• KSTLE International Journal
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• 제1권2호
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• pp.69-75
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• 2000

The paper compares topography, phase contrast and force spectroscopy in atomic force microscopy data for evaluating the microheterogeneity of surface layer. The worn surface of ion-plated TiN coating was measured using both a laboratory-built and a commercial AFM. The results of analysis revealed structural and micromechanical heterogeneity of the worn surfaces. We demonstrated that the phase image allows relatively qualitative estimation of elastic modulus of the sample surface. The tribolayer formed in the worn surface possessed much lower stiffness than the original coating. It is shown that the most stable phase imaging is provided with a stiff cantilever. In this case, phase contrast is well conditioned, first of all, by microheterogeneity of elastic properties of the investigated surfaces. In this study an attempt was also made to correlate the results of phase imaging with that of the farce spectroscopy. The joint analysis of information on the surface properties obtained by the phase imaging and quantitative data measured with the force spectroscopy methods allows a better understanding of the nature of the surface micromechanical heterogeneity.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.161-162
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• 2002

This study concerns the tribological behaviors of ultra-thin DLC coating with 3 nm thickness deposited in a mixed gas of argon + 20 % hydrogen as a function of humidity. Reciprocating wear tests employing a micro wear tester were performed under various normal loads and relative humidity in air environment. The chemical composition of the original and worn surfaces were studied by Auger electron spectroscopy (AES). It showed that the ultra-thin DLC coating exhibited low friction with enough wear stability at low normal load (0.18 N) and its tribological behavior was strongly dependent on the humidity. The sample surfaces before and after the test were examined using atomic force microscopy (AFM). Capillary force and meniscus areas were discussed in order to explain the influence of humidity on the friction force.

• 한국진공학회지
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• 제19권5호
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• pp.360-364
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• 2010

나노 소재의 물성을 측정하기 위하여 대부분의 연구 그룹에서는 크게 두 가지 분석 기법인 분광학을 이용한 분석과 나노트라이볼로지를 이용한 분석을 사용하고 있다. 분광학을 이용한 분석에는 NMR (Nuclear Magnetic Resonance), IR (Infrared Spectroscopy), Raman 등이 대표적이라 할 수 있고, 나노트라이볼로지를 이용한 분석에는 AFM (Atomic Force Micro-Scope), EFM (Electrostatic Force Microscope), KFM (Kelvin Force Microscope), Nanoindenter 등의 탐침을 이용한 측정 기법이 대표적이다. Nanoindenter는 물질의 탄성 및 경도를 측정 할 수 있으며 이를 통해 물질의 특성을 연구 하는 데에 사용된다. 그러나 이런 Nanoindenter의 압입 실험에서 압입 조건 등의 통제 변수가 다르면 그 결과 값도 바뀌는 것을 볼 수 있는데 본 실험에서는 이런 압입 조건 중 Load - Hold - Unload force의 속도 및 시간을 변화시켜 물질의 탄성계수와 경도가 어떠한 차이를 가지는지 연구하였다.

• Bulletin of the Korean Chemical Society
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• 제34권7호
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• pp.1959-1960
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• 2013

• Transactions on Electrical and Electronic Materials
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• 제8권1호
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• pp.5-10
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• 2007

Using a reference slurry, ammonium dodecyl sulfate (ADS), an anionic and environmentally friendly surfactant, was investigated as an alternative to BTA for its inhibition and lubrication characteristics. Results demonstrated that the inhibition efficiency of ADS was superior to that of BTA. Coefficient of friction (COF) was the lowest when the slurry contained ADS. This suggested that adsorbed ADS on the surface provided lubricating action thereby reducing the wear between the contacting surfaces. Temperature results were consistent with the COF and removal rate data. ADS showed the lowest temperature rise again confirming the softening effect of the adsorbed surfactant layer and less energy dissipation due to friction. Spectral analysis of shear force showed that increasing the pad-wafer sliding velocity at constant wafer pressure shifted the high frequency spectral peaks to lower frequencies while increasing the variance of the frictional force. Addition of ADS reduced the fluctuating component of the shear force and the extent of the pre-existing stick-slip phenomena caused by the kinematics of the process and collision event between pad asperities with the wafer. By contrast, in the case of BTA, there were no such observed benefits but instead undesirable effects were seen at some polishing conditions. This work underscored the importance of real-time force spectroscopy in elucidating the adsorption, lubrication and inhibition of additives in slurries in CMP.

