• 대한기계학회논문집
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• 제17권9호
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• pp.2381-2389
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• 1993

In this paper the design and test results of a dynamic flow rate sensor was reported. This sensor comprises an 2-way cartridge valve as standard hydraulic component and a displacement sensor. Its working principle bases on the linear relationship between the flow rate and the piston displacement of 2-way cartridge valves under constant pressure drop. This principle is well known, however it is not easy to develop a flow rate sensor with the measurement range of 300 1/min, pressure loss of less than 8 bar at 300 1/min, maximum linearity error of less than $\pm$1% and the maximum rising time of 10 ms. This paper describes the design procedure of the flow rate sensor, the improvement procedure of static performance and test method and results of dynamic performance.

• Current Optics and Photonics
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• 제6권3호
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• pp.297-303
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• 2022

Multiple fiber Bragg gratings (FBGs) have been proposed and demonstrated for gas-flow measurements in a flow channel, using the temperature-difference method. This sensor consists of two FBG temperature sensors and two coil heaters. Coil heaters are used to heat the FBGs. The flow rate of the gas can be obtained by monitoring the difference in the Bragg-wavelength shifts of the two FBGs, which has features that exclude the effect of temperature fluctuations. In this study, experiments are conducted to measure the wavelength shift based on the flow rate, and to evaluate the gas-flow rate in a gas tube. Experimental results show that the sensor has a linear characteristic over a flow-rate range from 0 to 25 ℓ/min. The measured sensitivity of the sensor is 3.2 pm/(ℓ/min) at a coil current of 120 mA.

• Structural Monitoring and Maintenance
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• 제3권4호
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• pp.335-347
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• 2016

One of major errors in flow rate measurement for two-phase flow using an Electrical Capacitance Sensor (ECS) concerns sensor sensitivity under temperature raise. The thermal effect on electrical capacitance sensor (ECS) system for air-water two-phase flow monitoring include sensor sensitivity, capacitance measurements, capacitance change and node potential distribution is reported in this paper. The rules of 12-electrode sensor parameters such as capacitance, capacitance change, and change rate of capacitance and sensitivity map the basis of Air-water two-phase flow permittivity distribution and temperature raise are discussed by ANSYS and MATLAB, which are combined to simulate sensor characteristic. The cross-sectional void fraction as a function of temperature is determined from the scripting capabilities in ANSYS simulation. The results show that the temperature raise had a detrimental effect on the electrodes sensitivity and sensitive domain of electrodes. The FE results are in excellent agreement with an experimental result available in the literature, thus validating the accuracy and reliability of the proposed flow rate measurement system.

• Journal of Advanced Marine Engineering and Technology
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• 제28권3호
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• pp.531-537
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• 2004

In this paper, the static and dynamic characteristics in the sensor tube of a mass flow controller(MFC) were studied by experiments. In the sensor tube of MFC. the difference of temperature between inlet and outlet was necessary for calculating the mass flow rate. Therefore, the relations among flow rate, heat generated by heating wire. and sensor location were investigated to find optimized condition. Finally, the relation between sensor voltage through analog digital conversion(ADC) and flow rate in the sensor tube can be represented. Based on this study, static and dynamic characteristics of sensor tube can be used for design of mass flow controller.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회B
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• pp.2076-2081
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• 2008

In this study, a new concept of a flow sensor is developed using dielectric barrier discharge (DBD). Current of DBD generated between two electrodes is changed with varying flow rates. Therefore, it is possible to measure the flow rate by correlating generated DBD current with flow rates. The effects of flow rate, frequency, channel height, diameter of electrodes and distance between electrodes on the performance of the flow sensor using DBD are experimentally investigated.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.1783-1788
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• 2004

In the present paper, a micro flow sensor, which can be used at bio-delivery systems and micro heat pumps, is developed. For this, the micro flow sensor is integrated on a quartz wafer ($SiO_2$) and is manufactured by simple and convenient microfabrication processes. The micro flow sensor aims for measuring mass flow rates in the low range of about $0{\sim}20$ SCCM. The micro flow sensor is composed of temperature sensors, a heater, and a flow microchannel. The temperature sensors and the heater are manufactured by the sputtering processes in this study. In the microfabrication processes, stainless steel masks with different patterns are used to deposit alumel and chromel for temperature sensors and nichrome for the heater on the quartz wafer. The microchannel is made of Polydimethylsiloxane(PDMS) easily. A deposited quartz wafer is bonded to the PDMS microchannel by using the air plasma. Finally, we confirmed the good operation of the present micro flow sensor by measuring flow rate.

• 한국항해항만학회지
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• 제32권9호
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• pp.717-722
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• 2008

We have proposed and demonstrated an gas-flow sensor using optical fiber bragg grating(FEG). The flow sensor has no electronics and no mechanical parts in its sensing part and the structure is th11s simple and immune to electromagnetic interference(EMI). The FEG sensor was consisted qf the sensing element and a coil heater. The metal coil was used to supply the current to the FEG. While some currents supply to the coil, the refractive index of the FEG under the coil is changed and thus the wavelength shift of fiber optic sensor was induced In this work, the wavelength shift according to flow-rate was experimentally studied and was used to evaluate the gas flow-rate in a gas tube. As a result, it was possible to measure the flow-rate in a linear range from 5 to $20{\ell}/min$ with a resolution of approximately $1{\ell}/min$ at the applied currents of 100 mA and 120 mA. The measured sensitivities were $15.3\;pm/\ell/min$ for 100 mA and $20.2\;pm/\ell/min$ for 120 mA.

• 동력기계공학회지
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• 제7권3호
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• pp.35-39
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• 2003

In this paper, the heat transfer phenomena in the sensor tube of a mass flow controller(MFC) were studied by experiments. In the sensor tube of MFC, the difference of temperature between inlet and outlet was necessary for calculating the mass flow rate. Therefore, the relations of flow rate, generated heat by heating wire, sensor location and tube thickness were investigated to find the optimized condition. Based on this study, static and dynamic characteristics of sensor can be used for mass flow controller.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.171-172
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• 2011

• 센서학회지
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• 제14권1호
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• pp.22-27
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• 2005

A thermoelectric flow sensor for small quantity of gas flow rate was fabricated using silicon wafer semiconductor process and bulk micromachining technology. Evanohm R alloy heater and chromel-constantan thermocouples were used as a generation heat unit and sensing parts, respectively. The heater and thermocouples are thermally isolated on the $Si_{3}N_{4}/SiO_{2}/Si_{3}N_{4}$ laminated membrane. The characteristics of this sensor were observed in the flow rate range from 0.2 slm to 1.0 slm and the heater power from 0.72 mW to 5.63 mW. The results showed that the sensitivities $(({\partial}({\Delta}V)/{\partial}(\dot{q}));{\;}{\Delta}V$ : voltage difference, $\dot{q}$ : flow rate) were increased in accordance with heater power rise and decreasing of flow rate.