• 제목/요약/키워드: Film orientation

검색결과 899건 처리시간 0.033초

화학증착법에 의한 $PbTiO_3$ 박막의 재료 (Fabrication of $PbTiO_3$ Thin Film by Chemical Vapor Deposition Technique)

  • 윤순길;김호기
    • 한국세라믹학회지
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    • 제23권6호
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    • pp.33-36
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    • 1986
  • The $PbTiO_3$is well known materials having remarkable ferroelectric piezoelectric and pyro-electric properties. Thin films of the lead titanite has been successfully fabricated by Chemical Vapor Deposition on the borosilicate glass and titanium substrate. The $PbTiO_3$ thin film deposited on the borosilicate glass using the $PbCl_2$, $TiCl_4$ dry oxygen and wet oxygen at different temperatures (50$0^{\circ}C$-$700^{\circ}C$) grows along the (001) preferred orientation. On the other hand the $PbTiO_3$ thin film deposited on the titanium substrate using the PbO grows along the (101) preferred orientation. Growth orientation of deposited $PbTiO_3$ depends on the reaction species irrespective of substrate materials. Maximum dielectic constant and loss tangent of the $PbTiO_3$ thin film deposited on the titanium substrate are about 90 and 0.02 respectively, . Deposition rates of $PbTiO_3$ deposited on the borosilicate glass and titanium substrate are 10-15 ${\mu}{\textrm}{m}$/hr. Titanium dioxide interlayer formed be-tween $PbTiO_3$ film and titanium substrate material, It improved the adhesion of the film.

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Thickness dependence of grain growth orientation in MgB2 films fabricated by hybrid physical-chemical vapor deposition

  • Ranot, Mahipal;Kang, W.N.
    • 한국초전도ㆍ저온공학회논문지
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    • 제15권2호
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    • pp.9-11
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    • 2013
  • We have investigated the effect of thickness of the MgB2 film on the grain growth direction as well as on their superconducting properties. $MgB_2$ films of various thicknesses were fabricated on c-cut $Al_2O_3$ substrates at a temperature of $540^{\circ}C$ by using hybrid physical-chemical vapor deposition (HPCVD) technique. The superconducting transition temperature ($T_c$) was found to increase with increase in the thickness of the $MgB_2$ film. X-ray diffraction analysis revealed that the orientation of grains changed from c-axis to a-axis upon increasing the thickness of the $MgB_2$ film from 0.6 to 2.0 ${\mu}m$. $MgB_2$ grains of various orientations were observed in the microstructures of the films examined by scanning electron microscopy. It is observed that at high magnetic fields the 2.0-${\mu}m$-thick film exhibit considerably larger critical current density ($J_c$) as compared to 0.6-${\mu}m$-thick film. The results are discussed in terms of an intrinsic-pinning in $MgB_2$ similarly as intrinsic-pinning occurring in high-Tc cuprate superconductors with layered structure.

물리증착법에 의해 제작한 마그네슘 박막의 형성기구와 내식특성 (Formation Mechanism and Corrosion-Resistance of Magnesium Film by Physical Vapour Deposition Process)

  • 이명훈
    • Journal of Advanced Marine Engineering and Technology
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    • 제18권2호
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    • pp.54-63
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    • 1994
  • Mg thin films were prepared on SPCC(cold-rolled steel) substrates by vasuum evapoaration and ion-plating. The influence of argon gas pressure and substrates bias voltage on the crystal orientation and morphology of the film was determined by using X-ray diffraction and scanning electron micrography (SEM), respectively. And the effect of crystal orientation and morphology of the Mg thin films on corrosion behavior was estimated by measuring the anodic polarization curves in deaerated 3% NaCl solution. The crystal orientation of the Mg films deposited at high argon gas pressure exhibited a (002) preferred orientation, regardless of the substrate bias voltage. Film morphology changed from a columnar to a granular structure with the increase of argon gas pressure. The morphology of the films depended not only on argon gas pressure but also bias voltage ; i.e., the effect of increasing bias voltage was similar to that of decreasing argon gas pressure. The influences of argon gas pressure and bias voltage were explained by applying the adsorption inhibitor theory and the sputter theory. And also, this showed that the corrosion resistance of the Mg thin films can be changed by controlling the crystal orientaton and morphology.

