• Journal of the Korean Vacuum Society
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• v.4 no.S1
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• pp.34-39
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• 1995

Various silicon films were prepared by thermal- and UV photo-CVD processes. The reactants were SiH4, Si2H6, SiH2F2, SIF4, and H2. Silicon films grown at temperatures below $500 ^{\circ}C$ were either amorphous or crystalline depending on the process conditions, and the growth rates ranged between 5 and $80\AA$min. Crystallinity of the film was improved even at $250^{\circ}C$ when the film was grown by photo-CVD using fluoro-silanes as the reactants. Analysis of the film by RBS, SIMS, XRD, and ex-situ IR indicated that substrate surface was contaminated by oxygen and other impurities when the reactants contained neither hydrogen nor fluoro-silnanes, but when fluoro-silanes were used as reactants the silicon film was highly crystalline.

• Journal of the Korean Chemical Society
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• v.18 no.4
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• pp.278-288
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• 1974

Starting from p-dichlorobenzene, 2-amino-4-chloroanisole could be prepared via a nitration, a methoxylation, and subsequent reduction. The repeated chlorination of 2-amino-4-chloroanisole resulted 2-amino-3,4,5-trichloroanisole without any isomeric products. The chlorination of 4-chloro-2-nitroanisole could easily give 2,4-dichloro-6-nitroanisole but polychlorination of the product could not be achieved at the atmospherical pressure. The repeated chlorination of 2-amino-4,6-dichloroanisole could give 2-amino-3,4,5,6-tetrachloroanisole, The Schiemann reaction of 2-amino-4-chloroanisole and 2-amino-4,6-dichloroanisole could give 2-fluoro-4-chloroanisole and 2-fluoro-4,6-dichloroanisole, respectively. The repeated chlorination of these fluorochloroanisoles could give 2-fluoro-3,4,5,6-tetrachloroanisole. In each chlorination process, the components of products were examined by means of NMR spectrometry and the chlorination reaction was repeated without isolating each isomeric product. The feasibility of the present routes of preparations was discussed in respects to the conveniency of reaction conditions and respective overall yields of the processes.

• Clean Technology
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• v.14 no.3
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• pp.193-203
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• 2008

A surfactant is used to assist the effect of cleaning, dispersibility and adhesion during leather manufacturing process. Existing surfactant for that process includes many hydrophilic groups that may cause problem such as stain, bad water resistance and poor durability, etc. It is potential problem to make high-performance property for future leather market. In this study, we have synthesized the fluorinated surfactant of which property decreases surface tension, increases dispersion, cleaning effect and the better chrome absorption by the high bond energy of C-F to complement weakness that the present alkyl derivative surfactants have. Using fluorinated surfactant, we can confirm that dispersion is increased, chrome absorption ratio is augmented with high osmosis and coherence, chrome content in the tanning waste water is reduced, BOD and COD contents are diminished and physical characteristics are improved.

• Journal of Ocean Engineering and Technology
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• v.23 no.6
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• pp.99-104
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• 2009

PTFE has good mechanical and chemical stability at a wide range of temperatures and demonstrates a low friction coefficient value. PTFE is being used for self-lubricating parts in industry. But it shows a high wear rate. Thus, PTFE and nano-diamond powder were mixed into a composite and the wear properties of a PTFE coating layer on Al6061 was investigated. A ball-on-disk type of wear tester was used under a dry condition and different temperatures of oil. After the wear test, the wear track wasexamined by optical microscope. The PTFE-diamond showed the lowest friction coefficient (0.02) of all the lubricants in the experiments. The friction coefficient was shown to be directly related to the diamond powder in the PTFE coating. Adhesion estimations were performed by a scratch test, which is mainly used for coatings. The critical load between the coating and substrate was defined through analyses of the friction load, normal load curve, and acoustic emissions, along with optical microscope observations. The scratch test results showed that an import item (SWISS) gave the highest critical load values.

