• Title/Summary/Keyword: FeCoSiB amorphous film

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Study on the Sensing Function in Amorphous Magnetic Thin Films (아몰퍼스 자성박막의 센싱기능에 관한 연구)

  • 김남규;진성빈;신용진;임재근;서강수
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1996.05a
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    • pp.27-30
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    • 1996
  • In this paper, we prove through the experiments the possibility that Co-amorphous magnetic films can be used as high sensibility materials. We fabricate amorphous film of Fe$\sub$4.7/Co$\sub$74.3/Si$_2$B$\sub$19/ by using sputtering method at high frequency. Then, we not only measure the magnetic Properties of the annealed samples, but also observe the magnetic domain by using an Kerr effect optical-microscope. As the result, we find that the samples have high sensibility

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Smart Actuators Composed of Piezoelectric Ceramics and Highly Magnetostrictive films (압전세라믹 기판과 고자왜박막을 결합한 스마트액츄에이타)

  • Sin, Gwang-Ho;Arai, Ken-Ichi;Sa-Gong, Geon
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.49 no.5
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    • pp.289-293
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    • 2000
  • This paper presents a study on the linear compensation of nonlinear hysteric actuators using the highly magnetostrictive film pattern as a strain sensor. Elements had a hybrid structure, in which thin soft glass substrate with the highly magnetostrictive amorphous FeCoSiB film was bonded on the PZT piezoelectric substrate. The magnetostrictive film as a strain sensor detects the deflection of an actuator, and a voltage signal from the strain sensor related to the deflection of an actuator is used for the linear control of an actuator.

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Improvement of Sensitivity in Micro Magnetoelastic Strain Sensors (마이크로 자기탄성스트레인센서의 고감토화)

  • Shin, K.H.;Hur, J.;Choi, H.I.;Kim, Y.H.;Sa-Gong, G.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.423-426
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    • 2001
  • Recently we have reported that the meander-patterned amorphous FeCoSiB films exhibit large change in their high frequency impedance by applying a strain, suggesting that the films are very attractive for making of a highly sensitive strain sensor elements. In this study, the effect of anisotropy on a change in the impedance of sputtered amorphous film patterns was investigated in the frequency range from 1MHz to 1GHz. As a function of applied strains, the high frequency impedance was extremely changed in the case of film patterns with transverse anisotropy due to excellent magnetomechanical coupling properties. As a summary, the maximum figure of merit f has measured about 2600 in the case of transverse anisotropy, and about 500 in the case of longitudinal anisotropy at 500 MHz. These values of F are approximately more than 1000 times higher than that of a conventional metal strain gauge (F 2) and more than 10 times higher than that of a semiconductor gauge (F 200).

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