• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.385-386
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• 2006

• Journal of the Korean Society for Precision Engineering
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• v.26 no.6
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• pp.36-40
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• 2009

Development of maskless lithography techniques can provide a potential solution for the photomask cost issue. Furthermore, it could open a market for small scale manufacturing applications. Since femtosecond lasers have been found suitable for processing of a wide range of materials with sub-micrometer resolution, it is attractive to use this technique for maskless lithography. As a femtosecond laser has recently been developed, both of high power and high photon density are easily obtained. The high photon density results in photopolymerization of photoresist whose absorption spectrum is shorter than that of the femtosecond laser. The maskless lithography using the two-photon absorption (TPA) makes micro structures. In this paper, we present a femtosecond laser direct write lithography for submicron PR patterning, which show great potential for future application.

• Journal of the Optical Society of Korea
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• v.13 no.1
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• pp.33-36
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• 2009

Laser ablation with femtosecond lasers is highly promising for microfabrication of materials. Also, the high peak power of femtosecond lasers could induce a multiphoton absorption to ablate transparent materials. Similar results have also been were obtained in the case of optical fibers. In this paper, we present our experimental results of femtosecond laser microstructuring of optical fiber and its applications to microelectronic components and fiber optic devices. Finally, we directly produced micro holes with femtosecond laser pulses in a single step by moving an optical fiber in a preprogrammed structure. When water was introduced into a hole drilled from the bottom surface of the optical fiber, the effects of blocking and redeposition of ablated material were greatly reduced and the aspect ratio of the depth of the hole was increased. We have presented circular and rectangular-shaped holes in optical fiber.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.669-670
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• 2006

Two-photon absorption coefficient of a series of dyes in polymer thin films was determined by measuring the femtosecond laser ablation threshold. The threshold value of polymeric thin films decreased gradually when the dopant increased. The two-photon absorption coefficient of the dye molecules dispersed in the polymer film was estimated by using the theoretical relationship between the ablation threshold of the blended polymeric thin films and the dye concentration. The relative values of two-photon absorption cross-section are in good agreement with those measured in solution. On the other hand, the absolute values are smaller than the latter.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.1 s.178
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• pp.48-55
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• 2006

• Journal of the Korean institute of surface engineering
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• v.49 no.6
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• pp.555-559
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• 2016

A biodegradable nanofiber scaffolds using electrospining provide fibrous guidance cues for controlling cell fate that mimic the native extracellular matrix (ECM). It can create a pattern using conventional electrospining method, but has a difficulty to generate one or more pattern structures. Femtosecond(fs) laser ablation has much interested in patterning on biomaterials in order to distinguish the fundamental or systemic interaction between cell and material surface. The ablated materials with a short pulse duration using femtosecond laser that allows for precise removal of materials without transition of the inherent material properties. In this study, linear grooves and circular craters were fabricated on electrospun nanofiber scaffolds (poly-L-lactide(PLLA)) by femtosecond laser patterning processes. As parametric studies, pulse energy and beam spot size were varied to determine the effects of the laser pulse on groove size. We confirmed controlling pulse energy to $5{\mu}J-20{\mu}J$ and variation of lens maginfication of 2X, 5X, 10X, 20X created grooves of width to approximately $5{\mu}m-50{\mu}m$. Our results demonstrate that femtosecond laser processing is an effective means for flexibly structuring the surface of electrospun PLLA nanofibers.

• Laser Solutions
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• v.9 no.3
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• pp.15-21
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• 2006

A Polypropylene (PP) film was ablated using a femtosecond laser with a center wavelength of 785 nm, a pulse width of 184 fs and a repetition rate of 1 kHz. Increments of both pulse energy and the shot number of pulses lead to co-occurrence of photochemical and thermal effect, demonstrated by the spatial expansion of rim on the surface of PP. The shapes of the laser-ablated PP films were imaged by a scanning electron microscope (SEM) and measured a 3D optical measurement system (NanoFocus). And, the oxygen transmission rate (ORT) of periodically laser-ablated PP film were characterized by oxygen permeability tester for modified atmosphere packaging (MAP) of fresh fruit and vegetable. Our results demonstrate that femtosecond pulsed laser is efficient tools for breathable packaging films in modifying the flow of air and gas into and out of a fresh produce container, where the micropatterns are specifically tailored in size, location and number which are easily controlled by laser pulse energy and pulse patterning system.

• Laser Solutions
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• v.14 no.2
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• pp.17-23
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• 2011

Active thin films are ubiquitous in the manufacture of all forms of flat panel display (FPD). One of the most widely employed thin films is indium tin oxide (ITO) and metal films used electrically conductive materials in display industries. ITO is widely used for fabrication of LCD, OLED device, and many kinds of optical applications because of transparency in visible range and its high conductivity and metal films are also widely employed as electrodes in various electric and display industries. It is important that removing specific area of layer, such as ITO or metal film on substrate, to fabricate and repair electrode in display industries. In this work, we demonstrate efficient selective ablation process to ITO and aluminum film on glass using a femtosecond laser (${\lambda}p=1025nm$) respectively. The femtosecond laser with wavelength of 1025nm, pulse duration of 400fs, and the repetition rate of 100kHz was used for selectively removing ITO and Al on glass in the air. We can successfully remove the ITO and Al films with various pulse energies using a femtosecond laser.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.3
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• pp.339-345
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• 2012

Electrospun meshed poly-caprolactone PCL was patterned by femtosecond laser with linear grooves. As parametric variables, focus spot size, pulse energy, and scanning speed were varied to determine the affects on groove size and the characteristics of the electrospun fiber at the edges of these grooves. The femtosecond laser was seen to be an effective means for flexibly structuring the surface of ES PCL scaffolds and the width of the ablated grooves was well controlled by laser energy and focus spot size. The ablation threshold was measured to be $14.9J/cm^2$ which is a little higher than other polymers. These affects were attributed to optical multiple reflections inside nano-fibers. By the laser-induced plasma at higher pulse energies, some melting of fibers was observed.

• Laser Solutions
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• v.17 no.1
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• pp.1-6
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• 2014

Indium tin oxide (ITO) is an important transparent conducting oxide (TCO). ITO films have been widely used as transparent electrodes in optoelectronic devices such as organic light-emitting devices (OLED) because of their high electrical conductivity and high transmission in the visible wavelength. Finding ways to control ITO micromachining depth is important role in the fabrication and assembly of display field. This study presented the depth control of ITO patterns on glass substrate using a femtosecond laser and slit. In the proposed approach, a gaussian beam was transformed into a quasi-flat top beam by slit. In addition, pattern of square type shaped by slit were fabricated on the surfaces of ITO films using femtosecond laser pulse irradiation, under 1030nm, single pulse. Using femtosecond laser and slit, we selectively controlled forming depth and removed the ITO thin films with thickness 145nm on glass substrates. In particular, we studied the effect of pulse number on the ablation of ITO. Clean removal of the ITO layer was observed when the 6 pulse number at $2.8TW/cm^2$. Furthermore, the morphologies and fabricated depth were characterized using a optical microscope, atomic force microscope (AFM), and energy dispersive X-ray spectroscopy (EDS).