• Journal of Institute of Control, Robotics and Systems
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• v.15 no.9
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• pp.881-886
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• 2009

This paper presents a manipulation system consisting of a coarse/fine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The fine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and fine manipulation of micro parts.

• Design & Manufacturing
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• v.17 no.2
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• pp.15-21
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• 2023

In this study, a diamond turning machine and a laser-assisted machining module were utilized for the complex combined cutting of aspheric shapes and fine patterns on the surface of high-hardness brittle material, silicon. The analysis of material's form accuracy and corrective machining was conducted based on key factors such as laser output, rotational speed, feed rate, and cutting depth to achieve form accuracy below 1 ㎛ and surface roughness below 0.1 ㎛. The cutting condition and corrective machining methods were investigated to achieve the desired form accuracy and surface roughness. The rotational speed of the spindle and the linear feed rate of the diamond turning machine were varied in five stages for the cutting condition test. Surface roughness and form accuracy were measured using both a contact surface profilometer and a non-contact surface profilometer. The experimental results revealed a tendency of improved surface roughness with increased rotational speed of the workpiece, and the best surface roughness and form accuracy were observed at a feed rate of 5 mm/min. Furthermore, based on the cutting condition experiments, corrective machining was performed. The experimental results demonstrated an improvement in form accuracy from 0.94 ㎛ to 0.31 ㎛ and a significant reduction in the average value of the surface roughness curve from 0.234 ㎛ to 0.061 ㎛. This research serves as a foundation for future studies focusing on the machinability in relation to laser output parameters.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.3 no.3
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• pp.24-31
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• 2004

A successful on-line monitoring system for conventional machining operations has the potential to reduce cost, guarantee consistency of product quality, improve productivity and provide a safer environment for the operator. In fine-shape machining, typical signs of tool problems such as vibration, noise, chip flow characteristics and visual signs are almost unnoticeable without the use of special equipment. These characteristics increase the importance of automatic monitoring in fine-shape machining, however, sensing and interpretation of signals ar more complex. In addition, the shafts of the mini-tools break before the typical extensive cutting edge of the tool gets damaged. In this study, the existence of a relationship between the characteristics of the cutting force and tool usage was investigated, and tool breakage detection algorithm by LabVIEW was developed and the following results are obtained. It was possible to use a relative error compare which mainly used in established experiment and investigated tool breakage detection algorithm in time domain which can detect AE and cutting force signals more effective and accurate.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.665-666
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• 2006

In precision laser microfabrication, focusing is essential to acquire good machining precision and uniform machining quality. If it does not perform, laser machining cannot be realized. So, confocal scanning method with high depth resolution is used for focus detection technique. This paper is concerned with a procedure for design, analysis and performance test of an autofocus fine actuating stage, which is composed of flexure-hinge type lever mechanism and piezoelectric actuator. Through series of analytical design, the stage is simplified as a rigid bodies(lever and main body) and springs(flexure hinges). The simplified model was applied to determine the dimension of flexure hinges and lever. After structural analysis confirmed design requirement, an actual stage was made and verified through an experiment on the static and dynamic characteristics(maximum stroke and 1st natural frequency). The fabricated stage was satisfied with the design requirement.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.11
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• pp.983-988
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• 2015

This paper details a new ultra-precise turning method for increasing surface quality, "Multi Point B Axis Control Method." Machined surface error is minimized by the compensation machining process, but the process leaves residual chip marks and surface roughness. This phenomenon is unavoidable in the diamond turning process using existing machining methods. However, Multi Point B axis control uses a small angle (< $1^{\circ}$) for the unused diamond edge for generation of ultra-fine surfaces; no machining chipping occurs. It is achieved by compensated surface profiling via alignment of the tool radial center on the center of the B axis rotation table. Experimental results show that a diamond turned surface using the Multi Point B axis control method achieved P-V $0.1{\mu}m$ and Ra 1.1nm and these ultra-fine surface qualities are reproducible.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.245-250
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• 2002

