robot System is newly suggested. It is a mechanical type with $180^{\circ}$ rotating ranges and is composed of 3-point arms, two plate springs and single-axis DC motor. It is controlled by microchip for the DC motor control. To design, relationships on the gripping force and the wafer deformation is analyzed by FEM analysis. Criterion on gripping force of a suggested End-Effector is confirmed as $255 ~ 274g_f$ from experimental results. From experimented results on repeatable position accuracy, gripping force and gripping cycle times in a wafer cleaning system, we confirmed that the suggested End-Effector is well satisfied on the required performance for 300mm wafer transfer robot system.

• International Journal of Control, Automation, and Systems
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• v.2 no.2
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• pp.238-246
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• 2004

In displaying a virtual wall using a passive haptic device equipped with passive actuators such as electric brakes, unsmooth motion frequently occurs. This undesirable behavior is attributed to time delay due to slowness in the virtual environment update and force approximation due to the inability of a brake to generate torque in arbitrary directions. In this paper a new control scheme called direct control is proposed to achieve smooth display on the wall-following task with a passive haptic device. In direct control, brakes are controlled so that the normal component of a resultant force at the end-effector vanishes, based on the force analysis at the end-effector of the passive haptic device using the passive FME (Force Manipulability Ellipsoid). Various experiments have been conducted to verify the validity of the direct control scheme with a 2-link passive haptic system.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.138-144
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• 2006

Non-contact transportation of a large-sized glass plate using air cushion for the sputtering system of liquid crystal display panel was considered. The gas is injected through multiple small holes to maintain the force for levitating glass plate. Complex flow field and resulting pressure distribution on the glass surface was numerically studied to design the air injection pad. The exhaust hole size was varied to obtain evenly distributed pressure distribution at fixed diameter of the injection hole. Considering the force for levitating glass plate, the diameter of the exhaust hole of 30 to 40 times of the gas injection hole was recommended.

• Journal of the Semiconductor & Display Technology
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• v.5 no.4 s.17
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• pp.41-45
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• 2006

Micro vibration isolation, typically originated from ground, is always a prime concern for the nano-measurement instruments such as Atomic Force Microscopes. A four mount active vibration isolation system is proposed in this paper. Modeling and control of such a four mount system was analyzed. Combined active-passive isolation principle is used for vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in parallel that consists of very soft actuation system, the Voice Coil Motor. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator.

• Journal of the Semiconductor & Display Technology
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• v.4 no.2 s.11
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• pp.33-37
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• 2005

Bare-chip packaging becomes more popular along with the miniaturization of IT components. In this paper, we have studied flip-chip process, and developed automated bonding system. Among the several bonding method, NCP bonding is chosen and batch-type equipment is manufactured. The dual optics and vision system aligns the chip with the substrate. The bonding head equipped with temperature and force controllers bonds the chip. The system can be easily modified fer other bonding methods such as ACF.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.439-440
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• 2006

This research proposes a novel method of shape display to present 3-dimensional objects. Shape displays allow us to feel the actual volume of the object, unlike conventional 2D visual displays of 3D objects. The proposed method employs a wire frame structure to present 3D objects. The wire frame is composed of small units driven by shape memory alloy(SMA) actuators. The drive unit is analogous to the agonist-antagonist system of animal musculoskeletal systems, where the SMA actuators serve as agonist and antagonist muscles. The force in the SMA actuator is controlled by electrical current. The drive unit is equipped with the locking mechanism so that it can sustain the external force exerted by the user as well as the own weight of the wire frame structure. By controlling the current into the SMA actuator and locking mechanism, we call control the angle of the drive unit. A chain of drive units enables presentation of 2 dimensional objects. 3 dimensional presentations are possible by collecting the chains of drive units.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.5
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• pp.82-88
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• 2008

This paper proposes a novel method of 2 dimensional shape display. Shape displays allow us to feel tile actual volume of the object, unlike conventional 2D visual displays of 3D objects. The proposed method employs a wireframe structure to present 2D or 3D objects. The wireframe is composed of small units driven by shape memory alloy (SMA) actuators. The drive unit is analogous to the agonist-antagonist system of animal musculoskeletal systems, where the SMA actuators serve as agonist and antagonist muscles. The force in the SMA actuator is controlled by electrical current. The drive unit is equipped with the locking mechanism so that it can sustain the external force exerted by the user as well as the own weight of the wireframe structure. By controlling the current into the SMA actuator and locking mechanism, we can control the angle of the drive unit. A chain of drive units enables presentation of 2 dimensional objects. 3 dimensional presentations are possible by collecting the chains of drive units.

• Journal of the Semiconductor & Display Technology
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• v.17 no.4
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• pp.1-5
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• 2018

Atomic force microscopy (AFM) simulation for Si (001) surface defects was conducted by using density functional theory (DFT). Three major defects on the Si (001) surface are difficult to analyze due to external noises that are always present in the images obtained by AFM. Noise-free surface defects obtained by simulation can help identify the real surface defects on AFM images. The surface defects were first optimized by using a DFT code. The AFM tip was designed by using five carbon atoms and positioned on the surface to calculate the system's energy. Forces between tip and surface were calculated from the energy data and converted into an AFM image. The simulated AFM images are noise-free and, therefore, can help evaluate the real surface defects present on the measured AFM images.

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.62-67
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• 2021

In this study, we have successfully developed an unique NVIS Green A compatible LED by combining two technologies. One is white LED made with a black EMC (epoxy molding compound) lead frame. The other is NVIS Green A filter that shields the near infrared region made in the film method. The form factor of the developed NVIS Green A compatible LED was 2.0 × 2.0 × 0.95 mm. And it is possible to satisfy NVIS radiance and color limit specified in MIL-STD-3009 by controlling the concentration of Green A dye and the thickness of the NVIS filter as well as adjusting of color temperature of the white LED. From these results, we are expected that the developed NVIS Green A suitable LED is a promising solution for the weight reduction and the cost reduction of avionic applications.