• 한국레이저가공학회지
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• 제11권4호
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• pp.13-20
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• 2008

The damage threshold measurement of gold films is carried out with ultrashort-pulse laser. An enhanced two temperature model is developed to encounter the limitation of linear modeling during ultrashort pulse laser ablation. In which the electron heat capacity is calculated using a quantum mechanical approach based on a Fermi-Dirac distribution, temperature-dependent electron thermal conductivity valid beyond the Fermi temperature is adopted, and reflectivity and absorption coefficient are estimated by applying a temperature-dependent electron relaxation time. The predicted damage threshold using the proposed enhanced modelclosely agreed with experimental results, demonstrating the importance of considering transient thermal and optical properties in the modeling of ultrashort pulse laser ablation.

• 한국광학회:학술대회논문집
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• 한국광학회 2002년도 하계학술발표회
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• pp.244-245
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• 2002

1 picosecond 보다 짧은 펄스길이를 갖는 초단파길이 레이저 펄스 (Ultrashort laser pulse, USLP)를 이용한 물질의 절제 (ablation)는 여타 nanosecond 영역의 레이저 절제와 많은 차이를 보인다(1). USLP는 순간 파워가 매우 높기 때문에 직접적으로 물질의 원자를 분리시켜 자유전자를 형성한다 이들 자유전자는 일반 선형흡수체 (linear absorbing chromophore)보다 흡수계수가 몇 십 배로 높아 대부분의 펄스 에너지가 표면 100-200 m 이내의 극히 작은 지역에 밀집되게 된다. (중략)

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.657-658
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• 2006

Although there are many numerical models to simulate fs laser ablation of metals, no model can analyze the ablation phenomena over a wide range of fluence. In this work, a numerical code for simulating the fs laser ablation phenomena of metals has been developed. The two temperature model is employed to predict the ablation rate and the crater shape of metals using phase explosion mechanism in the relatively high fluence regime. Also, the ultrashort thermoelastic model is used for the low fluence regime to account for spallation of the sample by high strain rate. It has been demonstrated that the thermoelastic stress generated within the sample can exceed the yield stress of the material even near the threshold fluence. Numerical computation results are compared with the experiment for Cu and Ni and show good agreement. Discussions are made on the hydrodynamic model considering phase change and hydrodynamic flow.

• 한국레이저가공학회지
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• 제11권1호
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• pp.19-24
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• 2008

It has been recognized that laser dicing of wafers results in low mechanical strength compared to the conventional sawing techniques. Thermal shock generated by rapid thermal loading is responsible for this problem. This work presents a two-dimensional ultra-short thermo elastic model for numerical simulation of femtosecond laser ablation of metals in the high-fluence regime where the phase explosion is dominant. Laser-induced thermoelastic stress is analyzed for Ni. The results show that the laser-induced thermal shock is large enough to induce mechanical damages.

• 한국기계가공학회지
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• 제12권6호
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• pp.23-29
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• 2013

In this paper, pure $I_{ph}$ and hybrid carbon nanotube reinforced $I_{ph}$ were sintered using the SPS(spark plasma sintering) method for high densification. A nanosecond laser (${\lambda}=1063nm$, ${\tau}P=10ns$) and a femtosecond laser (${\lambda}=1027nm$, ${\tau}P=380fs$) were installed on an optical system for the micromachining test. The ablation characteristics of the pure $I_{ph}$ and CNT/$I_{ph}$ composites, such as thermal effect and ablation depth, were investigated using FE-SEM and a confocal microscope device. Laser machining results for the two mating materials showed improved performances: CNT/$I_{ph}$ composites showed good surface morphology of hole drilling without a melting zone due to the composites' high thermal properties; also, the ablated depth of CNT/$I_{ph}$ was higher than that of pure $I_{ph}$.

• Journal of the Optical Society of Korea
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• 제7권3호
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• pp.166-173
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• 2003

This paper presents micromachining results on planar-lightwave-circuit (PLC) chips with Si substrate and the quartz substrate by using Ti:Sapphire femtosecond-pulsed laser. The ablation process with femtosecond laser pulses generates nothing of contamination, molten zone, microcracks, shock wave, delamination and recast layer. We also showed that the micromachine for PLC using femtosecond pulsed lasers is superior to that using nanosecond pulsed lasers. The insertion loss and the optical return loss of the 1 ${\times}$ 8 optical power splitters packaged with micromachined input- and output-port U-grooves were less than 11.0 ㏈ and more than 55 ㏈, respectively. The wavelength dependent loss (WDL) was distributed within $\pm$0.6 ㏈ and the polarization dependent loss (PDL) was less than 0.2 ㏈.

