• Journal of the Korean Crystal Growth and Crystal Technology
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• v.14 no.5
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• pp.220-225
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• 2004

Four different Fluorine-based gases ($SF_6/,NF_3, PF_5,\; and \; BF_3$) were examined for high rate Inductively Coupled Plasma etching of Si. Etch rates up to ~8$\mu\textrm{m}$/min were achieved with pure $SF_6$ discharges at high source power (1500 W) and pressure (35 mTorr). A direct comparison of the four feedstock gases under the same plasma conditions showed the Si etch rate to increase in the order $BF_3$ < $NF_3$< $PF_5$ < $SF_6$. This is in good correlation with the average bond energies of the gases, except for $NF_3$, which is the least strongly bound. Optical emission spectroscopy showed that the ICP source efficiently dissociated $NF_3$, but the etched Si surface morphologies were significantly worse with this gas than with the other 3 gases.

• Membrane Journal
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• v.23 no.3
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• pp.189-203
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• 2013

F-gases, gases containing fluorine such as perfluorocarbons (PFCs), sulfurhexafluoride ($SF_6$), nitrogen trifluoride ($NF_3$) are known to have green house effects. Although the net emission rates of gases containing fluorine are much lower than those of $CO_2$, their contribution to global warming cannot be ignored because of their extremely high global warming potential (GWP). F-gases mainly have been used for a variaty of applications in the semiconductor/LCD processes and in the electric power distribution industry of the national key industry. One of practical solutions of controlling the emission rates of F-gases is to reuse by separation and recovery of F-gases of low concentration from the gases mixtures with nitrogen or air. This work investigates some methods for F-gases recovery and separation around the membrane-based process.

• Applied Chemistry for Engineering
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• v.28 no.6
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• pp.638-644
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• 2017

Pitch based activated carbon fibers for electric double layer capacitor (EDLC) electrodes were treated by oxyfluorination via varying the ratio of fluorine and oxygen gases to improve high power property. As the partial pressure of fluorine increased, the oxyfluorinated activated carbon fibers showed an increase of linear fluorine functional groups. While the oxygen functional groups increased, no changes was observed with respect to the partial gas pressure. The specific surface area and pore volume decreased due to the etching reaction on the activated carbon fiber surface through oxyfluorination, but the mesopore volume increased about 4.5 times. In the case of activated carbon fibers treated with 50% of the fluorine gas partial pressure, the specific capacitance increased to about 29% and 61% at scan rates of 5 and 50 mV/s, respectively. The improvement of the specific capacitance was believed to be due to the introduction of oxygen and fluorine functional groups on the activated carbon fiber surface and the increase of mesopores through oxyfluorination.

• The Bulletin of The Korean Astronomical Society
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• v.35 no.1
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• pp.25-25
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• 2010

The spectroscopy over a region from 3 to 17 ${\mu}m$ based on the tuneable diode lasers (TDLAS) is the most powerful technique for in situ studies of the diagnostics of small molecules. The increasing interest in small molecules especially containing carbon, oxygen, hydrogen, and fluorine containing ones can be fulfilled by TDLAS at 0.0001 cm-1 resolution, because most of these compounds are infrared active. TDLAS provides a means of determining the absolute concentrations of the ground states of stable and transient molecular species, which can be employed for the time dependent studies in sub micro second scale. Information about gas temperature and population densities can also be derived from TDLAS measurements. Collisional energy transfer between the small molecules can be studied with TDLAS. Also, a variety of free radicals and molecular ions have been detected by TDLAS. Since plasmas with molecular feed gases are used in many applications, there are new applications in industrial field. Recently, the development of quantum cascade lasers (QCLs) offers an attractive new option for TDLAS.

• Journal of the Microelectronics and Packaging Society
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• v.8 no.3
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• pp.63-67
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• 2001

Up to now, most studies about Pt-etching have been focused on physical sputtering mechanism with Cl-based plasma, while only a limited results are available for etching characteristics with fluorine-based plasma. In this study, etch characteristics of Pt thin film with $Cl_2$/Ar and $SF_{6}$/Ar Ar gas chemistries have been studied with ECR plasma etching system. It is confirmed that $SF_{6}$/Ar Ar plasma chemistry could make volatile etch-products through the reaction with Pt thin film. Also the improvement in etch rate, etch profile and surface roughness is obtained due to the formation of volatile platinum fluoride compounds.

• Journal of the Korean Physical Society
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• v.73 no.10
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• pp.1437-1443
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• 2018

In this work, $SnO_2$ modified with reduced graphene oxide (rGO) and carbon nanotubes (CNTs) separately and combined sensitized by using the co-precipitation method and their sensing behavior toward ethanol vapor at room temperature were investigated. An interdigitated electrode (IDE) gold substrate is very expensive compared to a fluorine doped tin oxide (FTO) substrate; hence, we used the latter to reduce the fabrication cost. The structure and the morphology of the studied materials were characterized by using differential thermal analyses (DTA) and thermogravimetric analysis (TGA), transmission electron microscope (TEM), X-ray diffraction (XRD), Fourier transform infrared (FTIR) spectroscopy, Brunauer-Emmett-Teller surface area and Barrett-Joyner-Halenda (BJH) pore size measurements. The studied composites were subjected to ethanol in its gas phase at concentrations from 10 to 200 ppm. The present composites showed high-performance sensitivity for many reasons: the incorporation of $SnO_2$ and CNTs which prevents the agglomeration of rGO sheets, the formation of a 3D mesopourus structure and an increase in the surface area. The decoration with rGO and CNTs led to more active sites, such as vacancies, which increased the adsorption of ethanol gas. In addition, the mesopore structure and the nano size of the $SnO_2$ particles allowed an efficient diffusion of gases to the active sites. Based on these results, the present composites should be considered as efficient and low-cost sensors for alcohol.