• Proceedings of the KIEE Conference
• /
• 2002.07c
• /
• pp.1979-1981
• /
• 2002

새로운 방식의 일체형 flexible sensor module을 제작하였다. MEMS공정을 이용하여 제작된이 센서 모듈은 배선기판은 물론 strain sensor 역시 임의의 곡면에 실장을 위해 자유로운 굽힘이 가능하도록 제작되었다. 실리콘웨이퍼에 구현된 piezoresistor 스트레인 센서는 release-etch 방법을 통해 웨이퍼로부터 분리되어, 폴리이미드를 기판으로 하는 Flexible Sensor Array Module로 완성되었다. 소자와 기판을 따로 제작한 후 조립하는 기존의 방식에 비해, 웨이퍼 위에서 flexible 기판을 형성하여 수율이 높고 사진공정의 정밀도를 그대로 보전한 기판과 센서 어레이의 패키징이 가능하였으며, 칩을 기판에 실장하기 위한 정밀한 조립공정도 불필요하였다. 폴리이미드 기판은 전기도금을 통해 회로를 구성하여 1단계 패키징 (die to chip carrier)과 2단계 패키징 (chip to substrate)을 웨이퍼 레벨에서 완성하였다. 마지막으로 불산 용액을 통해 희생층을 제거함으로서 웨이퍼로 부터 센서어레이 모듈을 분리 하였다.

• Proceedings of the International Microelectronics And Packaging Society Conference
• /
• 2002.05a
• /
• pp.74-78
• /
• 2002

MEMS공정을 이용하여 폴리실리콘의 piezoresistivity를 이용한 스트레인 센서어레이를 제작하였고, 이 센서 어레이를 flexible substrate에 패키징하는 공정을 개발하였다. 실리콘 웨이퍼에 표면 가공(surface micromachining)된 센서는 폴리이미드 코팅, release-etch 방법을 통해 웨이퍼로부터 분리되어 폴리이미드를 기판으로 하는 flexible sensor array module을 완성할 수 있었다. 공정은 희생층과 절연층을 증착하고 폴리실리콘 0.5 $\mu\textrm{m}$을 증착, 도핑 및 패터닝하여 센서 어레이를 구성하였다. 이 센서어레이를 flexible substrate에 패키징 하기 위해서 폴리이미드를 코팅하여 15 $\mu\textrm{m}$의 막을 구성하였고, 100% $O_2$RIE를 이용한 선택적 식각 방법으로 via hole을 구성하였다. 이후 전기도금을 통해 회로를 구성하여 1단계 패키징(die to chip carrier)과 2단계 패키징(chip to substrate)을 웨이퍼 레벨에서 완성하였다. 희생층을 제거함으로서 웨이퍼로부터 센서어레이 모듈을 분리하였다. 제작되어진 센서 모듈은 임의의 곡면에 실장이 가능하도록 충분한 flexibility를 얻을 수 있었다.

• Journal of Semiconductor Engineering
• /
• v.1 no.3
• /
• pp.88-98
• /
• 2020

As biosensors are widely used in the medical field, flexible devices compatible with live animals have aroused great interest. Especially, significant research has been carried out to develop implantable or skin-attachable devices for real-time bio-signal sensing. From the device point of view, various biosensor types such as field-effect transistors (FETs) and multi-electrode arrays (MEAs) have been reported as diverse sensing strategies. In particular, the flexible FETs and MEAs allow semiconductor engineering to expand its application, which had been impossible with stiff devices and materials. This review summarizes the state-of-the-art research on flexible FET and MEA biosensors focusing on their materials, structures, sensing targets, and methods.

• International Journal of Aeronautical and Space Sciences
• /
• v.18 no.2
• /
• pp.245-254
• /
• 2017

In this paper, deployment dynamics of large-scale flexible solar arrays with deployable mast is investigated. The adopted solar array system is introduced firstly, then kinematic description and kinematic constraint equations are deduced, and finally, dynamics equation of the system is established by the Jourdain velocity variation principle and a new method to deal with topology changes of the deployable mast is introduced. The dynamic behavior of the system is studied in detail. Simulation results indicate that the proposed model is effective to describe the deployment dynamics of the solar arrays and that the introduced method is applicable for topology changes.

• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.17 no.6 s.123
• /
• pp.498-506
• /
• 2007

Using wind tunnel, experimental approaches were employed to investigate fluidelastic instability of tube bundles, subjected to uniform cross flow. There are several flow-induced vibration excitation mechanisms, such as fluidelastic instability, periodic wake shedding resonance, turbulence-induced excitation and acoustic resonance, which could cause excessive vibration in shell-and tube heat exchanges. Fluidelastic is the most important vibration excitation mechanism for heat exchanger tube bundles subjected to cross flow. The system comprised of cantilevered flexible cylinder(s) and rigid cylinders of normal square array, In order to see the characteristics of flow in tube bundles, particle image velocimetry was used. From a practical design point of view, Fluidelastic instability may be expressed simply in terms of dimensionless flow velocity and dimensionless mass-damping. The threshold flow velocity for dynamic instability of cylinder rows is evaluated and the data for design guideline is proposed for the tube bundles of normal square array.