• Polymer(Korea)
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• v.33 no.6
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• pp.537-543
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• 2009

The direct fluorination of polymers is a heterogeneous reaction using the mixture of $F_2$ and inert gas. In general, the resulting fluorinated polymers have good barrier property chemical stability similar to those of the fluoro-polymers, and could be prepared from the simple process. In this study, the polysulfone dense films were surface fluorinated using the direct fluorination technique and gas permeability and selectivity of the prepared membranes were measured with varying both $F_2$ concentration and reaction time. The introduction of $F_2$ was confirmed by X-ray photoelectron spectroscopy (XPS), water contact angles, and atomic force microscopy (AFM). As the $F_2$ increased, the permeability decreased while the selectivities for $O_2$, $CO_2$, and He gases relative to $N_2$ increased.

• Applied Chemistry for Engineering
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• v.27 no.1
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• pp.101-109
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• 2016

The purpose of this research was to develop a flat panel display device's glass etchant which can replace hydrofluoric acid. The glass etchant was composed of 18~19% wt% of ammonium hydrogen fluoride, 24~25 wt% of sulfuric acid, 45~46 wt% of water, 4~5 wt% of sulfate and 7~8 wt% of fluoro-silicate. By replenishing the etchant which has the amount of 5% of initial solution's mass, it was possible to reuse the etchant continuously. The developed etchant showed $5{\mu}m/min$ of etching rate at $30^{\circ}C$. The reusable etchant, with replenishing 5% of initial etchant mass showed the stable etching rate, which has the deviation of less than $0.1{\mu}m/min$ etching rate. The glass surface of flat panel display device created from our etching process was in good condition with any defects such as pin hole and dimple.

• Applied Chemistry for Engineering
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• v.22 no.5
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• pp.467-472
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• 2011

This study investigated illite/polypropylene (PP) composite filament formation via melt-spinning and evaluated their physical properties to prepare functional fibers using natural materials. When composite filaments were formed, the composite filaments exhibited smaller fiber diameters compared to that of neat PP filament because of the lubricant effect of illite induced by its layered structure. Moreover, fluorination effect increased interfacial affinity and dispersion in the polymer, resulting in smaller diameter of fluorinated illite/PP composite filament, which was 2/3 of the neat PP filament diameter. Addition of raw and fluorinated illite improved thermal stability of illite/PP composite filament. Raw illite/PP composite filament cannot be used for a practical application, because it broke during drawing process, whereas the fluorinated illite/PP composite filament can be used for a practical application, because it exhibited similar tensile strength of the neat PP filament and 50% increased modulus. Even with improved illite/PP interfacial affinity and illite dispersion in the polymer, illite/PP composite filament formed microcomposite, because non-expandable illite had strongly bound layers, resulting in only a little illite exfoliation and PP intercalation into illite.

• Journal of the Microelectronics and Packaging Society
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• v.19 no.1
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• pp.61-66
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• 2012

Chemical Mechanical Planarization (CMP) is a polishing process used in the microelectronic fabrication industries to achieve a globally planar wafer surface for the manufacturing of integrated circuits. Pad conditioning plays an important role in the CMP process to maintain a material removal rate (MRR) and its uniformity. For metal CMP process, highly acidic slurry containing strong oxidizer is being used. It would affect the conditioner surface which normally made of metal such as Nickel and its alloy. If conditioner surface is corroded, diamonds on the conditioner surface would be fallen out from the surface. Because of this phenomenon, not only life time of conditioners is decreased, but also more scratches are generated. To protect the conditioners from corrosion, thin organic film deposition on the metal surface is suggested without requiring current conditioner manufacturing process. To prepare the anti-corrosion film on metal conditioner surface, vapor SAM (self-assembled monolayer) and FC (Fluorocarbon) -CVD (SRN-504, Sorona, Korea) films were prepared on both nickel and nickel alloy surfaces. Vapor SAM method was used for SAM deposition using both Dodecanethiol (DT) and Perfluoroctyltrichloro silane (FOTS). FC films were prepared in different thickness of 10 nm, 50 nm and 100 nm on conditioner surfaces. Electrochemical analysis such as potentiodynamic polarization and impedance, and contact angle measurements were carried out to evaluate the coating characteristics. Impedance data was analyzed by an electrical equivalent circuit model. The observed contact angle is higher than 90o after thin film deposition, which confirms that the coatings deposited on the surfaces are densely packed. The results of potentiodynamic polarization and the impedance show that modified surfaces have better performance than bare metal surfaces which could be applied to increase the life time and reliability of conditioner during W CMP.