• Journal of the Semiconductor & Display Technology
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• v.7 no.3
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• pp.1-4
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• 2008

The chemical shift of SiOC film was observed according to the flow rate ratio. SiOC film had the broad main band of $880\sim1190cm^{-1}$ and the sharp Si-$CH_3$ bond at $1252cm^{-1}$, and the peak position of the main bond in the infrared spectra moved to high frequency according to the increasing of an BTMSM flow rate. So the increment of the alkyl group induced the C-H bond condensation in the film, and shows the blueshift in the infrared spectra. In the case of P5000 system of Applied Materials Corporation, the strong bond of Si-CH3 bond in precursor does not enough to dissociated and ionized, because low plasma energy due to the capactive coupled CVD. Therefore, there was the sharp peak of Si-$CH_3$ bond at $1252cm^{-1}$.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.26 no.7
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• pp.315-321
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• 2014

In this study, external condensation heat transfer coefficients (HTCs) of two non-azeotropic refrigerant mixtures of HFC32/HFC152a at various compositions were measured on both 26 fpi low-fin and Turbo-C enhanced tubes, of 19.0 mm outside diameter. All data were taken at the vapor temperature of $39^{\circ}C$, with a wall subcooling of 3~8 K. Test results showed that the HTCs of the tested mixtures on the enhanced tubes were much lower than the ideal values calculated by mass fraction weighting of the pure component HTCs. Also, the reduction of HTCs due to the diffusion vapor film was much larger than that of a plain tube. Unlike HTCs of pure fluids, HTCs of the mixtures measured on enhanced tubes increased, as the wall subcooling increased, which was due to the sudden break-up of the vapor diffusion film with an increase in wall subcooling. Finally, the heat transfer enhancement ratios for mixtures were found to be much lower, than those of pure fluids.

• Nuclear Engineering and Technology
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• v.31 no.5
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• pp.486-497
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• 1999

The local heat transfer coefficient is experimentally investigated for the reflux condensation in a countercurrent flow between the steam-air mixture and the condensate, A single vertical tube has a geometry which is a length of 2.4m, inner diameter of 16.56mm and outer diameter of 19.05mm and is made of stainless steel. Air is used as a noncondensible gas. The secondary side has a shape of annulus around vertical tube and the lost heat by primary condensation is transferred to the coolant water. The local temperatures are measured at 11 locations in the vertical direction and each location has 3 measurement points in the radial direction, which are installed at the tube center, at the outer wall and at the coolant side. In three different pressures, the 27 sets of data are obtained in the range of inlet steam flow rate 1.348∼3.282kg/hr, of inlet air mass fraction 11.8∼55.0%. The investigation of the flooding is preceded to find the upper limit of the reflux condensation. Onset of flooding is lower than that of Wallis' correlation. The local heat transfer coefficient increases as the increase of inlet steam flow rate and decreases as the increase of inlet air mass fraction. As an increase of the system pressure, the active condensing region is contracted and the heat transfer capability in this region is magnified. The empirical correlation is developed by 165 data of the local heat transfer. As a result, the Jacob number and film Reynolds number are dominant parameters to govern the local heat transfer coefficient. The rms error is 17.7% between the results by the experiment and by the correlation.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.30 no.1
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• pp.33-44
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• 1994

This work studies for boiling and condensation heat transfer performance of trapezoidally shaped integral-fin tubes having fin densities from 748fpm to 1654fpm. For comparison, tests are made using a plain tube having the same inside and outside diameter as that of the root of fins of finned tubes. Hahne's theoretical model and Webb's theoretical model are used to predict the R-11 boiling heat transfer coefficient and condensing heat transfer coefficient respectively for plain tube and all integral-fin tubes. Experiments are carried out using R-11 as working fluid. This work is limited to film-wise condensation and pool boiling on the outside surface of plain tube and 4 low integral-fin tubes. In case of condensation, the refrigerant condenses at saturation state of 32$^{\circ}C$ on the outside tube surface cooled by coolant and in case of boiling. the refrigerant evaporates at saturation state of 1bar on the outside tube surface. The amount of non-con-densable gases in the test loop is reduced to a negligible value by repeated purging. The actual boiling and condensing processes occur on the outside tube surfaces. Hence the nature of this surface geometry affects the heat transfer performances of condenser and evaporator in refrigerating system. The condensation heat transfer coefficient of integral-fin tube is enhanced by both extended tube surface area and surface tension. The ratio of the condensation heat transfer coefficients of finned to plain tubes is greater than that of surface area of finned to plain tubes, while ratio of the boiling heat transfer coefficient of finned to plain tubes shows reverse result. As a result, low integral-fin tube can be used in condenser more effectively than used in evaporator.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.10 no.6
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• pp.732-742
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• 1998

Prediction method for heat transfer coefficients in a horizontal smooth tube with forced convection condensation is proposed. In this paper, the analogy between momentum and heat transfer was applied to an annular flow regime and the logarithmic velocity distribution is applied to describe the velocity profile within the liquid film. Prediction results are compared with those of experimental ones. The test refrigerants are R113, R22, R134a, R407C(R33/R125/R134a, 23/25/52 wt%), R410A(R32/R125, 50/50 wt%) and R134a＋R123(R134a/R123, 85.5/14.5 wt%) which are used under operating conditions in a condenser of air-conditioner. The proposed prediction method shows good agreement with experimental data within$\pm 30%$ for pure refrigerants. For the mixture refrigerants including the ternary mixture refrigerant R407C, condensation heat transfer from this study are higher than those from experiments. By correcting the constant in two-phase frictional multiplier, the predicated heat transfer coefficients become similar to the experimental results.

