Fabrication and Properties of GaAs-MIS Capacitor using $SF_6$ Plasma Discharge
($SF_6$ 플라즈마 방전을 이용한 G3AS-MIS 커패시터의 제작 밑 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 1999.11a
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- pp.29-32
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- 1999