• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.146-147
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• 2011

Processing a large area substrate for liquid crystal display (LCD) or solar panel applications in a capacitively coupled plasma (CCP) reactor is becoming increasingly challenging because of the size of the substrate size is no longer negligible compared to the wavelength of the applied radio frequency (RF) power. The situation is even worse when the driving frequency is increased to the Very High Frequency (VHF) range. When the substrate size is still smaller than 1/8 of the wavelength, one can obtain reasonably uniform process results by utilizing with methods such as tailoring the precursor gas distribution by adjustingthrough shower head hole distribution or hole size modification, locally adjusting the distance between the substrate and the electrode, and shaping shower head holes to modulate the hollow cathode effect modifying theand plasma density distribution by shaping shower head holes to adjust the follow cathode effect. At higher frequencies, such as 40 MHz for Gen 8.5 (2.2 m${\times}$2.6 m substrate), these methods are not effective, because the substrate is large enough that first node of the standing wave appears within the substrate. In such a case, the plasma discharge cannot be sustained at the node and results in an extremely non-uniform process. At Applied Materials, we have studied several methods of modifying the standing wave pattern to adjusting improve process non-uniformity for a Gen 8.5 size CCP reactor operating in the VHF range. First, we used magnetic materials (ferrite) to modify wave propagation. We placed ferrite blocks along two opposing edges of the powered electrode. This changes the boundary condition for electro-magnetic waves, and as a result, the standing wave pattern is significantly stretched towards the ferrite lined edges. In conjunction with a phase modulation technique, we have seen improvement in process uniformity. Another method involves feeding 40 MHz from four feed points near the four corners of the electrode. The phase between each feed points are dynamically adjusted to modify the resulting interference pattern, which in turn modulate the plasma distribution in time and affect the process uniformity. We achieved process uniformity of <20% with this method. A third method involves using two frequencies. In this case 40 MHz is used in a supplementary manner to improve the performance of 13 MHz process. Even at 13 MHz, the RF electric field falls off around the corners and edges on a Gen 8.5 substrate. Although, the conventional methods mentioned above improve the uniformity, they have limitations, and they cannot compensate especially as the applied power is increased, which causes the wavelength becomes shorter. 40 MHz is used to overcome such limitations. 13 MHz is applied at the center, and 40 MHz at the four corners. By modulating the interference between the signals from the four feed points, we found that 40 MHz power is preferentially channeled towards the edges and corners. We will discuss an innovative method of controlling 40 MHz to achieve this effect.

• Journal of Korean Neurosurgical Society
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• v.49 no.4
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• pp.212-216
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• 2011

Objective : It is well known that plate-to-disc distance (POD) is closely related to adjacent-level ossification following anterior cervical plate placement. The study was undertaken to compare the outcomes of two different anterior cervical plating methods for degenerative cervical condition. Specifically, the new method involves making holes for plate screws first with an air drill and then choosing a plate size. The other method was standard, that is, decide on the plate size first, locate the plate on the anterior vertebral body, and then drilling the screw holes. Our hypothesis was that the new technical tip may increase POD as compared with the standard anterior cervical plating procedure. Methods : We retrospectively reviewed 49 patients who had a solid fusion after anterior cervical arthrodesis with a plate for the treatment of cervical disc degeneration. Twenty-three patients underwent the new anterior cervical plating technique (Group A) and 26 patients underwent the standard technique (Group B). POD and ratios between POD to anterior body heights (ABH) were measured using postoperative lateral radiographs. In addition, operating times and clinical results were reviewed in all cases. Results : The mean durations of follow-up were $16.42{\pm}5.99$ (Group A) and $19.83{\pm}6.71$ (Group B) months, range 12 to 35 months. Of these parameters mentioned above, cephalad POD (5.43 versus 3.46 mm, p=0.005) and cephalad POD/ABH (0.36 versus 0.23, p=0.004) were significantly greater in the Group A, whereas operation time for two segment arthrodesis (141.9 versus 170.6 minutes, p=0.047) was significantly lower in the Group A. There were no significant difference between the two groups in caudal POD (5.92 versus 5.06 mm), caudal POO/ABH (0.37 versus 0.32) and clinical results. Conclusion : The new anterior cervical plating method represents an improvement over the standard method in terms of cephalad plate-to-disc distance and operating time.