• Journal of Fisheries and Marine Sciences Education
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• v.4 no.1
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• pp.47-61
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• 1992

An experimental study was carried out to investigate the condensation performance for the horizontal cylindrical heat transfer tube with various fin attached using R-11 vapor. The heat transfer tube used in this study was supplied by SUNG HYUNG METAL CO., LTD. Four different types of heat transfer tubes (plain tube, SH-CYR tube, thermocor tube and thermoexcel tube) were used. Each tube was surrounded by circular acrylate tube, and R-11 gas heated by boiler flows into the acrylate tube. Cooling water counter-flows in heat transfer tubes. Heat transfer coefficient of the plain tube from measured data was compared with those of three other tubes. The results are summarized as follows: 1. As the cooling water temperature decreased, the liquid film of R-11 turned to droplet drop on the top surface of the horizontal tube. 2. Heat transfer coefficient calculated theoretically was higher than that obtained from the experimental data. 3. As far as the condensation concerns the thermocor tube is the highest, the SH-CYR tube is the second, and the thermoexcel tube is the third excluding the plain tube.

• Journal of the Korean Ceramic Society
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• v.40 no.4
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• pp.385-392
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• 2003

Sol-gel preparation technique using a chemical reaction of metal alkoxides has been widely used for the fabrication of various materials including ceramics. However, its mechanism has been studied till now because a number of chemical ways are possible from various alkoxides and additives. In this study, the mechanism of hydrolysis, condensation, and polymerization of alkoxides were investigated from the fabrication of lead-zirconate-titanate (PbZr$\_$x/Ti$\_$l-x/O$_3$; PZT) thin film that is used as various micro-actuator, transducer, and sensor because of its high electro-mechanical coupling factors and thermal stability. Furthermore, the fabrication process and characteristics of self-patternable PZT film using photosensitive stabilizer were studied in order to resolve the problem of physical damage and properties degradation during dry etching for device fabrication. Using an optimum condition to prepare the self-patternable PZT film, more than 5000 ${\AA}$ thick self-patternable PZT film could be fabricated by three times coating. The PZT film showed 28.4 ${\mu}$c/cm$^2$ of remnant polarization (Pr) and 37.0 kV/cm of coercive field (E$\_$c/).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.1230-1233
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• 2004

Ozone is useful oxidizing gas for the fabrication of oxide thin films. Accordingly researching on oxidizing gas is required. In order to obtain high quality oxide thin films, higher ozone concentration is necessary. In this paper oxidation property was evaluated relation between oxide gas pressure and inverse temperature(CuO reaction). The obtained condition was formulated by the fabrication of Cu metal thin film by co-deposition using the ion Beam Sputtering method. Because the CuO phase peak appeared at the XRD evaluation of the CuO thin film using ozone gas, this study has succeeded in the fabrication of the CuO phase at $825^{\circ}C$.

• Journal of Korean Vacuum Science & Technology
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• v.3 no.1
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• pp.16-23
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• 1999

Deposition of parylene (PA) films has been explored at substrate temperatures below 2$0^{\circ}C$ and pressures below 4 torr. The film thickness was measured using AFM and the film thickness measured was 3,500-12,000$\AA$ and the growth rate was 20-70$\AA$/min. T도 dielectric constant of the deposited PA films was found to be 2.66 and the dielectric strength was in excess of 2$\times$105V/cm. The growth rate became a maximum at a precursor decomposition temperature of $600^{\circ}C$. It was found that the growth rate decreased with increasing substrate temperature, whereas it increased with increasing pressure. At a precursor decomposition temperature of 75$0^{\circ}C$ or at a deposition pressure above 1 Torr the film surface became rough due to particle formation in the gas phase. The condensation of a p-xylylene monomer on the substrate surface turned out to be a rate-limiting step in the growth of the PA films.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.2
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• pp.101-106
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• 2009

The disjoining pressure is an important physical property in modeling the small-scale transport phenomena on thin film. It is a very useful definition in characterizing the non-continuum effects that are not negligible in heat and mass transport of the film thinner than submicro-scales. We present the calculated values of disjoining pressure of He, Kr and Xe thin films absorbed on graphite substrate using Molecular Dynamics Simulation (MD). The disjoining pressure is accurately calculated in the resolution of a molecular scale of the film thickness. The characteristics of the pressure are discussed regarding the molecular nature of the fluid system such as molecular diameter and intermolecular interaction parameters. The MD results are also compared with those based on the continuum approximation of the slab-like density profile and the results on other novel gases in the previous study. The discrepancies of the continuum model with MD results are shown in all three configurations and discussed in the view point of molecular features.