• Title/Summary/Keyword: Filling Material

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A Study on the Cobalt Electrodeposition of High Aspect Ratio Through-Silicon-Via (TSV) with Single Additive (단일 첨가제를 이용한 고종횡비 TSV의 코발트 전해증착에 관한 연구)

  • Kim, Yu-Jeong;Lee, Jin-Hyeon;Park, Gi-Mun;Yu, Bong-Yeong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.140-140
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    • 2018
  • The 3D interconnect technologies have been appeared, as the density of Integrated Circuit (IC) devices increases. Through Silicon Via (TSV) process is an important technology in the 3D interconnect technologies. And the process is used to form a vertically electrical connection through silicon dies. This TSV process has some advantages that short length of interconnection, high interconnection density, low electrical resistance, and low power consumption. Because of these advantages, TSVs could improve the device performance higher. The fabrication process of TSV has several steps such as TSV etching, insulator deposition, seed layer deposition, metallization, planarization, and assembly. Among them, TSV metallization (i.e. TSV filling) was core process in the fabrication process of TSV because TSV metallization determines the performance and reliability of the TSV interconnect. TSVs were commonly filled with metals by using the simple electrochemical deposition method. However, since the aspect ratio of TSVs was become a higher, it was easy to occur voids and copper filling of TSVs became more difficult. Using some additives like an accelerator, suppressor and leveler for the void-free filling of TSVs, deposition rate of bottom could be fast whereas deposition of side walls could be inhibited. The suppressor was adsorbed surface of via easily because of its higher molecular weight than the accelerator. However, for high aspect ratio TSV fillers, the growth of the top of via can be accelerated because the suppressor is replaced by an accelerator. The substitution of the accelerator and the suppressor caused the side wall growth and defect generation. The suppressor was used as Single additive electrodeposition of TSV to overcome the constraints. At the electrochemical deposition of high aspect ratio of TSVs, the suppressor as single additive could effectively suppress the growth of the top surface and the void-free bottom-up filling became possible. Generally, copper was used to fill TSVs since its low resistivity could reduce the RC delay of the interconnection. However, because of the large Coefficients of Thermal Expansion (CTE) mismatch between silicon and copper, stress was induced to the silicon around the TSVs at the annealing process. The Keep Out Zone (KOZ), the stressed area in the silicon, could affect carrier mobility and could cause degradation of the device performance. Cobalt can be used as an alternative material because the CTE of cobalt was lower than that of copper. Therefore, using cobalt could reduce KOZ and improve device performance. In this study, high-aspect ratio TSVs were filled with cobalt using the electrochemical deposition. And the filling performance was enhanced by using the suppressor as single additive. Electrochemical analysis explains the effect of suppressor in the cobalt filling bath and the effect of filling behavior at condition such as current type was investigated.

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EFFECTS OF SOME RESTORATIVE MATERIALS ON THE PROLIFERATION OF OSTEOBLASTIC CELL AND THE TISSUE REACTION OF BONE (수종 수복재의 조골세포 유사세포 증식 및 골조직 반응에 미치는 영향)

  • Kim, Hyun-Sun;Hong, Chan-Ui;Kim, Jong-Yeo
    • Restorative Dentistry and Endodontics
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    • v.22 no.1
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    • pp.305-324
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    • 1997
  • Numerous materials such as amalgam, IRM, SuperEBA, dessicated ZOE, and Ketac-Silver have been used as a root-end filling material or to repair furcation perforations. But so far no material has been found to satisfy all of the requirements of an ideal restorative material. Recently, mineral trioxide aggregate (MTA) has been suggested for use as a root end filling material and for the repair of furcation perforations. The purpose of this study was to compare the effect of MTA on the proliferation of MC3T3/E1 osteoblastic cell, formation of bone nodule, alkaline phosphatase activity, and finally the tissue reaction of bone with those of amalgam, IRM, SuperEBA, dessicated ZOE, and Ketac-Silver. The following conclusions were drawn within the limits of the experimental results : 1. MTA showed a excellent proliferation of osteoblastic cell and Ketac-Silver showed moderate proliferation of osteoblastic cell. The rest of test materials showed no proliferation of osteoblastic cell. 2. Many of definite bone nodules were found in the MTA group. In contrast, Ketac-Silver group showed no definite bone formation but only showed mild sign of bone formation. 3. Alkaline phosphatase activity of Ketac-Silver and MTA showed similar results. But both of them showed higher activity than that of other materials (p<0.005). 4. The tissue reaction to implanted MTA in the calbarium of mouse was milder than that observed with other materials. The tissue reaction of dessicated ZOE showed the worst results among the test materials.