• Bulletin of the Korean Chemical Society
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• 제34권5호
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• pp.1441-1444
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• 2013

Hetero-dimer anions of naphthalene (Np), anthracene (An), phenanthrene (Ph) and pyrene (Py) were investigated using the time-of-flight mass spectrometer (TOF-MS), anion photoelectron spectroscopy (PES) and theoretical calculation. There are two possible geometries with their electron affinity (EA) difference: parallel displaced (PD) and T-shaped. Dispersion force plays a key role in PD structure with the formation of a new anionic core while ${\pi}$-hydrogen interaction plays a key role in T-shaped structure with the monomer anionic core. The optimized structures and charge distributions can simply be explained by the relative difference of EA.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.467-470
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• 2004

Diamond-Like Carbon (DLC) thin film is a semiconductor with high mechanical hardness, low friction coefficient, high chemical inertness, and optical transparency. DLC thin films have widespread applications as protective coatings and solid lubricant coatings in areas such as Hard Disk Drive (HDD) and Micro-Electro-Mechanical-Systems (MEMS). In this work, the wear characteristics of DLC thin films deposited on silicon substrates using a DC-magnetron sputtering system were analyzed. The wear tracks were measured with an Atomic Force Microscope (AFM). To identify the sp2 and sp3 hybridization of carbon bonds and other bonds Raman spectroscopy was used. The structural information of DLC thin films was obtained with Fourier transform infrared spectroscopy and wear tests were conducted by using a micro-pin-on-reciprocator tester. Results showed that the wear characteristics were dependent on the sputtering conditions. The wear rate could be correlated with the bonding state of the DLC thin film.

• 한국진공학회지
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• 제17권3호
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• pp.215-219
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• 2008

실리콘 웨이퍼 위에 Plasma Enhanced Chemical Vapor Deposition (PECVD) 방법으로 증착 된 SiNx 박막의 수소 함량을 측정하였다. 제작된 SiNx 박막은 Fourier Transform Infrared Spectroscopy (FT-IR) 사용하여 박막의 수소함량과 결합상태를 확인하였으며, Atomic Force Microscopy (AFM) 측정을 통하여 박막의 표면 거칠기를 비교, 시료의 조성비 평가를 위하여 Rutherford Backscattering Spectrometry (RBS)을 사용하였다. 또한 SiNx박막의 조성확인을 위하여 Photoluminescence(PL)를 이용하여 FT-IR spectrum의 결과와 비교 해석하였다. FT-IR에서 NH의 수소함량(at%)이 0.92 %에서 0.64 %로 낮아질 수록 AFM을 이용한 표면 거칠기는 12.8 $\AA$에서 10.8 $\AA$로 낮아지고, Si양이 상대적으로 많아지는 것을 PL에서 확인하였으며, RBS에서도 시뮬레이션을 통해 비슷한 결과를 얻을 수 있었는데, 이는 FT-IR을 사용함으로써 SiNx 박막의 수소 함량의 측정이 가능하다는 것을 보여주므로 단위공정에서 신속하게 SiNx 박막 분석이 가능함을 알 수 있었다.

• Journal of Welding and Joining
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• 제31권4호
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• pp.54-61
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• 2013

This paper reports mild steel(SPHC) and stainless steel(STS304) sheets commonly used for railroad cars or commercial vehicles such as in the automobile and shipbuilding industries. The sheets are used in these applications, which are mainly fabricated using the shielded metal arc welding(SMAW) of dissimilar materials. It also reports an interesting application of Laser Induced Breakdown Spectroscopy(LIBS) in order to determine the elemental composition diffusion of SPHC and STS304. Arc blow produced by magnetic force during the electric arc welding prevents the formation from a sound weldment. In particular, the mechanical properties of the joint are influenced by not only by geometrical and mechanical factors but also the welding conditions for the arc welded joint. Therefore, the mechanical properties and performance are evaluated by performing a physicochemical component analysis. And they increase in accordance with content of elements and microstructure in mild steel. As results, appropriate range for magnetic fields could be achieved. Therefore, the effect of magnetic force in a butt weld of mild steel plates was investigated by comparing to the measured data.

• 대한화학회지
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• 제59권2호
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• pp.132-135
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• 2015

Bonding force and stiffness in amine-linked single-molecule junctions for Ag electrodes were measured using a home-built conducting atomic force microscope under ambient conditions at room temperature. For comparison, Au electrodes were used to measure the rupture force and stiffness of the molecular junctions. The traces of the force along with the conductance showed a characteristic saw-tooth pattern owing to the breaking of the metal atomic contacts or the metal-molecule- metal junctions. We found the rupture force and stiffness for Ag are smaller than those for Au electrodes. Furthermore, we observed that the force required to break the amine-Ag bond in the conjugated molecule, 1,4-benzenediamine, is smaller than in 1,4-butanediamine which is fully saturated. These results consist with the previous theoretical calculations for the binding energies of the nitrogen bonded to Ag or Au atoms.