• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.11a
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• pp.242-243
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• 2015

Fault detection using optical emission spectra with modified K-means cluster analysis and principal component anal ysis are demonstrated for inductive coupl ed pl asma cl eaning processes. The optical emission spectra from optical emission spectroscopy (OES) are used for measurement. Furthermore, Principal component analysis and K-means cluster analysis algorithm is modified and applied to real-time detection and sensitivity enhancement for fluorocarbon cleaning processes. The proposed techniques show clear improvement of sensitivity and significant noise reduction when they are compared with single wavelength signals measured by OES. These techniques are expected to be applied to various plasma monitoring applications including fault detections as well as chamber cleaning endpoint detection.

• Proceedings of the Materials Research Society of Korea Conference
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• 2007.05a
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• pp.29.2-29.2
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• 2007

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1327-1329
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• 1994

In this paper, We treated the electrical characteristic of fluorocarbon. We found that its properties - dielectric properties, resistivities, dielectric characteristics. etc - are sufficient to use as coolants for GAS INSULATED TRANSFORMER.

• Bulletin of the Korean Chemical Society
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• v.32 no.7
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• pp.2345-2350
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• 2011

Variable temperature high-resolution $^{19}F$ magic angle spinning (MAS) solid-state NMR spectroscopy was used to characterize fluorocarbon (FKM) rubbers. The high-resolution spectra of copolymers made from two monomers, vinylidene fluoride and hexafluoropropene, and terpolymers composed of vinylidene fluoride, hexafluoropropene, and tetrafluoroethylene, were obtained using MAS speeds of up to 18 kHz combined with high temperatures of up to 200 $^{\circ}C$ at a magnetic field strength of 9.4 Tesla. From these high resolution solid-state NMR spectra, we were able to assign the spectral peaks and differentiate the copolymer FKM from the terpolymer FKM. We also determined quantitatively the monomer compositions of each FKM rubber.

• Proceedings of the Materials Research Society of Korea Conference
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• 2002.05a
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• pp.32-32
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• 2002

• Proceedings of the Materials Research Society of Korea Conference
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• 1999.05a
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• pp.26-26
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• 1999

• Proceedings of the Materials Research Society of Korea Conference
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• 2002.11a
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• pp.68-68
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• 2002

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.36-36
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• 2010

Low-pressure fluorocarbon plasmas are widely used in microelectronics fabrication for a variety of surface modification purposes. In particular, fluorocarbon plasmas are used for the etching of dielectrics such as silicon dioxide and silicon nitride. Among the various fluorocarbons, this study focuses on C4F6 molecules (C4F6s) which are composed of hexafluorocyclobutene (c-C4F6), hexafluoro-1, 3-butadiene (1, 3-C4F6), and hexafluoro-2-butyne (2-C4F6). We have investigated the dissociation reactions of C4F6s, resulting in CF2, CF3, C2F3, and C3F3 fragments, by using the wB97X-D functional with various basis sets. In this presentation, the geometrical properties, energetics, and dissociation mechanisms of C4F6s will be suggested.

• Textile Coloration and Finishing
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• v.11 no.1
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• pp.25-33
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• 1999

PET fabric was grafted with $CF_4$ or $C_2F_6$ plasmas generated by glow discharge. The water repellency of plasma-treated fabrics were evaluated with contact angle meter. The change in surface morphologies was observed by SEM, and the change of surface chemical characteristics were analyzed by FT-IR, ESCA and microchemical analysis technique. The results obtained are as follows : 1) The contact angle of plasma-treated fabric was over $150^\circ{C}$. 2) It was observed by SEM that the surface of treated substrate was over coated with thin film formed by the fluorocarbon plasma treatment. 3) According to ESCA analysis, there were prevailing -CHF-, $-CF_2$- and a little $-CF_3$ components on fluorocarbon plasma treated substrate. -CHF- and $-CF_2$- components were reduced by washing, and $-CF_2$- component was recovered by heat treatment. 4) In consideration of quantitative analysis of fluorine and F/C ratio by ESCA, we found that fluorination reached to the inner of substrate.

• Textile Coloration and Finishing
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• v.2 no.1
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• pp.1-7
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• 1990

The cleaning resistance of tanned chrome garment leathers was investigated by using drycleaning solvents. Hydrocarbon, perchloroethylene and fluorocarbon (F-113) were used as solvent. Various test methods, such as color difference test, surface view by scanning electron microscope, mechanical properties measured by KES-FB System and their hand values and wearing abilities are carried out in this study. The results can be obtained as follows: 1. Fluorocarbon type (F-113) was demonstrated a suitable solvent for drycleaning of leather. 2. Perchloroethylene showed the worst in fading and stiffening among three different types of solvents.