• Journal of Positioning, Navigation, and Timing
• /
• v.11 no.2
• /
• pp.91-98
• /
• 2022

In the next generation wireless communication system, the beamforming technique based on a massive antenna is one of core technologies for transmitting and receiving huge amounts of data, efficiently and accurately. For highly performed and highly reliable beamforming, it is required to accurately estimate the Angle of Arrival (AOA) for the desired signal incident to an antenna. Employing the massive antenna with a large number of elements, although the accuracy of the AOA estimation is enhanced, its computational complexity is dramatically increased so much that real-time communication is difficult. In order to improve this problem, AOA estimation algorithms based on the massive antenna with the low computational complexity have been actively studied. In this paper, we compute and analyze the computational complexity of the cascade AOA estimation algorithm based on the Flexible Massive Concentric Circular Array (FMCCA). In addition, its computational complexity is compared to conventional AOA estimation techniques such as the Multiple Signal Classification (MUSIC) algorithm with the high resolution and the Only Beamspace MUSIC (OBM) algorithm.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2016.02a
• /
• pp.372.1-372.1
• /
• 2016

Recently, there are a lot of diseases all around the world. Out of them, Atherosclerosis (AS) is the most common cause of stroke, cardiovascular mortality, and myocardial infarction. The macrophage-derived foam cell, which is formed by oxidized low-density lipoprotein (oxLDL), is the crucial marker for AS. In this study, we report a label-free capacitance imaging technique with multi-electrode array (MEA). The lipid-rich aorta arch lesions, which are derived from an apolipoprotein-E receptor-deficient (apoE-/-) mouse, exhibit higher capacitance than the lipid-free aorta arch, allowing the capacitance imaging of lipid region in atherosclerosis. To improve the contacts between MEA and tissue, polypyrrole(PPy)-coated multi walled carbon nanotubes (MWNTs) multi electrode array (PPy-MWNTs-MEA) was fabricated. Compared to TiN-MEA, PPy-MWNTs-MEA yielded lower contact impedance and better capacitance images. In addition, we have also developed a flexible MEA using single walled carbon nanotubes on a PET substrate. The lipid region could be discriminated in the capacitance images of the lipid-rich aorta arch lesions measured using flexible MEA, demonstrating a feasibility of in vivo applications.

• Smart Structures and Systems
• /
• v.9 no.6
• /
• pp.535-547
• /
• 2012

Controlling the balance of motion in a context involving a biped robot navigating a rugged surface or a step is a difficult task. In the present study, a $3{\times}5$ flexible piezoelectric tactile sensor array is developed to provide a foot pressure map and zero moment point for a biped robot. We introduce an innovative concept involving structural electrodes on a piezoelectric film in order to improve the sensitivity. The tactile sensor consists of a polymer piezoelectric film, PVDF, between two patterned flexible print circuit substrates (FPC). Additionally, a silicon rubber bump-like structure is attached to the FPC and covered by a polydimethylsiloxane (PDMS) layer. Experimental results show that the output signal of the sensor exhibits a linear behavior within 0.2 N ~ 9 N, while its sensitivity is approximately 42 mV/N. According to the characteristic of the tactile sensor, the readout module is designed for an in-situ display of the pressure magnitudes and distribution within $3{\times}5$ taxels. Furthermore, the trajectory of the zero moment point (ZMP) can also be calculated by this program. Consequently, our tactile sensor module can provide the pressure map and ZMP information to the in-situ feedback to control the balance of moment for a biped robot.

• Korean Journal of Materials Research
• /
• v.32 no.11
• /
• pp.508-514
• /
• 2022

Piezoelectric composite films which are enabled by inorganic piezoelectric nanomaterials-embedded polymer, have attracted enormous attention as a sustainable power source for low powered electronics, because of their ease of fabrication and flexible nature. However, the absorption of applied stress by the soft polymeric matrices is a major issue that must be solved to expand the fields of piezoelectric composite applications. Herein, a flexible and porous piezoelectric composite (piezoelectric sponge) comprised of BaTiO₃ nanoparticles and polydimethylsiloxane was developed using template method to enhance the energy conversion efficiency by minimizing the stress that vanishes into the polymer matrix. In the porous structure, effective stress transfer can occur between the piezoelectric active materials in compression mode due to direct contact between the ceramic particles embedded in the pore-polymer interface. The piezoelectric sponge with 30 wt% of BaTiO₃ particles generated an open-circuit voltage of ~12 V and a short-circuit current of ~150 nA. A finite element method-based simulation was conducted to theoretically back up that the piezoelectric output performance was effectively improved by introducing the sponge structure. Furthermore, to demonstrate the feasibility of pressure detecting applications using the BaTiO₃ particles-embedded piezoelectric sponge, the composite was arranged in a 3 × 3 array and integrated into a single pressure sensor. The fabricated sensor array successfully detected the shape of the applied pressure. This work can provide a cost-effective, biocompatible, and structural strategy for realizing piezoelectric composite-based energy harvesters and self-powered sensors with improved energy conversion efficiency.

• Journal of Biomedical Engineering Research
• /
• v.19 no.5
• /
• pp.519-530
• /
• 1998

In this paper, the basic study on the design of the flexible keel of the energy-storage prosthetic foot was performed in order to Improve the walking performance and Increase the activities of the below knee amputees. Based on the analysis of the anthropometric data and the normal gait on two dimensional sagittal plane available In the literature, we presented a model of the basic structure of the flexible keel of the prosthetic foot. The model of the basic structure was composed of the simple beams, and linear rotational spring and damper. Laminated carbon fiber-reinforced composites were selected as the material of the basic structure model of the flexible keel In order to apply the high strength and light weight materials to the basic structure of the flexible keel of the prosthetic foot. The recoverable strain energy In response to the change of beam shape was calculated bur the finite element analysis and it was suggested that the change of beam shape could be the design variable in flexible keel design. The simulation process was systematically designed by using orthogonal array table in order to design the flexible keel structure which could store the more recoverable strain energy. finite element analysis was carried but according to the design of simulations by using the finite element program ABAQUS and the flexible keel structure of the energy-storage prosthetic foot was obtained from the analysis of variance(ANOVA). The dynamic simulation model of the prosthetic walking using the flexible keel structure was made and the dynamic analysis was carried but during one walk cycle. Based on the above results, an effective design process was presented for the development of the prosthetic fool system.