• Journal of the Institute of Convergence Signal Processing
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• v.7 no.3
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• pp.122-129
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• 2006

We propose the Fizeau-type phase shifting interferometer(FPSI) system for the performance test of high-order aspheric lenses. The proposed system is divided into two parts : optical part and signal processing part. Those two parts are operated by a program for hardware control. We also developed an analysis program adopting the phase shifting algorithm to analyze the obtained interferograms. We can confirm that the proposed system is efficient and adequate by direct comparison with the standard criterion in Mark IV interferometric system of Zygo. The peak-to-valley and RMS values of surface errors which are used to characterize high-order aspheric lenses are 0.845 wave and 0.1871 wave, respectively. The measurement errors between the proposed system and Mark IV are less than ${\lambda}/100$ and the repeatability is also calculated at less than ${\lambda}/100$.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1589_1590
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• 2009

본 논문에서는 구면 렌즈 검사를 위해 제작된 Fizeau형 위상 천이 간섭계(Fizeau-type Phase Shifting Interferometer : FPSI)에 비구면 해석 알고리즘을 적용한 소형 비구면 렌즈 해석 방법을 제안한다. 또한 본 논문에서 제안한 방법의 측정 결과와 기존 비구면 검사 시스템의 측정 결과를 비교하여 그 성능을 평가한다.