Decrease of Gate Leakage Current by Employing AI Sacrificial Layer in the DLC-coated Si-tip FEA Fabrication (DLC-coated Si-tip FEA 제조에 있어서 Al 희생층을 이용한 게이트 누설 전류의 감소)
-
- The Transactions of the Korean Institute of Electrical Engineers C
- /
- v.48 no.8
- /
- pp.577-579
- /
- 1999