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Feasibility and Filtering Efficiency of Geotextile Tube Structure with Polymer Material (지오텍스타일 재질에 따른 필터성능 및 튜브구조물 적용성 분석)

  • Oh, Young-In;Shin, Eun-Chul;Kim, Sung-Yoon
    • Journal of the Korean Geosynthetics Society
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    • v.4 no.1
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    • pp.7-15
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    • 2005
  • In recent years, the geotextile tubes filled with dredged material have been used in dike and breakwater construction for a number of projects around the world, and their use in this field is growing very fast. One of the most attractive advantages of geotextile tube technology is can be use the in-situ filling materials by hydraulic pumping, it can be also established lower costs and fast construction than other technology. Geotextiles form one of the two largest groups of geosynthetics and it is commonly made by two major types of polymer material(Polypropylene, Polyester). The objective of this paper is to examine several issues associated with drainage function and feasibility of geotextile tube structure such as filtering efficiency, dewatering efficiency, and filling process with polymer materials. Based on the laboratory filtering test and in-situ tests, polypropylene goetextile is more effective for drainage function of geotextile tube technology.

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Effects of macroporosity and double porosity on noise control of acoustic cavity

  • Sujatha, C.;Kore, Shantanu S.
    • Advances in aircraft and spacecraft science
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    • v.3 no.3
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    • pp.351-366
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    • 2016
  • Macroperforations improve the sound absorption performance of porous materials in acoustic cavities and in waveguides. In an acoustic cavity, enhanced noise reduction is achieved using porous materials having macroperforations. Double porosity materials are obtained by filling these macroperforations with different poroelastic materials having distinct physical properties. The locations of macroperforations in porous layers can be chosen based on cavity mode shapes. In this paper, the effect of variation of macroporosity and double porosity in porous materials on noise reduction in an acoustic cavity is presented. This analysis is done keeping each perforation size constant. Macroporosity of a porous material is the fraction of area covered by macro holes over the entire porous layer. The number of macroperforations decides macroporosity value. The system under investigation is an acoustic cavity having a layer of poroelastic material rigidly attached on one side and excited by an internal point source. The overall sound pressure level (SPL) inside the cavity coupled with porous layer is calculated using mixed displacement-pressure finite element formulation based on Biot-Allard theory. A 32 node, cubic polynomial brick element is used for discretization of both the cavity and the porous layer. The overall SPL in the cavity lined with porous layer is calculated for various macroporosities ranging from 0.05 to 0.4. The results show that variation in macroporosity of the porous layer affects the overall SPL inside the cavity. This variation in macroporosity is based on the cavity mode shapes. The optimum range of macroporosities in poroelastic layer is determined from this analysis. Next, SPL is calculated considering periodic and nodal line based optimum macroporosity. The corresponding results show that locations of macroperforations based on mode shapes of the acoustic cavity yield better noise reduction compared to those based on nodal lines or periodic macroperforations in poroelastic material layer. Finally, the effectiveness of double porosity materials in terms of overall sound pressure level, compared to equivolume double layer poroelastic materials is investigated; for this the double porosity material is obtained by filling the macroperforations based on mode shapes of the acoustic cavity.

Evaluation of Formability Dependent on the Location of Injection Gate of Vertical Machining Center ATC Tool Port Using Injection Molding Analysis (사출성형해석을 이용한 수직머시닝센터 ATC 툴 포트의 사출 게이트 위치에 따른 성형성 평가)

  • Lee, Yu-Wool;Park, Chul-Woo;Kim, Jin-Rok;Choi, Hyun-Jin
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.20 no.12
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    • pp.129-135
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    • 2021
  • Injection molding is a manufacturing method of melting the polymer resin and injecting it into a mold to molding it into the desired form. Due to the short molding time and outstanding formability, complex products can be shaped with high precision and it is the most widely used polymer molding method. However, there may be areas that are not filled depending on the location of the injection gate where polymer resin is injected. Formability is determined by deformation and surface precision due to the impact of residual stress after molding. Hence, choosing the location of the injection gate is very important and molding analysis of injection molding is essential to reduce the cost of the mold. This study evaluated the injection formability based on the location of the injection gate of the vertical machining center ATC tool port using injection molding analysis and the results were compared and analyzed. Injection molding analysis was conducted on filling, packing, and deformation according to the location of the gate of the ATC tool port. From each injection gate location, filling time, pressure, and maximum deformation were compared. At gate 2, conditions of molding time and the location of the gate were far superior in production and quality. Gate 2 produced the smallest deformation of 0.779mm with the best quality.