• The Bulletin of The Korean Astronomical Society
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• v.36 no.2
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• pp.61.1-61.1
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• 2011

We have performed simultaneous observations at 22GHz and 43GHz on AGNs hosted by elliptical galaxies using KVN radio telescope. We have constructed the sample, based on two major surveys in radio and optical band, i.e. Faint Images of the Radio Sky at Twenty-Centimeters (FIRST) and Sloan Digital Sky Survey (SDSS) DR7, respectively. We restricted the redshift range 0.01 < z < 0.06 and the absolute magnitude Mr < -19.4 in order to satisfy volume limited sample. We also checked clear detection of four distinctive emission lines ([NII], [OIII], $H{\alpha}$, $H{\beta}$) so as to utilize on BPT diagram, distinguishing AGNs from star-forming galaxies. Elliptical galaxies have been selected by visual inspection making use of SDSS optical images. Then, we cross-matched the elliptical galaxies with FIRST detections. About 35% of the galaxies have been detected throughout KVN observations. We derive spectral index, applying the flux of different radio frequencies from FIRST (1.4GHz) and KVN (22GHz) and classify into steep, flat or inverted spectrum. We have found that most of the detected galaxies have flat spectrum while the rest of them have steep spectrum. This implies that a number of detected galaxies might have compact structure associated with the central region of the galaxies. The relation between black hole mass and radio luminosity has shown relatively tighter correlation in high frequency than in low frequency, which confirms that high frequency in radio band is appropriate to study the center of the galaxies.

• ETRI Journal
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• v.15 no.3
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• pp.61-69
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• 1994

A new analytical model for the base current of Si/SiGe/Si heterojunction bipolar transistors(HBTs) has been developed. This model includes the hole injection current from the base to the emitter, and the recombination components in the space charge region(SCR) and the neutral base. Distinctly different from other models, this model includes the following effects on each base current component by using the boundary condition of the excess minority carrier concentration at SCR boundaries: the first is the effect of the parasitic potential barrier which is formed at the Si/SiGe collector-base heterojunction due to the dopant outdiffusion from the SiGe base to the adjacent Si collector, and the second is the Ge composition grading effect. The effectiveness of this model is confirmed by comparing the calculated result with the measured plot of the base current vs. the collector-base bias voltage for the ungraded HBT. The decreasing base current with the increasing the collector-base reverse bias voltage is successfully explained by this model without assuming the short-lifetime region close to the SiGe/Si collector-base junction, where a complete absence of dislocations is confirmed by transmission electron microscopy (TEM)[1].The recombination component in the neutral base region is shown to dominate other components even for HBTs with a thin base, due to the increased carrier storage in the vicinity of the parasitic potential barrier at collector-base heterojunction.

• Explosives and Blasting
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• v.30 no.2
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• pp.77-85
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• 2012

This is the study about continuous explosives demolition to Han Kuk Flour Mills Silo(14 units) located in Mokpo. Considering the surroundings, We planned to collapse toward longitudinal direction of the silo. It had a lot of blast hole per silo in confined space. It could make lots of problems like Cut-off, collapse behavior, fragmentation after structure behavior. So we separated 14 units silo to two section for blast twice. At the first A-Section blast, there was Cut-off of detonating cord and we had to blast twice to collapse remained silo. After that the secondary B-Section blasting, we got the desired result of collapse behavior.

• The Bulletin of The Korean Astronomical Society
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• v.40 no.1
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• pp.43.2-43.2
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• 2015

The massive limit of black holes (BHs) is observed as present day ten billion solar masses. We search for observational signatures of BHs that become extremely massive (EMBHs, 1-10 billion solar masses). I will report on the evolution of active galactic nuclei (AGNs) through the growth of BH mass and their dust emission strength. First, we measured 26 EMBH masses of quasars at 1

• 제어로봇시스템학회:학술대회논문집
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• 1996.10a
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• pp.1-7
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• 1996

