• 한국재료학회지
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• 제12권6호
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• pp.508-512
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• 2002

$2000{\AA}-SiO_2/Si(100)$ and $560{\AA}-Si_3N_4/Si(100)$ wafers, which are 10 cm in diameter, were directly bonded using a rapid thermal annealing method. We fixed the anneal time of 30 second and varied the anneal temperatures from 600 to $1200^{\circ}C$. The bond strength of bonded wafer pairs at given anneal temperature were evaluated by a razor blade crack opening method and a four-point bonding method, respectively. The results clearly slow that the four-point bending method is more suitable for evaluating the small bond strength of 80~430 mJ/$\m^2$ compared to the razor blade crack opening method, which shows no anneal temperature dependence in small bond strength.

• International Journal of Naval Architecture and Ocean Engineering
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• 제8권5호
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• pp.456-465
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• 2016

In order to optimize the performance of a Wells turbine with fixed guide vanes, the designs of an end plate and a ring on the tip of the turbine rotor are proposed as penetrating blade tip treatments. In this study, numerical investigations are made using computational fluid dynamics (CFD)-based ANSYS Fluent software, and validated by corresponding experimental data. The flow fields are analyzed and non-dimensional coefficients $C_A$, $C_T$ and ${\eta}$ are calculated under steady-state conditions. Numerical results show that the stalling phenomenon on a ring-type Wells turbine occurs at a flow coefficient of ${\phi}=0.36$, and its peak efficiency can reach 0.54, which is 16% higher than that of an unmodified turbine and 9% higher than in the case of an endplate-type turbine. In addition, quasi-steady analysis is used to calculate the mean efficiency and output work of a wave cycle under sinusoidal flow conditions. As a result, it has been found that the ring-type turbine is superior to other types of Wells turbines.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 1998년도 강연회 및 연구개발 발표회 논문집
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• pp.128-135
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• 1998

Procedures and results of aerodynamic design of a centrifugal compressor are presented for development of a 40kW class turbogenerator gas turbine. Specification of higher level of total pressure ratio of 4 and total efficiency of $80\%$ requires advanced methods of design and analysis. In the meanline design/analysis, a method with conventional loss modeling and a method with the two-zone model are alternately used for more reliable prediction. In the impeller blade generation, a series of Bezier curve are combined to produce meridional contours and distributions of blade camber angle and blade thickness. Intermediate profiles of blades are repeatedly produced and changed to be finally fixed through quasi-three dimensional Euler flow analysis. Three dimensional compressible turbulent flow analysis is then performed for the impeller to be confirmed in the final step of design. Satisfactory results in the aerodynamic performance are obtained, which assures that there is no need of aerodynamic re-design.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2001년도 춘계 학술대회논문집
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• pp.1-8
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• 2001

A CFD-based design method for transonic axial compressor blades was developed based on three-dimensional Navier-Stokes flow physics. The method employs a sectional three-dimensional (S3D) analysis concept where the three-dimensional flow analysis is performed on the grid plane of a span station with spanwise flux components held fixed. The S3D analysis produced flow solutions nearly identical to those of three-dimensional analysis, regardless of the initialization of the flow field. The sectional design based on the S3D analysis can include three-dimensional effects of compressor flows and thus overcome the deficiencies associated with the use of quasi-three-dimensional flow physics in conventional sectional design. The S3D design was first used in the inverse triode to find the geometry that produces a specified target pressure distribution. The method was also applied to optimize the adiabatic efficiency of the blade sections of Rotor 37. A new blade was constructed with the optimized sectional geometries at several span stations and its aerodynamic performance was evaluated with three-dimensional analyses.

• 제어로봇시스템학회논문지
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• 제8권5호
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• pp.419-424
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• 2002

After the patterning and probe process of wafer have been achieved, the dicing processing is necessary to separate chips from a wafer. The dicing process cuts a semiconductor wafer to lengthwise and crosswise directions to make many chips. The existing general dicing method is the mechanical cutting using a narrow circular rotating blade impregnated diamond particles or laser cutting. Inferior goods can be made by the mechanical or laser cutting unless several parameters such as blade, wafer, cutting water and cutting conditions are properly set. Moreover, we can not apply these general dicing method to that of GaN wafer, because the GaN wafer is harder than general semiconductor wafers such as GaAs, GaAsP, AIGaAs and so forth. In order to overcome these problems, this paper describes a new wafer dicing method using fixed diamond scriber and precision servo mechanism.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2009년도 하계학술발표대회 논문집
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• pp.1203-1208
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• 2009

In this paper, the flow characteristics of the mixed-flow pump impellers and diffusers were numerically predicted by commercial CFD software and DOE(design of experiments). We also discussed how to improve the performance of the mixed-flow pump by designing the impeller and diffuser in the mixed-flow pump. Geometric design variables were defined by the vane plane development which indicates the blade-angle distributions and length of the impeller and the diffusers. Firstly, the design optimization of the defined impeller geometric variables has been done. After that, the flow characteristics were analyzed in the point of incidence angle at the diffuser leading edge for the optimized impeller. Then design of the defined diffuser shape variables has been performed. The reason for the performance improvement was discussed by examining the flow characteristics through the diffuser.

