• 제목/요약/키워드: Focused ion beam (FIB) technique

검색결과 25건 처리시간 0.02초

TAS (Total Analysis System)를 이용한 SB-TRIP강에서의 2-D & 3-D 미세구조 분석 연구 (2-D & 3-D Observations on the microstructures of Super Bainitie TRIP Steels using Total Analysis System)

  • 설재복;임영록;박찬경
    • 한국소성가공학회:학술대회논문집
    • /
    • 한국소성가공학회 2009년도 추계학술대회 논문집
    • /
    • pp.209-212
    • /
    • 2009
  • It has been widely reported that carbide-free bainitic steels or super-bainite WP (SB-TRIP) steels for the automotive industry are a new family of steels offering a unique combination of high strength and ductility. Hence, it is important to exactly evaluate the volume fraction of RA and to identify the 3-D morphology of constituent phases, because it plays a crucial role in mechanical properties. Recently, as electron back-scattered diffraction (EBSD) equipped with focused ion beam (FIB) has been developed, 3-D EBSD technique for materials science are used to these steels. Moreover, newly developed atom probe tomography (APT) technique can provide the exact distribution and chemical concentration of alloying elements in a sub-nm scale. The APT analysis results indicate exactly the distribution and composition of alloying elements in the austenite and bainite phases of SB-TRIP steels with the atomic-scale resolution. And thus, no partitioning of aluminum and manganese atoms was showed between the austenite containing $7.73{\pm}0.39$ at% C and the bainitic ferrite associated with $0.22{\pm}0.06$ at% C in the SB-TRIP steel.

  • PDF

TAS(Total Analysis System)을 이용한 SB-TRIP강에서의 2-D & 3-D 미세구조 분석 연구 (2-D & 3-D Observations on the Microstructure of Super Bainite TRIP Steels using Total Analysis System)

  • 설재복;이봉호;박찬경
    • 소성∙가공
    • /
    • 제19권1호
    • /
    • pp.44-49
    • /
    • 2010
  • It has been widely reported that carbide-free bainitic steels or super-bainite TRIP (SB-TRIP) steels for the automotive industry are a new family of steels offering a unique combination of high strength and ductility. Hence, it is important to exactly evaluate the volume fraction of RA and to identify the 3-D morphology of constituent phases, because it plays a crucial role in mechanical properties. Recently, as electron back-scattered diffraction (EBSD) equipped with focused ion beam (FIB) has been developed, 3-D EBSD technique for materials science are used to these steels. Moreover, newly developed atom probe tomography (APT) technique can provide the exact distribution and chemical concentration of alloying elements in a sub-nm scale. The APT analysis results indicate exactly the distribution and composition of alloying elements in the austenite and bainite phases of SB-TRIP steels with the atomic-scale resolution. And thus, no partitioning of aluminum and manganese atoms was showed between the austenite containing $7.73{\pm}0.39$ at% C and the bainitic ferrite associated with $0.22{\pm}0.06$ at% C in SB-TRIP steel.

An investigation on dicing 28-nm node Cu/low-k wafer with a Picosecond Pulse Laser

  • Hsu, Hsiang-Chen;Chu, Li-Ming;Liu, Baojun;Fu, Chih-Chiang
    • 마이크로전자및패키징학회지
    • /
    • 제21권4호
    • /
    • pp.63-68
    • /
    • 2014
  • For a nanoscale Cu/low-k wafer, inter-layer dielectric (ILD) and metal layers peelings, cracks, chipping, and delamination are the most common dicing defects by traditional diamond blade saw process. Sidewall void in sawing street is one of the key factors to bring about cracks and chipping. The aim of this research is to evaluate laser grooving & mechanical sawing parameters to eliminate sidewall void and avoid top-side chipping as well as peeling. An ultra-fast pico-second (ps) laser is applied to groove/singulate the 28-nanometer node wafer with Cu/low-k dielectric. A series of comprehensive parametric study on the recipes of input laser power, repetition rate, grooving speed, defocus amount and street index has been conducted to improve the quality of dicing process. The effects of the laser kerf geometry, grooving edge quality and defects are evaluated by using scanning electron microscopy (SEM) and focused ion beam (FIB). Experimental results have shown that the laser grooving technique is capable to improve the quality and yield issues on Cu/low-k wafer dicing process.

Transmission Electron Microscopy Characterization of Early Pre-Transition Oxides Formed on ZIRLOTM

  • Bae, Hoyeon;Kim, Taeho;Kim, Ji Hyun;Bahn, Chi Bum
    • Corrosion Science and Technology
    • /
    • 제14권6호
    • /
    • pp.301-312
    • /
    • 2015
  • Corrosion of zirconium fuel cladding is known to limit the lifetime and reloading cycles of fuel in nuclear reactors. Oxide layers formed on ZIRLO4^{TM}$ cladding samples, after immersion for 300-hour and 50-day in a simulated primary water chemistry condition ($360^{\circ}C$ and 20 MPa), were analyzed by using the scanning transmission electron microscopy (STEM), in-situ transmission electron microscopy (in-situ TEM) with the focused ion beam (FIB) technique, and X-ray diffraction (XRD). Both samples (immersion for 300 hours and 50 days) revealed the presence of the ZrO sub-oxide phase at the metal/oxide interface and columnar grains developed perpendicularly to the metal/oxide interface. Voids and micro-cracks were also detected near the water/oxide interface, while relatively large lateral cracks were found just above the less advanced metal/oxide interface. Equiaxed grains were mainly observed near the water/oxide interface.

알루미늄 합금과 아연도금강판의 이종 겹치기 마찰교반접합에서 기계적성질에 미치는 Tool Geometry의 영향 (The Effect of Tool Geometry on the Mechanical Properties in a Friction Stir Welded Lap Joint between an Al Alloy and Zn-coated Steel)

  • 김남규;김병철;정병훈;송상우;;강정윤
    • 대한금속재료학회지
    • /
    • 제48권6호
    • /
    • pp.533-542
    • /
    • 2010
  • The specific motivation for joining an Al alloy and Zn-coated steel arises from the need to save fuel consumption by weight reduction and to enhance the durability of vehicle structures in the automobile industry. In this study, the lap joining A6K31 Al alloy (top) and SGARC340 Zn-coated steel (bottom) sheets with a thickness of 1.0 mm and 0.8 mm, respectively, was carried out using the friction stir weld (FSW) technique. The probe of a tool did not contact the surface of the lower Zn-coated steel sheet. The friction stir welding was carried out at rotation speeds of 1500 rpm and travel speeds of 80~200 mm/min. The effects of tool geometry and welding speed on the mechanical properties and the structure of a joint were investigated. The tensile properties for the joints welded with a larger tool were better than those for the joints done with a smaller tool. A good correlation between the tensile load and area of the welded region were observed. The bond strength using a larger tool (M4 and M3) decreased with an increase in welding speed. Most fractures occurred along the interface between the Zn-coated steel and the Al alloy. However, in certain conditions with a lower welding speed, fractures occurred at the A6K31 Al alloy.