• Journal of Mechanical Science and Technology
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• v.19 no.8
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• pp.1544-1553
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• 2005

In this article, a micro cantilever array actuated by PZT films is designed and fabricated for micro fluidic systems. The design features for maximizing tip deflections and minimizing fluid leakage are described. The governing equation of the composite PZT cantilever is derived and the actuating behavior predicted. The calculated value of the tip deflection was 15 ${\mu}m$ at 5 V. The fabrication process from SIMOX (Separation by oxygen ion implantation) wafer is presented in detail with the PZT film deposition process. The PZT films are characterized by investigating the ferroelectric properties, dielectric constant, and dielectric loss. Tip deflections of 12 ${\mu}m$ at 5 V are measured, which agreed well with the predicted value. The 18 ${\mu}l/s$ leakage rate of air was observed at a pressure difference of 1000 Pa. Micro cooler is introduced, and its possible application to micro compressor is discussed.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.1
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• pp.47-54
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• 2012

We developed a novel method of fluidic self-assembly to replace the conventional pick-and-place method. This method is cheaper and more effective than the previous method. For this research, we compared mathematical models with experimental results using the parameters of the drag force, the capillary force, and the restoring force for effective chip assembly, and the results for the alignment to the substrate. We obtained a 96.5% attach rate and $5^{\circ}$-misalignment to the substrate in a 500 ${\mu}m$ solder ball.

• Journal of the Korean Society of Visualization
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• v.18 no.1
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• pp.50-58
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• 2020

This paper presents flow characteristics of a sweeping jet issued by a feedback-free fluidic oscillator. Overall flow characteristics of feedback-free sweeping jet (FFSJ) were analyzed using flow visualization. The feedback-free sweeping jet has a sinusoidal external flow pattern. The oscillating frequency of the FFSJ is three times higher than that of a conventional sweeping jet at the same Reynolds number. Flow structure and turbulence characteristics were investigated using time-resolved particle image velocimetry (TR-PIV). In instantaneous velocity fields, the flow did not stay at ends but changed the direction continuously in contrast to the conventional sweeping jet. Velocity distributions at each plane which were extracted from mean velocity field has Gaussian distribution, which is similar with a circular jet. The sweep angles were constant as 45° at all Reynolds numbers in the high flow rate regime.

• Steel and Composite Structures
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• v.51 no.4
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• pp.363-375
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• 2024

Within the optimization field, addressing the intricate posed by fluidic pressure loads on functionally graded structures with frequency-related designs is a kind of complex design challenges. This paper thus introduces an innovative density-based topology optimization strategy for frequency-constraint functionally graded structures incorporating Darcy's law and a drainage term. It ensures consistent treatment of design-dependent fluidic pressure loads to frequency-related structures that dynamically adjust their direction and location throughout the design evolution. The porosity of each finite element, coupled with its drainage term, is intricately linked to its density variable through a Heaviside function, ensuring a seamless transition between solid and void phases. A design-specific pressure field is established by employing Darcy's law, and the associated partial differential equation is solved using finite element analysis. Subsequently, this pressure field is utilized to ascertain consistent nodal loads, enabling an efficient evaluation of load sensitivities through the adjoint-variable method. Moreover, this novel approach incorporates load-dependent structures, frequency constraints, functionally graded material models, and polygonal meshes, expanding its applicability and flexibility to a broader range of engineering scenarios. The proposed methodology's effectiveness and robustness are demonstrated through numerical examples, including fluidic pressure-loaded frequency-constraint structures undergoing small deformations, where compliance is minimized for structures optimized within specified resource constraints.

• Journal of Mechanical Science and Technology
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• v.20 no.4
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• pp.554-560
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• 2006

This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include: (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies.

• Biotechnology and Bioprocess Engineering:BBE
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• v.9 no.2
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• pp.100-106
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• 2004

Micro-fluidics is one of the major technologies used in developing micro-total analytical systems (${\mu}$-TAS), also known as “lab-on-a-chip”. With this technology, the analytical capabilities of room-size laboratories can be put on one small chip. In this paper, we will briefly introduce materials that can be used in micro-fluidic systems and a few modules (mixer, chamber, and sample prep. modules) for lab-on-a-chip to analyze biological samples. This is because a variety of fields have to be combined with micro-fluidic technologies in order to realize lab-on-a-chip.

• Proceedings of the KIEE Conference
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• 2003.10a
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• pp.303-305
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• 2003

In this paper, we have been proposed a new method of multichannel biosensor using random fluidic self-assembly. A metal particle and an array was fabricated. Biomaterials were immobilized on the metal particle. The array and the particles were mixed in a buffer solution, and were arranged by self-assembly. A quarter of total Ni dots were covered by the particles. The binding direction of the particles was controllable, and condition of particles was almost with Au surface on top. The particles were successfully arranged on the array. The biomaterial activities were detected by chemiluminescence.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1521_1522
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• 2009

Chemotaxis is the directed movement of cells in gradients of signaling molecules, an essential biological process that underlies morhpogenesis during development, and the recruitment of immune cells to sites of infection. Especially, bacterial chemotaxis has utilized as an important prelude to study metabolism, prey-predator relationship, symbiosis, other ecological interactions in microbial communities. Recently, novel analytical formats integrated with microfluidics were introduced to investigate the chemotaxis of the cells with the precise control of chemical gradient and small volume of cells. In this study, we present a method to detect bacterial chemotaxis by direct fluidic contacting. The developed fluidic-handling method is driven by capillary force, hydrophobic barrier and a cohesion force between fluids. We have investigated the chemotactic response of E Coli. and Pseudomonas aeruginosa to three kinds of chemoeffectors such as HEPES buffer, peptone and chloroform.

• Journal of Sensor Science and Technology
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• v.17 no.4
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• pp.317-324
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• 2008

This paper presents an optical doppler tomography(ODT) system using a speaker as a method to achieve depth measurement in a flowing sample. The use of the speaker provides easy implementation with a low cost. The nonlinear characteristics of the speaker has hindered its adaptation because it produces inconsistent fringe frequencies at different depths. This paper reports an adaptive algorithm to compensate the nonlinear characteristics, and could, resultantly, acquire the Doppler frequency shift caused by the sample. The experiment utilizes a flowing scattering particle solution in a capillary tube at a certain flow rate. The Doppler frequency profile over the lumen was calculated by using spectrogram method. and we obtained the velocity image of the sample.

• KIEE International Transactions on Electrophysics and Applications
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• v.11C no.2
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• pp.23-27
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• 2001

Microarray-based DNA chips provide an architecture for multi-analyte sensing. In this paper, we report a new approach for DNA chip microarray fabrication. Multifunctional DNA chip microarrays were made by immobilizing many kinds if DNAs on transducers (particles). DNA chip microarrays were prepared by randomly distributing a mixture of the particles on a chip pattern containing thousands of micro meter-scale sites. The particles occupied different sites from array to array. Each particle cam be distinguished by a tag that is established on the particle. The particles were arranged on the chip pattern by the random fluidic self-assembly (RFSA) method, using hydrophobic interaction.