A successful on-line monitoring system for conventional machining operations has the potential to reduce cost, guarantee consistency of product quality, improve productivity and provide a safer environment for the operator. In fee-shape machining, typical signs of tool problems such as vibration, noise, chip flow characteristics and visual signs are almost unnoticeable without the use of special equipment. These characteristics increase the importance of automatic monitoring in fine-shape machining; however, sensing and interpretation of signals are more complex. In addition, the shafts of the micro-tools break before the typical extensive cutting edge of the tool gets damaged. In this study, the existence of a relationship between the characteristics of the cutting force and tool usage was investigated, and tool breakage detection algorithm was developed and the fellowing results are obtained. In data analysis, didn't use a relative error compare which mainly used in established experiment and investigated tool breakage detection algorithm in time domain which can detect AE and cutting force signals more effective and accurate.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.1063-1067
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• 1997

A study of carbide step drill cutting ability is highly progessing the step drill with more then twice diameter rate is so difficult in regrinding and very easy to damage during machining. As the machining of step drill for closed hole is occur to breakage at small diamter poistion, so it is very difficult to machinine. Thue, in this experiment, We investance roundness and surface roghness by machining distance and were identifid that the first distance, 5~10m, was fine with 7 .mu.m but the arround of 15m was happened so much alternation. And we were indentified that after 20m was happend statable machining. The surface roughness was happened the same conditions. So application of stwp drill we think that the selection of cutting conditions need lots consideration and the study of step drill's diameter ratio ratio is carred out.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.4
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• pp.1-7
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• 2008

Fine grained superplastic Zn-22%Al alloy was extruded using a laser machined micro-die to produce a micro-gear shaft. Extrusion process was conducted under a constant pressure at constant temperatures ranging from 503 to 563K. Laser machining was capable to machine a micro-die with close tolerances and adequate surface quality. The extrusion rate increased with extrusion load under constant extrusion temperature. The rate reached a steady state and became constant after a certain period. There was a small instantaneous stroke on application of the load and then a very brief primary stage which preceded steady-state flow. The micro-extrusion process was proven to produce a micro-gear shaft successfully using a fine grained superplastic Zn-22%Al alloy.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.4
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• pp.128-135
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• 2003

To decrease environmental damage, the development of environmental friendly fluids provides attractive alternative to the conventional fluids. In this study, the effects of harmful ingredients (Cl, S) contained in the fluids that used in grinding and cutting processes to influence on the nasal cavities of the white rats were measured indirectly. Also, the level of the environmental influence in workshops was graded through analyzing the concentration and chemical ingredients of flying-dust, which generated from the friction and combustion in the cutting process, that for analyzing how harmful the influence of particles to workers then it could be used as the basic data for improving the environment. To improve the conventional machining fluid, which can be harmful on worker's bodies and the environment, the environmental friendly machining method was suggested through analyzing each lubrication properties of vegetable fluid and used-edible oil as alternative fluid. As a result, it was known that an emulsion type fluid might be the main cause leading to some respiratory ailments. Also this paper presents the possibility to use vegetable fluid and used-edible oil as the alternative of cutting fluids.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.18 no.6
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• pp.551-557
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• 2009

A development of smart materials is becoming a prominent issue on present industries. A smart material, included in functions, is needed for micro fabrication. A shape memory alloy(SMA) in a smart material is best known material. Ni-Ti alloy, composed of nikel and titanium is one of the best shape memory alloy(SMA). Nitinol SMA is used for a lot of high tech industry such as aero space, medical device, micro actuator, sensor system. However, Ni-Ti SMA is difficult to process to make a shape and fabrications as traditional machining process. Because nitinol SMA, that is contained nikel content more than titanium content, has similar physical characteristics of titanium. In this paper, the characteristics of ECM grooving process for nitinol SMA are investigated by experiments. The experiments in this study are progressed for power, gap distance and machining time. The characteristics are found each part. Fine shape in work piece can be found on conditions; current 6A, duty factor 50%, gap distance 15%, gap distance $15{\mu}m$, machining time 10min.