• Journal of the Korean Society for Precision Engineering
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• v.21 no.3
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• pp.147-154
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• 2004

This paper presents a procedure for analysis and design of a fine positioning stage, which has many applications in industries for machine tools, semiconductor, LCD and so forth. The stage considered here is based on a single module with 3 axes which is composed of flexures hinges, piezoelectric actuators and their peripherals. Through a series of analysis, the structural analysis model is simplified as a rigid body(the moving part) and springs(the flexures hinges). An experimental design procedure is applied to determine the dimension of flexures hinges. A sensitivity analysis on the notch positions is also performed to obtain a guideline of fabrication accuracy for the stage. An actual fine stage is made and verified through an experiment on the dynamic characteristics.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.32-37
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• 2007

This paper proposes a dual-mode ultra precision positioning system for machine tools and measuring machines. The objective was to position a machine table with a picometer order of resolution, i.e., pico-positioning. A twist-roller friction drive (TFD) was used in coarse-mode positioning. The TFD, which was driven by an AC servomotor, is a kind of lead screw in mechanical terms, and several centimeters of machine table movement was controlled with a nanometer order of positioning resolution. To eliminate lateral vibration caused by the TFD, an active aerostatic coupling driven by piezoelectric actuators was inserted between the TFD and the machine table. This active aerostatic coupling was also applied as a feed drive device for fine-mode positioning; in the fine mode, the positioning resolution was 50 pm. Factors influencing pico-positioning, such as how noise from displacement sensors and vibrations in the aerostatic guideway affect positioning resolution, are discussed.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.12
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• pp.163-170
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• 2002

The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.

• Journal of Positioning, Navigation, and Timing
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• v.11 no.1
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• pp.11-21
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• 2022

Fast Fourier transform (FFT)-based parallel acquisition techniques with reduced computational complexity have been widely used for the acquisition of binary phase shift keying (BPSK) global positioning system (GPS) signals. In this paper, we propose a low computational FFT-based fine acquisition technique, for binary offset carrier (BOC) modulated BPSK signals, that depending on the subcarrier-to-code chip rate ratio (SCR) selectively utilizes the computationally efficient frequency-domain realization of the BPSK-like technique and two-dimensional compressed correlator (BOC-TDCC) technique in the first stage in order to achieve a fast coarse acquisition and accomplishes a fine acquisition in the second stage. It is analyzed and demonstrated that the proposed technique requires much smaller mean fine acquisition computation (MFAC) than the conventional FFT-based BOC acquisition techniques. The proposed technique is one of the first techniques that achieves a fast FFT-based fine acquisition of BOC signals with a slight loss of detection probability. Therefore, the proposed technique is beneficial for the receivers to make a quick position fix when there are plenty of strong (i.e., line-of-sight) GNSS satellites to be searched.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.7
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• pp.26-31
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• 1995

A new actuating mechanism suitable for a micro positioning device is developed using piezo-electric elements. The actuator can make a step movement of 0.5 .mu. m up to 3.5 .mu. m. The step size can be adjusted on demand. By repeating this step action, long distance movement is achieved. Precise positioning can be obtained by combining the coarse motion with the maximum step size and fine motion. Two types of fine motion have been proposed for a driving method. Firstly, feedback control bases on PID is applied. The experimental results for the two method are presented.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.11
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• pp.199-207
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• 1998

This paper presents the design and the control of three degree-of-freedom(DOF) fine positioning device based on an electro-magnetic force. The device is designed by use of a magnetic circuit theory and it is capable of fine motion due to the electro-magnetic force. The device consists of permanent magnets, yokes and coils. The magnetic fluxes generated from the permanent magnets constitute magnetic paths through steel, whereas the coils are arranged into the gap between two surfaces of the yokes. Therefore, by supplying current to the coils, the coils are capable of some motions due to Lorentz forces. For the optimal design of the actuating system, the system parameters are defined and investigated under the given constraints. From the system modeling in small displacement, three decoupled equations of motion are obtained. To get better performance of the system, a PID controller is implemented. Experimental results are presented in terms of time response and accuracy.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1309-1314
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• 2003

The high precision positioning mechanism is used in various industrial fields. It is used in semiconductor manufacturing line, test instrument, Bioengineering, and MEMS and so on. This paper presents a positioning mechanism with dual servo system. Dual servo system consists of a coarse stage and a fine motion stage. The course stage is driven by VCM and the actuator of fine stage is the PZT. The purposes of dual servo system are stability, higher bandwidth, and robustness. Lead compensator is applied to this control system, and is designed by PQ method. Designed compensator can improve property of positioning mechanism.

• International Journal of Contents
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• v.15 no.2
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• pp.75-78
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• 2019

The Integration technique of combining the measurement method with the fine precision of the sensor collecting the satellite-based information to determine the displacement space is available to a variety of diagnostic information. The measurement method by a GNSS with the sensors is needed since there will always be occasional occurrence of natural disasters caused by various environmental factors and the surroundings. Such attempts carried out nationally by distributed torsional displacement of the terrain and facilities. The combination of the various positioning analysis of mm-class for the facility of main area observed is required constantly in real time information of the USN/IoT Smart sensors and should be able to utilize such information as a precisely fine positioning information for the precisely fine displacement of the semi-permanent main facilities. In this study, for the installation of the receiving system, the USN/IoT base line positioning are easily accessible for the target bridges. Transmitting hourly from the received data is also executed in real time using the wireless Wi-Fi/Bluetooth bridges and related facilities to automatically process a fine position displacement. The results obtained from this method can be analyzed by real-time monitoring for a large structure or facilities for disaster prevention.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.1
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• pp.17-25
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• 2002

This system is composed of fine and coarse apparatus, measurement system and control system. Piezoelectric actuator is designed far fee positioning. We make a study of precision apparatus that is used in the various industrial machine. The study was carried out to develope a precision positioning apparatus, consisting of servo motor and piezoelectric actuator Coarse positioning using lead screw is thrived by servo motor. Control system output a signal from laser interferometer to amplifier of servo motor and piezoelectric actuator after digital signal processing (DSP). Resolution of this apparatus measure with laser interferometer. In this study, design method and control system with ultra precision position apparatus are researched. As the first step, we have estimated for control performance and system stability before an actual apparatus is manufactured by MATLAB with SIMUUNK including various frictions those are composed of pre-design and system modeling.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.648-651
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• 2003

This paper presents a 3-axis fine positioning stage. All the procedure concerning the design and fabrication of the stae are described. The stage considered here is composed of flexure hinges, piezoelectric actuators and their peripherals. A special flexure hinge is adopted to be able to actuate the single stage in three axes at the same time. A ball contact mechanism is introduced into the piezoelectric actuator to avoid the cross talk among the axes. The final design is obtained with the theoretical analysis on the stage. An actual fine stage is developed and the design specifications are verified through an experiment.