• Design & Manufacturing
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• 제17권2호
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• pp.55-61
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• 2023

With femtosecond (fs) laser pulse irradiation on metals, various types of nano- and micro-scale structures can be naturally induced at the surface through laser-matter interaction. Two notable structures are laser-induced periodic surface structures (LIPSSs) and cone/spike structures, which are known to significantly modify the optical and physical properties of metal surfaces. In this work, we irradiate fs laser pulses onto various types of metals, cold-rolled steel, pickled & oiled steel, Fe-18Cr-8Ni alloy, Zn-Mg-Al alloy coated steel, and pure Cu which can be useful for precise molding and imprinting processes, and adjust the morphological profiles of LIPSSs and cone/spike structures for clear structural coloration and a larger range of surface wettability control, respectively, by changing the fluence of laser and the speed of raster scan. The periods of LIPSSs on metals used in our experiments are nearly independent of laser fluence. Accordingly, the structural coloration of the surface with LIPSSs can be optimized with the morphological profile of LIPSSs, controlled only by the speed of the raster scan once the laser fluence is determined for each metal sample. However, different from LIPSSs, we demonstrate that the morphological profiles of the cone/spike structures, including their size, shape, and density, can be manipulated with both the laser fluence and the raster scan speed to increase a change in the contact angle. By injection molding and imprinting processes, it is expected that fs laser-induced surface structures on metals can be replicated to the plastic surfaces and potentially beneficial to control the optical and wetting properties of the surface of injection molded and imprinted products.

• 마이크로전자및패키징학회지
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• 제14권3호
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• pp.29-36
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• 2007

본 논문에서는 펨토초 레이저를 사용하여 정밀하고 효과적인 레이저 어블레이션 작업이 가능한지를 확인하기위한 수치 해석 및 가공 작업을 수행하였다. 이를 위하여 Si 재료 내부의 에너지 전달 메커니즘에 대한 수치해석을 실시하였으며, Si 웨이퍼에 각각 다른 조건으로 적용된 레이저 플루언스 값으로 $100\;{\mu}m$ 직경의 미세 관통 홀을 형성한 후, 광학현미경과 3차원 표면 형상 측정 장비를 사용하여 형성된 미세 관통 홀의 가공성과 열영향부의 발생 정도를 관찰하고 분석하였다. 실험 결과를 통해 레이저 플루언스 조건에 따른 열영향부의 발생 정도를 분석하였으며, 또한 최소한의 열영향부를 가지며 우수한 홀 가공성을 보이는 최적의 미세 관통 홀 가공 조건을 도출하였다.

• 한국레이저가공학회지
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• 제17권4호
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• pp.7-13
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• 2014

In this work, the application of laser induced breakdown spectroscopy (LIBS) for the composition analysis of thin $Cu(In,Ga)Se_2$ (CIGS) solar cell films ($1-2{\mu}m$ thickness) is reported. For the ablation of CIGS films, femtosecond (fs) laser (wavelength = 343nm, pulse width = 500fs) and nanosecond (ns) laser (wavelength = 266nm, pulse width = 5ns) were used under atmospheric environment. The emission spectra were detected with an intensified charge coupled device (ICCD) spectrometer and multichannel CCD spectrometer for fs-LIBS and ns-LIBS, respectively. The calibration curves for fs-LIBS and ns-LIBS intensity ratios of Ga/Cu, In/Cu, and Ga/In were generated with respect to the concentration ratios measured by inductively coupled plasma optical emission spectrometry (ICP-OES).

• 한국광학회지
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• 제28권6호
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• pp.356-360
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• 2017

ITO는 높은 전기 전도도와 가시광선, 근적외선 영역에서 투명성을 가진다. LCD, OLED 등을 포함한 광학에 적용되는 부품들의 제조에 투명전극으로 ITO가 사용되고 있다. 가시광선 영역에서의 투명성과 높은 전도도 때문에 다양한 전기, 디스플레이 센서의 전극으로 이용되었다. 한 가지 사안은 기판의 특성에 충격없이 ITO, 금속 필름같은 특정한 영역의 층을 제거하는 부분이다. 레이저를 사용한 유리 위의 ITO 제거는 기존 방법에 비해 친환경적이다. 본 연구는 펨토초 레이저와 나노초 레이저를 사용하여 ITO를 제거하는 비교분석이다.