• JSTS:Journal of Semiconductor Technology and Science
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• v.5 no.1
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• pp.45-51
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• 2005

We have developed surface micromachined Infrared ray (IR) focal plane array (FPA), in which single $SiO_{2}$ layer works as an IR absorbing plate and $Pb(Zr_{0.3}Ti_{0.7})O_{2}$ thin film served as a thermally sensitive material. There are some advantages of applying $SiO_{2}$ layer as an IR absorbing layer. First of all, the $SiO_{2}$ has good IR absorbance within $8{\sim}12{\mu}m$ spectrum range. Measured value showed about 60% absorbance of incident IR spectrum in the range. $SiO_{2}$ layer has another important merit when applied to the top of Pt/PZT/Pt stack because it works also as a supporting membrane. Consequently, the IR absorbing layer forms one body with membrane structure, which simplifies the whole MEMS process and gives robustness Ito the structure.

• Journal of Sensor Science and Technology
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• v.19 no.2
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• pp.130-136
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• 2010

The microbolometer array sensor with fine pitch pixel array has been implemented to the released amorphous silicon layer supported by two contact pads. For the design of focal plane mirror with geometrical flatness, the simple beam test structures were fabricated and characterized. As the beam length decreased, the effect of beam width on the bending was minimized, Mirror deformation of focal plane in a real pixel showed downward curvature by residual stress of a-Si and Ti layer. The mirror tilting was caused by the mis-align effect of contact pad and confirmed by FEA simulation results. The properties of bolometer have been measured as such that the NETD 145 mK, the TCR -2 %/K, and thermal time constant 1.99 ms.

• Journal of Sensor Science and Technology
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• v.31 no.6
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• pp.366-370
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• 2022

A 12 ㎛ pixel-sized 360 × 240 microbolometer focal plane array (MBFPA) was fabricated using a complementary metaloxide-semiconductor (CMOS)-compatible process. To release the MBFPA membrane, an amorphous carbon layer (ACL) processed at a low temperature (<400 ℃) was deposited as a sacrificial layer. The thermal time constant of the MBFPA was improved by using serpentine legs and controlling the thickness of the SiNx layers at 110, 130, and 150 nm on the membrane, with response times of 6.13, 6.28, and 7.48 msec, respectively. Boron-doped amorphous Si (a-Si), which exhibits a high-temperature coefficient of resistance (TCR) and CMOS compatibility, was deposited on top of the membrane as an IR absorption layer to provide heat energy transformation. The structural stability of the thin SiNx membrane and serpentine legs was observed using field-emission scanning electron microscopy (FE-SEM). The fabrication yield was evaluated by measuring the resistance of a representative pixel in the array, which was in the range of 0.8-1.2 Mohm (as designed). The yields for SiNx thicknesses of SiNx at 110, 130, and 150 nm were 75, 86, and 86%, respectively.

• Current Optics and Photonics
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• v.5 no.1
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• pp.8-15
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• 2021

An elliptical zone plate (EZP) array is important in off-axis optical systems because it provides two advantages. First, the residual beam and the main source are not focused in the same direction and second, the light from the observation plane is not reflected back towards the beam source. However, the fill factor of the previous EZP array was about 76% which was a little low. Hence, this EZP array could not collect the maximum amount of illumination light, which affected the overall optical performance of the lens array. In this study, we propose a new EZP array design with a 97.5% fill factor used in off-axis imaging system for enhancement of brightness and contrast. Then, direct laser lithography was used to fabricate the high fill factor EZP array by moving the XY linear stage of the system in a zigzag motion. The imaging properties of the proposed EZP array were experimentally verified at the focal plane and compared with the previous model.

• Journal of the Optical Society of Korea
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• v.17 no.2
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• pp.213-218
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• 2013

Although infrared focal plane array (IRFPA) detectors have been commonly used, non-uniformity correction (NUC) remains an important problem in the infrared imaging realm. Non-uniformity severely degrades image quality and affects radiometric accuracy in infrared imaging applications. Residual non-uniformity (RNU) significantly affects the detection range of infrared surveillance and reconnaissance systems. More effort should be exerted to improve IRFPA uniformity. A novel NUC method that considers the surrounding temperature variation compensation is proposed based on the binary nonlinear non-uniformity theory model. The implementing procedure is described in detail. This approach simultaneously corrects response nonlinearity and compensates for the influence of surrounding temperature shift. Both qualitative evaluation and quantitative test comparison are performed among several correction technologies. The experimental result shows that the residual non-uniformity, which is corrected by the proposed method, is steady at approximately 0.02 percentage points within the target temperature range of 283 K to 373 K. Real-time imaging shows that the proposed method improves image quality better than traditional techniques.

• Proceedings of the Optical Society of Korea Conference
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• 2009.02a
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• pp.219-220
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• 2009

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.30.1-30.1
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• 2005

• Proceedings of the Korean Vacuum Society Conference
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• 2007.02a
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• pp.106-106
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• 2007

• Proceedings of the Optical Society of Korea Conference
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• 2007.07a
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• pp.261-262
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• 2007

• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.1338-1340
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• 2009

High resolution three-dimensional integral imaging display is proposed. Each time-multiplexed image is projected with different incident angle on same array of elemental lenses. Those images are collected at different positions in focal plane of lens array, and thus the number of the point light sources increases and their spacing decreases. Therefore, proposed method can create high resolution 3D images.