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SAW 필터용 ZnO 압전 박막의 전기적 특성 (Electrical Characteristics of ZnO Piezo-electric Thin film for SAW filter)

  • 이동윤;윤석진
    • 한국전기전자재료학회논문지
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    • 제18권10호
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    • pp.909-916
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    • 2005
  • The structural and electrical property of RF magnetron sputtered ZnO thin film have been studied as a function of RF power, substrate temperature, oxygen/argon gas ratio and film thickness at constant sputtering power, sputtering working pressure and target-substrate distance. To analyze a crystallo-graphic properties of the films, $\theta$/2$\theta$ mode X-ray diffraction, SEM, and AFM analyses. C-axis preferred orientation, resistivity and surface roughness highly depended on oxygen/argon gas ratio. The resistivity of ZnO thin film(6000 ${\AA}$) rapidly increased with increasing oxygen ratio and the resistivity value of $9 {\ast} 10^7 {\Omega}cm$ was obtained at a working pressure of 10 mTorr with the same oxygen/argon gas ratio. The surface roughness was also improved with increasing oxygen ratio and the ZnO films deposited with the same oxygen/argon gas ratio showed the excellent roughness value of 28.7 ${\AA}$. With increase of the substrate temperature, The C-axis preferred orientation of ZnO thin film increases and the resistivity decreases due to deviation from the stoichiometric ZnO due to oxygen deficiency.

Morphology and Properties of Polyacrylonitrile/Single Wall Carbon Nanotube Composite Films

  • Kim, Seong Hoon;Min, Byung Ghyl;Lee, Sang Cheol;Park, Sung Bum;Lee, Tae Dong;Park, Min;Kumar, Satish
    • Fibers and Polymers
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    • 제5권3호
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    • pp.198-203
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    • 2004
  • Composite films were prepared by casting the solution of polyacrylonitrile (PAN) and single wall nanotube (SWNT) in DMF subsequent to sonication. The SWNTs in the films are well dispersed as ropes with 20-30 nm thickness. Moreover, AFM surface image of the composite film displays an interwoven fibrous structure of nanotubes which may give rise to conductive passways and lead to high conductivity. The polarized Raman spectroscopy is an ideal characterization technique for identification and the orientation study of SWNT. The well-defined G-peak intensity at 1580 $cm^{-1}$shows a dependency on the draw ratio under cross-Nicol. The degree of nanotube orientation in the drawn film was measurable from the sine curve obtained by rotating the drawn film on the plane of cross-Nicol of polarized Raman microscope. The threshold loading of SWNT for electrical conductivity in PAN is found to be lower than 1 wt% in the composite film. The electrical conductivity of the SWNT/PAN composite film decreased with increasing of draw ratio due to the collapse of the interwoven fibrous network of the nanotubes with uniaxial orientation.

HCD 이온 플레이팅법에 의해 증착된 MgO박막의 특성에 관한 연구 (A Study on the Characteristics of the MgO Thin Film Deposited by the Hollow Cathode Discharge Ion Plating Method)

  • 정우준;정희섭;황기웅
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1996년도 추계학술대회 논문집 학회본부
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    • pp.200-202
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    • 1996
  • MgO film was deposited on the glass substrate by the hollow cathode discharge ion plating method and the characteristics of the MgO thin film such as deposition rate, crystalline orientation, surface morphology and secondary electron coefficient were investigated. The deposition rate of MgO thin films were $430^{\sim}1270{\AA}$/min at various temperatures and biases. The crystalline orientation of the MgO thin film changed from (200) to (220) upon increasing the HCD current from 100A to 200A. These results indicated that the crystallin orientation of the MgO thin film was determined by the super-saturation ratio. The (200) peak decreased and the (220) peak increased as the substrate bias increased, while both peaks increased as the substrate temperature increased. The grain size increased as the substrate bias increased and the secondary electron emission coefficient increased as the substrate bias increased.

