• Proceedings of the Korean Society of Laser Processing Conference
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• 2005.06a
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• pp.70-74
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• 2005

• Proceedings of the Korean Society of Laser Processing Conference
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• 2006.06a
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• pp.77-81
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• 2006

• Proceedings of the Korean Society of Laser Processing Conference
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• 2006.06a
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• pp.116-119
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• 2006

• Proceedings of the Korean Society of Laser Processing Conference
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• 2005.11a
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• pp.105-108
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• 2005

• Proceedings of the Korean Society of Laser Processing Conference
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• 2006.11a
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• pp.48-52
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• 2006

• Proceedings of the Korean Society of Laser Processing Conference
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• 2004.10a
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• pp.68-72
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• 2004

• Laser Solutions
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• v.14 no.2
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• pp.17-23
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• 2011

Active thin films are ubiquitous in the manufacture of all forms of flat panel display (FPD). One of the most widely employed thin films is indium tin oxide (ITO) and metal films used electrically conductive materials in display industries. ITO is widely used for fabrication of LCD, OLED device, and many kinds of optical applications because of transparency in visible range and its high conductivity and metal films are also widely employed as electrodes in various electric and display industries. It is important that removing specific area of layer, such as ITO or metal film on substrate, to fabricate and repair electrode in display industries. In this work, we demonstrate efficient selective ablation process to ITO and aluminum film on glass using a femtosecond laser (${\lambda}p=1025nm$) respectively. The femtosecond laser with wavelength of 1025nm, pulse duration of 400fs, and the repetition rate of 100kHz was used for selectively removing ITO and Al on glass in the air. We can successfully remove the ITO and Al films with various pulse energies using a femtosecond laser.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.10
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• pp.1017-1022
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• 2013

Currently, various optical fiber tips are used to deliver laser beam for endoscopic surgery. In this paper, we demonstrated multidirectional (forward and side) firing optical fiber tip using a femtosecond micromachining and $CO_2$ laser polishing technology. We controlled the edge width of optical fiber tip, by modulating the condition of $CO_2$ laser, to regulate the amount of side and forward emission. The distal end of the optical fiber with core/clad diameter of $400/440{\mu}m$ was microstructured with cone shape by using a femtosecond laser. And then the microstructured optical fiber tip was polished by $CO_2$ laser beam result in smoothing and specular reflection at the surface of the cone structure. Finally, we operated the LightTools simulation and good agreement was generally found between the proposed model and experimental simulation.

• Laser Solutions
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• v.17 no.1
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• pp.1-6
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• 2014

Indium tin oxide (ITO) is an important transparent conducting oxide (TCO). ITO films have been widely used as transparent electrodes in optoelectronic devices such as organic light-emitting devices (OLED) because of their high electrical conductivity and high transmission in the visible wavelength. Finding ways to control ITO micromachining depth is important role in the fabrication and assembly of display field. This study presented the depth control of ITO patterns on glass substrate using a femtosecond laser and slit. In the proposed approach, a gaussian beam was transformed into a quasi-flat top beam by slit. In addition, pattern of square type shaped by slit were fabricated on the surfaces of ITO films using femtosecond laser pulse irradiation, under 1030nm, single pulse. Using femtosecond laser and slit, we selectively controlled forming depth and removed the ITO thin films with thickness 145nm on glass substrates. In particular, we studied the effect of pulse number on the ablation of ITO. Clean removal of the ITO layer was observed when the 6 pulse number at $2.8TW/cm^2$. Furthermore, the morphologies and fabricated depth were characterized using a optical microscope, atomic force microscope (AFM), and energy dispersive X-ray spectroscopy (EDS).

• Laser Solutions
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• v.9 no.3
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• pp.15-21
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• 2006

A Polypropylene (PP) film was ablated using a femtosecond laser with a center wavelength of 785 nm, a pulse width of 184 fs and a repetition rate of 1 kHz. Increments of both pulse energy and the shot number of pulses lead to co-occurrence of photochemical and thermal effect, demonstrated by the spatial expansion of rim on the surface of PP. The shapes of the laser-ablated PP films were imaged by a scanning electron microscope (SEM) and measured a 3D optical measurement system (NanoFocus). And, the oxygen transmission rate (ORT) of periodically laser-ablated PP film were characterized by oxygen permeability tester for modified atmosphere packaging (MAP) of fresh fruit and vegetable. Our results demonstrate that femtosecond pulsed laser is efficient tools for breathable packaging films in modifying the flow of air and gas into and out of a fresh produce container, where the micropatterns are specifically tailored in size, location and number which are easily controlled by laser pulse energy and pulse patterning system.