This paper addresses the control problem of a mobile robot supporting a task robot with needs to be positioned precisely. The main difficulty residing in the precise control of a mobile robot supporting a task robot is providing an accurate and stable base for the task robot. That is, the end-plate of the mobile robot which is the base of the task robot can not be positioned accurately without external position sensors. This difficulty is resolved in this paper through the vision information obtained from the camera attached at the end of a task robot. First of all, the camera parameters were measured by using the images of a fixed object captured by the camera. The measured parameters include the rotation, the position, the scale factor, and the focal length of the camera. These parameters could be measured by using the features of each vertex point for a hexagonal object and by using the pin-hole model of a camera. Using the measured pose(position and orientation) of the camera and the given kinematics of the task robot, we calculate a pose of the end-plate of the mobile robot, which is used for the precise control of the mobile robot. Experimental results for the pose estimations are shown.

• JSTS:Journal of Semiconductor Technology and Science
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• v.1 no.1
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• pp.40-49
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• 2001

We have developed a repeatable process of forming uniform, small-size and high-density self-assembled Si nano-crystals. The Si nano-crystals were fabricated in a conventional LPCVD (low pressure chemical vapor deposition) reactor at $620^{\circ}c$ for 15 sec. The nano-crystals were spherical shaped with about 4.5 nm in diameter and density of $5{\times}l0^{11}/$\textrm{cm}^2$. More uniform dots were fabricated on nitride film than on oxide film. To take advantage of the above-mentioned characteristics of nitride film while keeping the high interface quality between the tunneling dielectrics and the Si substrate, nitride-oxide tunneling dielectrics is proposed in n-channel device. For the first time, the single electron effect at room temperature, which shows a saturation of threshold voltage in a range of gate voltages with a periodicity of ${\Delta}Ｖ_{GS}\;{\approx}\;1.7{\;}V$, corresponding to single and multiple electron storage is reported. The feasibility of p-channel nano-crystal memory with thin oxide in direct tunneling regime is demonstrated. The programming mechanisms of p-channel nano-crystal memory were investigated by charge separation technique. For small gate programming voltage, hole tunneling component from inversion layer is dominant. However, valence band electron tunneling component from the valence band in the nano-crystal becomes dominant for large gate voltage. Finally, the comparison of retention between programmed holes and electrons shows that holes have longer retention time.

• Korean Journal of Computational Design and Engineering
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• v.10 no.4
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• pp.254-261
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• 2005

The purpose of this research is to develop a method for cutting non-circular holes on a bent thick plate. Generally in order to cut the holes on the large plates, a special-purpose 5-axis machine is needed. However, such a machine is unavailable in most of the machine shops. This paper provides a description of such a method that utilizes a general-purpose 5-axis water-jet machine in place of the special-purpose machine: First, the bent piece is transformed into a flat plate, where the shape of the holes is reconstructed by considering deformation during bending. Then, after a 5-axis NC data is generated, the holes on the flat plate are cut using the 5-axis water-jet machine. The final step is to return to its, original shape by bending the plate with its newly-cut holes. The proposed methodology is implemented as a dedicated system by customizing a commercial CAD/CAM system. Some illustrations are provided throughout the paper in order to show the validity of the proposed methods and the developed system.

• Proceedings of the KSME Conference
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• 2001.06d
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• pp.840-845
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• 2001

Development of a small gas-turbine combustor for 100kW class APU(Auxiliary Power Unit) has been performed. This combustor is a reverse-annular type and has a tangential swirler in the liner head to improve the fuel/air mixing and flame stability. Three main and three pilot fuel injectors of the simplex pressure-swirl type are used. The performance target at the design condition includes a turbine inlet temperature of 1170K, a combustion efficiency of 99%, a pattern factor of 30%, and an engine durability of 3000 hours. Under developing the combustor, we conducted performance test of our first prototype(TS1) with some variants. As a result of the test, the performance targets of the combustor are satisfied except that the pattern factor is about 4% higher than target value. So, we redesigned the second prototype(TS2) and conduct performance test with the critical focus on pattern factor and exit mean temperature. We adopted TS2 four variant to check the improvement of pattern factor. As the result, the pattern factors of several variants were satisfied with the performance target. Finally, We chose the TS2A variant as a final combustor for our APU model.