Dynamic Characteristics of Liquidity Filling Materials Mixed with Reclaimed Ash (매립석탄회를 혼합한 유동성 충진재의 동적거동특성)

  • Chae, Deokho;Kim, Kyoungo;Shin, Hyunyoung;Cho, Wanjei
    • Journal of the Korean GEO-environmental Society
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    • v.15 no.4
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    • pp.5-11
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    • 2014
  • Recently, there have been various lifeline installations constructed in the underground space of urban area due to the effective use of land. For newly installed lifelines or the management of the installed lifelines, many construction activities of excavation and backfilling are observed. Around these area, there are possibilities of collapse or excessive settlement due to the leaking of the pipe or unsatisfactory compaction of backfill material. Besides, construction costs can be saved since the on-site soils are used. The application of this liquidity filling material is not only to the lifeline installation but also to underpin the foundation under the vibrating machinery. On the evaluation of the applicability of this method to this circumstance, the strength should be investigated against the static load from the machine load as well as the vibration load from the activation of the machine. In this study, the applicability of the liquidity fill material on the foundation under the vibrating machinery is assessed via uniaxial compression and resonant column tests. The liquidity filling material consisting of the on-site soils with loess and kaolinite are tested to investigate the static and dynamic characteristics. Furthermore, the applicability of the reclaimed ash categorized as an industrial waste is evaluated for the recycle of the waste to the construction materials. The experimental results show that the shear modulus and 7 day uniaxial strength of the liquidity filling material mixed with reclaimed ash show higher than those with the on-site soils. However, the damping ratio does not show any tendency on the mixed materials.

Root Canal Obturation from the Viewpoint of Appropriate Technology (적정기술 관점에서 보는 근관 충전)

  • Kim, Sunil
    • The Journal of the Korean dental association
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    • v.56 no.10
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    • pp.567-571
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    • 2018
  • Obturation is a important procedure of root canal treatment. Canal filling should be both provide a hermetic seal for the root canal system and eliminate leakage channel from the oral cavity. Gutta-percha have been the standard material of choice for root canal obturation. Canal filling has been aimed at maximizing the amount of gutta-percha and minimizing the amount of sealer. However recently, single cone technique has been introduced that include calcium silicate-based sealer and single gutta-percha cone. It is important to select an obturation technique that offers consistency and is easy to use. From the standpoint of appropriate technology, the single cone technique is thought to be useful for general dentist.

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The effect of material factors on the compressive strength of ultra-high strength Steel Fiber Reinforced Cementitious Composites (재료요인이 초고강도 강섬유 보강 시멘트 복합체의 압축강도에 미치는 영향)

  • Park Jung Jun;Go Gyung Taek;Kang Su Tae;Ryu Gum Sung;Kim Sung Wook;Lee Jang Hwa
    • Proceedings of the Korea Concrete Institute Conference
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    • 2004.05a
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    • pp.288-291
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    • 2004
  • In this paper, to make ultra-high strength SFRCC with the range of compressive strength 180MPa, it was investigated the constitute factors of ultra-high strength SFRCC influenced on the compressive strength. The experimental variables were water-cementitious ratio, replacement of silica fume, size and proportion of sand, type and replacement of filling powder, and using of steel fiber in ultra-high strength SFRCC. As a result, in water-binder ratio 0.18, we could make ultra-high strength SFRCC with compressive strength 180MPa through using of silica fume, quartz sand with below 0.5mm, filling powder and steel fiber.

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Design of Longitudinal Prestress of Precast Decks in Continuous Bridges (연속교 프리캐스트 바닥판의 교축방향 프리스트레스 설계)

  • Shim, Chang-Su;Kim, Hyun-Ho;Ha, Tae-Yul;Jeon, Seung-Min
    • Proceedings of the Korea Concrete Institute Conference
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    • 2006.05a
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    • pp.406-409
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    • 2006
  • Serviceability resign is required to control the cracking at the joint of precast decks having longitudinal prestress in continuous composite bridges. Especially, details of twin girder bridges are complex not only due to main reinforcements and transverse prestress for the resign of long-span concrete slabs but also due to shear pockets for obtaining the composite action. This paper suggests the design guidelines for the magnitude of the effective prestress and for the selection of filling materials and their requirements in order to use precast decks for twin-girder continuous composite bridges. The necessary initial prestress was also evaluated through the long-term behavior analysis. From the analysis, existing design examples were revised and their effectiveness was estimated. When a filling material having bonding strength higher than the requirement is used in the region of high negative moment, uniform configuration of longitudinal prestressing steels along the whole span length of continuous composite bridges can be achieved resulting in simplification of details and enhancement of the construction costs.

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Finite Element Analysis of the Flexural Behavior of Concrete Filled Steel Tubes (콘크리트 충전 강관 부재의 휨거동에 관한 유한요소해석)

  • Kang, Jae-Yoon;Choi, Eun-Suk;Chin, Won-Jong;Lee, Jung-Woo;Kim, Byung-Suk;Lee, Heung-Soo
    • Proceedings of the Korea Concrete Institute Conference
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    • 2006.05a
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    • pp.418-421
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    • 2006
  • Appropriate analysis models for concrete-filled steel tube (CFT) subjected to bending moment were determined to assess flexural behavior of CFT member. Applying this model, finite element analyses was performed and compared against experimental data considering the compressive strength of in-filling material and the composite action between tube shell and in-filling core. Analysis results showed that the FE model proposed in this study is feasible for the analytical investigation of the flexural behavior of CFT member according to loading conditions, effect of compressive strength of various core materials and other design parameters.

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