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보조전계를 이용한 전기영동 초전도 막의 제작 (Superconducting Film Fabrication using Field Assisted Electrophoresis)

  • 소대화;박정철;전용우;조용준
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.105-108
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    • 2002
  • For fabricating high T$\sub$c/ superconducting deposited film, novel electrophoretic deposition technique applied to deposit surface charged Particles on metal substrate with oxy d.c field has been studied. The electric properties of superconducting film don't improve easily because the particles of deposition film are deposited randomly on substrate and don't make orientation affected to its critical current density. In this paper, we studied conventional electrophoresis in addition to a.c field assisted for the improvement of BSCCO superconducting film with high orientation of deposition particles.

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보조전계를 이용한 전기영동 초전도 막의 제작 (Superconducting film fabrication using field Assisted Electrophoresis)

  • 소대화;전용우
    • 한국전기전자재료학회논문지
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    • 제16권2호
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    • pp.157-162
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    • 2003
  • For fabricating high T$\sub$c/ superconducting deposition film, novel electrophoretic deposition (EPD) technique applied to deposit surface charged particles on metal substrate with only d.c field has been studied. However, the electric properties of superconducting film could not be improved easily by this way, because the particles of EPD film were usually deposited randomly on metal substrate without any directional orientation affected to its critical current density. For the purpose of obtaining partcle orientation on the EPD films, the new method modified by a.c. assisted field to the conventional electrophoresis system was investigated to improve the particle deposition density and to increase the contacting area among the particles with highly oriented particle deposition of BSCCO superconducting film.

일축 연신 조건에 따른 Poly(ethylene 2,6-naphthalate) 배향에 관한 연구 (Effect of Uniaxial Drawing Conditions on the Orientation of Poly (ethylene 2,6- naphthalate))

  • 진병석;이성효;이광희
    • 폴리머
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    • 제25권5호
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    • pp.699-706
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    • 2001
  • 연신온도, 연신속도, 연신비 등 연신 조건에 따른 poly(ethylene 2,6-naphthalate) (PEN)의 배향상태 변화를 살펴보았다. 연신온도가 낮을수록 연신속도가 빠를수록 연신비에 따라 큰 복굴절 값을 보이며 FT-IR ATR dichroism 방법으로 구한 배향 특성도 복굴절의 실험결과를 뒷받침하였다. PEN을 $120^{\circ}C$에서 연신하면 무정형사슬 배향함수 ($f_a$)가 연신속도가 빠를수록 높은 값을 갖지만 $141^{\circ}C$에서 연신하면 반대로 연신속도가 빠를수록 낮은 값을 갖게 된다. 이러한 경향은 결정화 속도와 사슬 이완속도와의 관계로부터 설명이 가능하다. X-선 회절 실험 결과로부터 PEN의 naphthalene ring 구조가 필름표면에 평행하게 배열됨을 확인할 수 있었다.

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CVD법에 의해 제작된 광촉매 TiO2 〈112〉 우선배향의 특성 (The Characteristics of 〈112〉-preferred Orientation for Photocatalytic TiO2 Fabricated by CVD)

  • 강경태;진정근;강필규;노대호;변동진
    • 한국재료학회지
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    • 제13권7호
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    • pp.436-441
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    • 2003
  • The characteristics of <112> orientation were studied for the $TiO_2$thin films, which were prepared on the glass by CVD (chemical vapor deposition) at various substrate temperatures. It was confirmed that $TiO_2$ films exhibited <112>-preferred orientation in a specific temperature range. Although $TiO_2$polycrystalline film grown deposited at relatively low temperature showed the growth of random directions, the <112>-preferred orientation was gradually developed with increasing deposition temperature. According to exhibit higher degree of <112>-preferred orientation, $TiO_2$thin film showed porous surface morphology, well-developed columnar structure, and deeper voids resulted from non-aggregation of columns were observed. In addition, transmittance was enhanced. Therefore, the growth of $TiO_2$with <112>-preferred orientation is suitable for glass coating because of predominance of photocatalytic efficiency and transmittance.