• 대한기계학회논문집A
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• 제27권8호
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• pp.1309-1316
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• 2003

The general dicing process cuts a semiconductor wafer to lengthwise and crosswise direction by using a rotating circular diamond blade. But products with inferior quality are produced under the influence of several parameters in dicing process such as blade, wafer, cutting water and cutting conditions. Moreover we can not apply this dicing method to GaN wafer, because the GaN wafer is harder than the other wafer such as SiO2, GaAs, GaAsP, and AlGaAs. In order to overcome this problem, development of a new dicing process and determination of dicing parameters are necessary. This paper describes a new wafer dicing method using fixed diamond scriber and precision servo mechanism and determination of several parameters - scribing depth, scribing force, scriber inclined angle, scribing speed, and factor for scriber replacement - for a new dicing machine using scriber.

• 대한기계학회논문집
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• 제19권9호
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• pp.2261-2270
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• 1995

Flow patterns were measured in an unshrouded centrifugal impeller. The flow rate in measurements was fixed at the value corresponding to a nearly zero incidence at the blade inlet. By using a single slanted hot-wire probe and a Kiel probe mounted on the impeller hub disk, the 3-D relative velocities and the rotary stagnation pressures were measured in seven circumferential planes from the inlet to the outlet of the impeller rotating at 700rpm, which diameter is 0.39 meter, and the static pressures and the slip factor at the impeller outlet were calculated from the measured values. From the measured data, the primary/secondary flows, the leakage flows, the wake-jet flows, static pressure distribution on blade surfaces and the wake production mechanism in the impeller passage were investigated.

• 한국에너지공학회:학술대회논문집
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• 한국에너지공학회 1994년도 추계학술발표회 초록집
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• pp.51-58
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• 1994

가스터빈 발전은 연료를 연소하여 연소가스로 직접 터빈을 회전시켜 터빈에 연결된 발전기에 의해 발전하는 방식으로 연료로는 중유, 원유, 경유, 가스등을 사용한다. 주요설비는 공기압축기, 연소기, 터빈 및 발전기로 구성되며 이중 고온부는 연소기와 터빈이다. 가스터빈의 효율은 터빈입구온도(TIT : TBN INLET TEMP)에 의존하는데 현재까지 약 1,30$0^{\circ}C$ 급의 가스터빈이 운전중이며 앞으로 1,50$0^{\circ}C$ 급의 고효율 가스터빈에 도전하고 있으며 연소가스의 고온화는 고온부의 재료개발, 냉각기술, 코팅기법의 향상과 더불어 이루어질 수 있다. 가스터빈의 고온부 부품인 연소기, 터빈의 동익(Moving blade) 및 정익(Fixed blade) 재료로 초내열합금이 계속 개발중이며 또한 각 부품에 대한 공기냉각기술, 코팅재료 및 기법도 개발중이다. 그러나 현재 국내에서 가동중인 가스터빈은 빈번한 기동정지로 열 사이클에 의한 부품의 손상이 심각한 실정이므로 고효율 가스터빈 개발과 이에 대한 정비기술 개발이 병행하여야만 안정된 전기공급을 이룰 수 있다는 차원에서 가스터빈은 고온부품의 정비기술에 대한 그 현황과 전망에 대해 살펴보고자 한다.

• 한국자동차공학회논문집
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• 제24권1호
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• pp.74-81
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• 2016

The aim of this study was to find the initial design value of turbine blade for electrical type turbocompound system generating 10 kW. Turbocompound is one of the waste heat recovery system applying to internal combustion engine to recover exhaust gas energy that was about 30 % of total input energy. To design the turbine blade, 1-D mean line flow model was used. Exhaust gas temperature, pressure, flow rate and turbine rotating speed was fixed as primary boundary conditions. The velocity triangles was defined and used to determine the rotor inlet radius and width, the rotor outlet radius at shroud and radius at hub, the rotor flow angles and the number of blades.